Ayumi HIGUCHI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,919,051
- Issue date Mar 5, 2024
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,881,403
- Issue date Jan 23, 2024
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,413,662
- Issue date Aug 16, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi Yoshida
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 11,410,853
- Issue date Aug 9, 2022
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,260,436
- Issue date Mar 1, 2022
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Substrate processing device
- Patent number 11,217,461
- Issue date Jan 4, 2022
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,145,516
- Issue date Oct 12, 2021
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing liquid supplying apparatus, substrate processing apparat...
- Patent number 11,094,564
- Issue date Aug 17, 2021
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method
- Patent number 11,018,017
- Issue date May 25, 2021
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, method for creating substrate cleaning r...
- Patent number 10,840,083
- Issue date Nov 17, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution feeder, substrate treatment apparatus, method for...
- Patent number 10,816,141
- Issue date Oct 27, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,717,117
- Issue date Jul 21, 2020
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
Waste liquid treatment method and waste liquid treatment apparatus
- Patent number 10,710,913
- Issue date Jul 14, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,651,029
- Issue date May 12, 2020
- SCREEN Holdings Co., Ltd.
- Hiroaki Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,622,204
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B08 - CLEANING
Information Patent Grant
Substrate processing method, and substrate processing device
- Patent number 10,312,114
- Issue date Jun 4, 2019
- SCREEN Holdings Co., Ltd.
- Asuka Yoshizumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment cup cleaning method, substrate treatment method, and subs...
- Patent number 9,984,903
- Issue date May 29, 2018
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 9,768,042
- Issue date Sep 19, 2017
- SCREEN Holdings Co., Ltd.
- Asuka Wakita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment apparatus
- Patent number 9,548,197
- Issue date Jan 17, 2017
- SCREEN Holdings Co., Ltd.
- Asuka Yoshizumi
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate processing method for...
- Patent number 9,508,568
- Issue date Nov 29, 2016
- SCREEN Holdings Co., Ltd.
- Asuka Yoshizumi
- B08 - CLEANING
Information Patent Grant
Substrate treatment method
- Patent number 9,230,836
- Issue date Jan 5, 2016
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B08 - CLEANING
Information Patent Grant
Nozzle, substrate processing apparatus, and substrate processing me...
- Patent number 8,888,925
- Issue date Nov 18, 2014
- SCREEN Holdings Co., Ltd.
- Masanobu Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of removing particles
- Patent number 7,981,286
- Issue date Jul 19, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Ayumi Higuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,841,788
- Issue date Nov 30, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Ayumi Higuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and method
- Patent number 7,392,814
- Issue date Jul 1, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, TRAINI...
- Publication number 20230205178
- Publication date Jun 29, 2023
- SCREEN Holdings Co., Ltd.
- Masaki INABA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20220339676
- Publication date Oct 27, 2022
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220189773
- Publication date Jun 16, 2022
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20200303207
- Publication date Sep 24, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200290101
- Publication date Sep 17, 2020
- SCREEN Holdings Co., Ltd.
- Naoyuki OSADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200168467
- Publication date May 28, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20200086360
- Publication date Mar 19, 2020
- SCREEN Holdings Co., Ltd.
- Yukifumi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20190198356
- Publication date Jun 27, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20190189461
- Publication date Jun 20, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD, METHOD FOR CREATING SUBSTRATE CLEANING R...
- Publication number 20190176196
- Publication date Jun 13, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B08 - CLEANING
Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARAT...
- Publication number 20190131144
- Publication date May 2, 2019
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CHEMICAL SOLUTION FEEDER, SUBSTRATE TREATMENT APPARATUS, METHOD FOR...
- Publication number 20190056066
- Publication date Feb 21, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180236510
- Publication date Aug 23, 2018
- SCREEN Holdings Co., Ltd.
- Naoyuki OSADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WASTE LIQUID TREATMENT METHOD AND WASTE LIQUID TREATMENT APPARATUS
- Publication number 20180079668
- Publication date Mar 22, 2018
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
TREATMENT CUP CLEANING METHOD, SUBSTRATE TREATMENT METHOD, AND SUBS...
- Publication number 20170278724
- Publication date Sep 28, 2017
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170236703
- Publication date Aug 17, 2017
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170186599
- Publication date Jun 29, 2017
- SCREEN Holdings Co., Ltd.
- Hiroaki TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PIPE CLEANING METHOD
- Publication number 20170014873
- Publication date Jan 19, 2017
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160293447
- Publication date Oct 6, 2016
- SCREEN Holdings Co., Ltd.
- Akihisa IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE
- Publication number 20160247698
- Publication date Aug 25, 2016
- SCREEN Holdings Co., Ltd.
- Asuka YOSHIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150340251
- Publication date Nov 26, 2015
- SCREEN Holdings Co., Ltd.
- Asuka WAKITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT CUP CLEANING METHOD, SUBSTRATE TREATMENT METHOD, AND SUBS...
- Publication number 20150090301
- Publication date Apr 2, 2015
- Ayumi HIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS
- Publication number 20150083167
- Publication date Mar 26, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Asuka YOSHIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOZZLE, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150053244
- Publication date Feb 26, 2015
- SCREEN Holdings Co., Ltd.
- Masanobu SATO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...
- Publication number 20150040951
- Publication date Feb 12, 2015
- Dainippon Screen Mfg. Co., Ltd.
- Asuka YOSHIZUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20120240958
- Publication date Sep 27, 2012
- Ayumi HIGUCHI
- B08 - CLEANING
Information Patent Application
NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...
- Publication number 20120222707
- Publication date Sep 6, 2012
- Masanobu SATO
- B08 - CLEANING
Information Patent Application
Substrate processing apparatus and method
- Publication number 20070235064
- Publication date Oct 11, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20070223916
- Publication date Sep 27, 2007
- Ayumi HIGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and method
- Publication number 20060137719
- Publication date Jun 29, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Koji Hasegawa
- B08 - CLEANING

Ayumi HIGUCHI

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus and substrate cleaning method

Substrate processing method and substrate processing apparatus

Substrate cleaning apparatus and substrate cleaning method

Substrate processing method and substrate processing device

Substrate processing apparatus and substrate processing method

Substrate processing device

Substrate processing method and substrate processing apparatus

Processing liquid supplying apparatus, substrate processing apparat...

Substrate treatment method

Substrate cleaning method, method for creating substrate cleaning r...

Chemical solution feeder, substrate treatment apparatus, method for...

Substrate processing apparatus and substrate processing method

Waste liquid treatment method and waste liquid treatment apparatus

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing method, and substrate processing device

Treatment cup cleaning method, substrate treatment method, and subs...

Substrate processing method and substrate processing apparatus

Substrate treatment method and substrate treatment apparatus

Substrate processing apparatus and substrate processing method for...

Substrate treatment method

Nozzle, substrate processing apparatus, and substrate processing me...

Substrate processing apparatus and method of removing particles

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, TRAINI...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING DEVICE

SUBSTRATE TREATMENT METHOD

SUBSTRATE CLEANING METHOD, METHOD FOR CREATING SUBSTRATE CLEANING R...

PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARAT...

CHEMICAL SOLUTION FEEDER, SUBSTRATE TREATMENT APPARATUS, METHOD FOR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

WASTE LIQUID TREATMENT METHOD AND WASTE LIQUID TREATMENT APPARATUS

TREATMENT CUP CLEANING METHOD, SUBSTRATE TREATMENT METHOD, AND SUBS...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM AND PIPE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

TREATMENT CUP CLEANING METHOD, SUBSTRATE TREATMENT METHOD, AND SUBS...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS

NOZZLE, AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD FOR...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

NOZZLE, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING ME...

Substrate processing apparatus and method

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Substrate processing apparatus and method