Atsutoshi INOKUCHI

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,495,439
- Issue date Nov 8, 2022
- Tokyo Electron Limited
- Kohei Mizota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 9,767,994
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 9,378,942
- Issue date Jun 28, 2016
- Tokyo Electron Limited
- Takehisa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 8,915,999
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin film, method of forming the same, and semiconductor light-emit...
- Patent number 8,592,810
- Issue date Nov 26, 2013
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Compound-type thin film, method of forming the same, and electronic...
- Patent number 8,188,468
- Issue date May 29, 2012
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interlayer insulating film, wiring structure and electronic device...
- Patent number 7,923,819
- Issue date Apr 12, 2011
- National Iniversity Corporation Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230386787
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Atsutoshi INOKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, AND METHOD OF MAINTAINING INTERIOR OF...
- Publication number 20210066048
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Kohei MIZOTA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20150069674
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Masahiro OKESAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20140099734
- Publication date Apr 10, 2014
- TOKYO ELECTRON LIMITED
- Takehisa SAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM, METHOD OF FORMING THE SAME, AND SEMICONDUCTOR LIGHT-EMIT...
- Publication number 20120205652
- Publication date Aug 16, 2012
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110215384
- Publication date Sep 8, 2011
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERLAYER INSULATING FILM, WIRING STRUCTURE, AND METHODS OF MANUFA...
- Publication number 20110127075
- Publication date Jun 2, 2011
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20100178775
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOUND-TYPE THIN FILM, METHOD OF FORMING THE SAME, AND ELECTRONIC...
- Publication number 20100139762
- Publication date Jun 10, 2010
- NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...
- Publication number 20100101834
- Publication date Apr 29, 2010
- NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERLAYER INSULATING FILM, WIRING STRUCTURE AND ELECTRONIC DEVICE...
- Publication number 20100032844
- Publication date Feb 11, 2010
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Atsutoshi INOKUCHI

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Shower plate sintered integrally with gas release hole member and m...

Deposition method and deposition apparatus

Shower plate sintered integrally with gas release hole member and m...

Thin film, method of forming the same, and semiconductor light-emit...

Compound-type thin film, method of forming the same, and electronic...

Interlayer insulating film, wiring structure and electronic device...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, AND METHOD OF MAINTAINING INTERIOR OF...

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

DEPOSITION METHOD AND DEPOSITION APPARATUS

THIN FILM, METHOD OF FORMING THE SAME, AND SEMICONDUCTOR LIGHT-EMIT...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

INTERLAYER INSULATING FILM, WIRING STRUCTURE, AND METHODS OF MANUFA...

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

COMPOUND-TYPE THIN FILM, METHOD OF FORMING THE SAME, AND ELECTRONIC...

INTERLAYER INSULATION FILM, INTERCONNECT STRUCTURE, AND METHODS OF...

INTERLAYER INSULATING FILM, WIRING STRUCTURE AND ELECTRONIC DEVICE...