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Deurne, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
10,429,741
Issue date
Oct 1, 2019
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
10,151,984
Issue date
Dec 11, 2018
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and in-line cleaning apparatus
Patent number
9,785,061
Issue date
Oct 10, 2017
ASML Netherlands B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and in-line cleaning apparatus
Patent number
9,405,205
Issue date
Aug 2, 2016
ASML Netherlands B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithographic apparatus with a barrier between a projectio...
Patent number
9,176,371
Issue date
Nov 3, 2015
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and in-line cleaning apparatus
Patent number
9,036,128
Issue date
May 19, 2015
ASML Netherlands B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
Patent number
9,013,672
Issue date
Apr 21, 2015
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
Patent number
8,947,629
Issue date
Feb 3, 2015
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of operating the apparatus with a...
Patent number
8,730,447
Issue date
May 20, 2014
ASML Netherlands B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method of operating the apparatus
Patent number
8,564,757
Issue date
Oct 22, 2013
ASML Netherlands B.V.
Bauke Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and in-line cleaning apparatus
Patent number
8,243,255
Issue date
Aug 14, 2012
ASML Netherlands B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic appararus and method
Patent number
8,094,287
Issue date
Jan 10, 2012
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning device and a lithographic apparatus cleaning method
Patent number
8,011,377
Issue date
Sep 6, 2011
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Cleaning device and a lithographic apparatus cleaning method
Patent number
7,900,641
Issue date
Mar 8, 2011
ASML Netherlands B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
Patent number
7,866,330
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Bauke Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Cleaning device, a lithographic apparatus and a lithographic appara...
Patent number
7,841,352
Issue date
Nov 30, 2010
ASML Netherlands B.V.
Bauke Jansen
B08 - CLEANING
Information
Patent Grant
Immersion lithography objective
Patent number
7,649,702
Issue date
Jan 19, 2010
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,446,849
Issue date
Nov 4, 2008
ASML Netherlands B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20190086814
Publication date
Mar 21, 2019
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
Publication number
20160342098
Publication date
Nov 24, 2016
ASML NETHERLANDS B.V.
Roelof Frederik DE GRAAF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20160124319
Publication date
May 5, 2016
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
Publication number
20150323875
Publication date
Nov 12, 2015
ASML NETHERLANDS B.V.
Roelof Frederik DE GRAAF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND IN-LINE CLEANING APPARATUS
Publication number
20120281190
Publication date
Nov 8, 2012
ASML NETHERLANDS B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CLEANING DEVICE AND A LITHOGRAPHIC APPARATUS CLEANING METHOD
Publication number
20110292359
Publication date
Dec 1, 2011
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
CLEANING DEVICE, A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARA...
Publication number
20110069290
Publication date
Mar 24, 2011
ASML NETHERLANDS B.V.
Bauke JANSEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20100328634
Publication date
Dec 30, 2010
ASML NETHERLANDS B.V.
Bauke Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF GENERATING THE APPARATUS
Publication number
20100066988
Publication date
Mar 18, 2010
ASML NETHERLANDS B.V.
Jeroen Peter Johannes Bruijstens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
Publication number
20100066987
Publication date
Mar 18, 2010
ASML NETHERLANDS B.V.
Jeroen Peter Johannes BRUIJSTENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and in-line cleaning apparatus
Publication number
20090195761
Publication date
Aug 6, 2009
ASML NETHERLANDS B.V.
Roelof Frederik De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic appararus and method
Publication number
20090027638
Publication date
Jan 29, 2009
ASML NETHERLANDS B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic appara...
Publication number
20090015805
Publication date
Jan 15, 2009
ASML NETHERLANDS B.V.
Bauke Jansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning device and a lithographic apparatus cleaning method
Publication number
20090015804
Publication date
Jan 15, 2009
ASML NETHERLANDS B.V.
Anthonius Martinus De Jong
B08 - CLEANING
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic cleani...
Publication number
20080284990
Publication date
Nov 20, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Cleaning device and a lithographic apparatus cleaning method
Publication number
20080271747
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic appara...
Publication number
20080273181
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Anthonius Martinus Cornelis Petrus De Jong
B08 - CLEANING
Information
Patent Application
Cleaning device, a lithographic apparatus and a lithographic appara...
Publication number
20080271750
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Bauke Jansen
B08 - CLEANING
Information
Patent Application
IMMERSION LITHOGRAPHY OBJECTIVE
Publication number
20080212211
Publication date
Sep 4, 2008
Carl Zeiss SMT AG
Bernhard Gellrich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060017894
Publication date
Jan 26, 2006
ASML NETHERLAND B.V.
Tjarko Adriaan Rudolf Van Empel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY