B. Michelle Chen

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for annealing copper films
- Patent number 7,192,494
- Issue date Mar 20, 2007
- Applied Materials, Inc.
- B. Michelle Chen
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR ANNEALING COPPER FILMS
- Publication number 20070128869
- Publication date Jun 7, 2007
- B. Michelle Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus for annealing copper films
- Publication number 20040003873
- Publication date Jan 8, 2004
- APPLIED MATERIALS, INC.
- B. Michelle Chen
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR