Atul Gupta

Person

Beverly, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,937,004
- Issue date Jan 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Angled multi-step masking for patterned implantation
- Patent number 8,765,583
- Issue date Jul 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Self-aligned ion implantation for IBC solar cells
- Patent number 8,735,234
- Issue date May 27, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for processing a substrate
- Patent number 8,685,846
- Issue date Apr 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Bifacial solar cell using ion implantation
- Patent number 8,679,868
- Issue date Mar 25, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
LED mesa sidewall isolation by ion implantation
- Patent number 8,664,027
- Issue date Mar 4, 2014
- Varian Semiconductor Associates, Inc.
- San Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing high efficiency solar cell with directional doping
- Patent number 8,664,100
- Issue date Mar 4, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Handling beam glitches during ion implantation of workpieces
- Patent number 8,598,547
- Issue date Dec 3, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Bifacial solar cell using ion implantation
- Patent number 8,546,157
- Issue date Oct 1, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Use of dopants with different diffusivities for solar cell manufacture
- Patent number 8,461,032
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Masked ion implant with fast-slow scan
- Patent number 8,461,553
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus and method for controllably implanting workpieces
- Patent number 8,461,030
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Use of a shadow mask and a soft mask for aligned implants in solar...
- Patent number 8,372,737
- Issue date Feb 12, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Integrated shadow mask/carrier for patterned ion implantation
- Patent number 8,216,923
- Issue date Jul 10, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Bifacial solar cell using ion implantation
- Patent number 8,153,456
- Issue date Apr 10, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Apparatus for measuring beam characteristics and a method thereof
- Patent number 8,097,866
- Issue date Jan 17, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuously optimized solar cell metallization design through feed...
- Patent number 8,084,293
- Issue date Dec 27, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Masked ion implant with fast-slow scan
- Patent number 8,008,176
- Issue date Aug 30, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Use of chained implants in solar cell
- Patent number 7,888,249
- Issue date Feb 15, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for ion beam angle spread control
- Patent number 7,868,305
- Issue date Jan 11, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High tilt implant angle performance using in-axis tilt
- Patent number 7,820,985
- Issue date Oct 26, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Use of chained implants in solar cells
- Patent number 7,727,866
- Issue date Jun 1, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Technique for improving ion implantation throughput and dose unifor...
- Patent number 7,683,347
- Issue date Mar 23, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for improving the performance and extending the lifetime...
- Patent number 7,655,931
- Issue date Feb 2, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining angle misalignment in beam line ion implanters
- Patent number 7,642,529
- Issue date Jan 5, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for improving ion implantation based on ion beam angle-re...
- Patent number 7,561,983
- Issue date Jul 14, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for improving uniformity of a ribbon beam
- Patent number 7,525,103
- Issue date Apr 28, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Kenneth H. Purser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal doping apparatus and method
- Patent number 7,524,743
- Issue date Apr 28, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for beam density measurement in two dimensions
- Patent number 7,453,070
- Issue date Nov 18, 2008
- Varian Semiconductor Associates, Inc.
- Atul Gupta
- G01 - MEASURING TESTING
Information Patent Grant
Technique for boron implantation
- Patent number 7,397,048
- Issue date Jul 8, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Vikram Singh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BACK JUNCTION SOLAR CELL WITH ENHANCED EMITTER LAYER
- Publication number 20140238478
- Publication date Aug 28, 2014
- SUNIVA, INC.
- Daniel L Meier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE
- Publication number 20140154834
- Publication date Jun 5, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P.T. Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BUS BAR FOR A SOLAR CELL
- Publication number 20140090702
- Publication date Apr 3, 2014
- SUNIVA, INC.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BIFACIAL SOLAR CELL USING ION IMPLANTATION
- Publication number 20140030844
- Publication date Jan 30, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOLAR CELL FABRICATION USING A PRE-DOPING DIELECTRIC LAYER
- Publication number 20130247981
- Publication date Sep 26, 2013
- SUNIVA, INC.
- VIJAY YELUNDUR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20130234034
- Publication date Sep 12, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION
- Publication number 20120244692
- Publication date Sep 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
LED MESA SIDEWALL ISOLATION BY ION IMPLANTATION
- Publication number 20120238046
- Publication date Sep 20, 2012
- Varian Semiconductor Equipment Associates, Inc.
- San Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANGLED MULTI-STEP MASKING FOR PATTERNED IMPLANTATION
- Publication number 20120214273
- Publication date Aug 23, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
BIFACIAL SOLAR CELL USING ION IMPLANTATION
- Publication number 20120202317
- Publication date Aug 9, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Integrated Shadow Mask/Carrier for Pattern Ion Implantation
- Publication number 20120083102
- Publication date Apr 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
CONTINUOUSLY OPTIMIZED SOLAR CELL METALLIZATION DESIGN THROUGH FEED...
- Publication number 20120064661
- Publication date Mar 15, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
MANUFACTURING HIGH EFFICIENCY SOLAR CELL WITH DIRECTIONAL DOPING
- Publication number 20120006392
- Publication date Jan 12, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Atul GUPTA
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
HANDLING BEAM GLITCHES DURING ION IMPLANTATION OF WORKPIECES
- Publication number 20110315899
- Publication date Dec 29, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. LOW
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Masked Ion Implant with Fast-Slow Scan
- Publication number 20110272602
- Publication date Nov 10, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P.T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Continuously Optimized Solar Cell Metallization Design through Feed...
- Publication number 20110244625
- Publication date Oct 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Benjamin Riordon
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SELF-ALIGNED ION IMPLANTATION FOR IBC SOLAR CELLS
- Publication number 20110201188
- Publication date Aug 18, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
BIFACIAL SOLAR CELL USING ION IMPLANTATION
- Publication number 20110177652
- Publication date Jul 21, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES
- Publication number 20110124186
- Publication date May 26, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MASKED ION IMPLANT WITH FAST-SLOW SCAN
- Publication number 20110039367
- Publication date Feb 17, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P.T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
COUNTERDOPING FOR SOLAR CELLS
- Publication number 20100224240
- Publication date Sep 9, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas BATEMAN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
TECHNIQUE FOR PROCESSING A SUBSTRATE
- Publication number 20100197125
- Publication date Aug 5, 2010
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOICTES, INC.
- Russell J. Low
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
USE OF CHAINED IMPLANTS IN SOLAR CELL
- Publication number 20100197126
- Publication date Aug 5, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas BATEMAN
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS
- Publication number 20100090131
- Publication date Apr 15, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped Layers for Reducing Electromigration
- Publication number 20100048018
- Publication date Feb 25, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Atul Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Maskless Doping Technique for Solar Cells
- Publication number 20090317937
- Publication date Dec 24, 2009
- Atul Gupta
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ESTABLISHING A HIGH PHOSPHORUS CONCENTRATION IN SOLAR CELLS
- Publication number 20090227061
- Publication date Sep 10, 2009
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
COUNTERDOPING FOR SOLAR CELLS
- Publication number 20090227095
- Publication date Sep 10, 2009
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
USE OF CHAINED IMPLANTS IN SOLAR CELLS
- Publication number 20090227094
- Publication date Sep 10, 2009
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE
- Publication number 20090227097
- Publication date Sep 10, 2009
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Person

Patents Grantslast 30 patents

Apparatus and method for controllably implanting workpieces

Angled multi-step masking for patterned implantation

Self-aligned ion implantation for IBC solar cells

Technique for processing a substrate

Bifacial solar cell using ion implantation

LED mesa sidewall isolation by ion implantation

Manufacturing high efficiency solar cell with directional doping

Handling beam glitches during ion implantation of workpieces

Bifacial solar cell using ion implantation

Use of dopants with different diffusivities for solar cell manufacture

Masked ion implant with fast-slow scan

Apparatus and method for controllably implanting workpieces

Use of a shadow mask and a soft mask for aligned implants in solar...

Integrated shadow mask/carrier for patterned ion implantation

Bifacial solar cell using ion implantation

Apparatus for measuring beam characteristics and a method thereof

Continuously optimized solar cell metallization design through feed...

Masked ion implant with fast-slow scan

Use of chained implants in solar cell

Technique for ion beam angle spread control

High tilt implant angle performance using in-axis tilt

Use of chained implants in solar cells

Technique for improving ion implantation throughput and dose unifor...

Techniques for improving the performance and extending the lifetime...

Method of determining angle misalignment in beam line ion implanters

Technique for improving ion implantation based on ion beam angle-re...

Technique for improving uniformity of a ribbon beam

Conformal doping apparatus and method

Methods and apparatus for beam density measurement in two dimensions

Technique for boron implantation

Patents Applicationslast 30 patents

BACK JUNCTION SOLAR CELL WITH ENHANCED EMITTER LAYER

USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE

BUS BAR FOR A SOLAR CELL

BIFACIAL SOLAR CELL USING ION IMPLANTATION

SOLAR CELL FABRICATION USING A PRE-DOPING DIELECTRIC LAYER

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION

LED MESA SIDEWALL ISOLATION BY ION IMPLANTATION

ANGLED MULTI-STEP MASKING FOR PATTERNED IMPLANTATION

BIFACIAL SOLAR CELL USING ION IMPLANTATION

Integrated Shadow Mask/Carrier for Pattern Ion Implantation

CONTINUOUSLY OPTIMIZED SOLAR CELL METALLIZATION DESIGN THROUGH FEED...

MANUFACTURING HIGH EFFICIENCY SOLAR CELL WITH DIRECTIONAL DOPING

HANDLING BEAM GLITCHES DURING ION IMPLANTATION OF WORKPIECES

Masked Ion Implant with Fast-Slow Scan

Continuously Optimized Solar Cell Metallization Design through Feed...

SELF-ALIGNED ION IMPLANTATION FOR IBC SOLAR CELLS

BIFACIAL SOLAR CELL USING ION IMPLANTATION

APPARATUS AND METHOD FOR CONTROLLABLY IMPLANTING WORKPIECES

MASKED ION IMPLANT WITH FAST-SLOW SCAN

COUNTERDOPING FOR SOLAR CELLS

TECHNIQUE FOR PROCESSING A SUBSTRATE

USE OF CHAINED IMPLANTS IN SOLAR CELL

METHOD OF DETERMINING ANGLE MISALIGNMENT IN BEAM LINE ION IMPLANTERS

Doped Layers for Reducing Electromigration

Maskless Doping Technique for Solar Cells

ESTABLISHING A HIGH PHOSPHORUS CONCENTRATION IN SOLAR CELLS

COUNTERDOPING FOR SOLAR CELLS

USE OF CHAINED IMPLANTS IN SOLAR CELLS

USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE