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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming dielectric films, new precursors and their use in...
Patent number
9,583,335
Issue date
Feb 28, 2017
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a tantalum-containing layer on a substrate
Patent number
9,085,823
Issue date
Jul 21, 2015
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Niobium and vanadium organometallic precursors for thin film deposi...
Patent number
9,040,372
Issue date
May 26, 2015
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a titanium-containing layer on a substrate using...
Patent number
8,853,075
Issue date
Oct 7, 2014
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
Satoko Gatineau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming dielectric films, new precursors and their use in...
Patent number
8,668,957
Issue date
Mar 11, 2014
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a metal-containing dielectric film
Patent number
8,470,402
Issue date
Jun 25, 2013
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Niobium and vanadium organometallic precursors for thin film deposi...
Patent number
8,460,989
Issue date
Jun 11, 2013
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for depositing boron compounds by CVD or PVD
Patent number
8,324,014
Issue date
Dec 4, 2012
L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
Audrey Pinchart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHODS OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE I...
Publication number
20170125242
Publication date
May 4, 2017
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20140242812
Publication date
Aug 28, 2014
L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NIOBIUM AND VANADIUM ORGANOMETALLIC PRECURSORS FOR THIN FILM DEPOSI...
Publication number
20130295778
Publication date
Nov 7, 2013
Nicolas BLASCO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING A TITANIUM-CONTAINING LAYER ON A SUBSTRATE USING...
Publication number
20110275215
Publication date
Nov 10, 2011
Satoko Gatineau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING A TANTALUM-CONTAINING LAYER ON A SUBSTRATE
Publication number
20110244681
Publication date
Oct 6, 2011
L'Air Liquide Societe Anonyme pour I'Etude et I'Expioitation des Procedes Geo...
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20110207337
Publication date
Aug 25, 2011
L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
Christian DUSSARRAT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NIOBIUM AND VANADIUM ORGANOMETALLIC PRECURSORS FOR THIN FILM DEPOSI...
Publication number
20110195574
Publication date
Aug 11, 2011
L'Air Liquide Societe Anonyme Pour L'Etude Et L'Ex ploitation Des Procedes Ge...
Nicolas Blasco
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS FOR DEPOSITING BORON COMPOUNDS BY CVD OR PVD
Publication number
20100227430
Publication date
Sep 9, 2010
Audrey Pinchart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
Publication number
20090203222
Publication date
Aug 13, 2009
Christian Dussarrat
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...