Benjamin Schmiege

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods of forming self-aligned vias
- Patent number 11,094,544
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- David Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ruthenium precursors for ALD and CVD thin film deposition and uses...
- Patent number 10,906,925
- Issue date Feb 2, 2021
- Applied Materials, Inc.
- Benjamin Schmiege
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods and apparatus for depositing yttrium-containing films
- Patent number 10,760,159
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ formation of non-volatile lanthanide thin film precursors a...
- Patent number 10,643,838
- Issue date May 5, 2020
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective deposition defects removal by chemical etch
- Patent number 10,643,840
- Issue date May 5, 2020
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,633,743
- Issue date Apr 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ruthenium precursors for ALD and CVD thin film deposition and uses...
- Patent number 10,577,386
- Issue date Mar 3, 2020
- Applied Materials, Inc.
- Benjamin Schmiege
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Oxide and metal removal
- Patent number 10,465,294
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Xikun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming self-aligned vias
- Patent number 10,410,865
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precursors for deposition of metal, metal nitride and metal oxide b...
- Patent number 10,323,054
- Issue date Jun 18, 2019
- Applied Materials, Inc.
- Benjamin Schmiege
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods of etching films comprising transition metals
- Patent number 10,297,462
- Issue date May 21, 2019
- Applied Materials Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective dry etching of metal films comprising multiple metal oxides
- Patent number 10,242,885
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of etching films with reduced surface roughness
- Patent number 10,233,547
- Issue date Mar 19, 2019
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming self-aligned vias
- Patent number 10,083,834
- Issue date Sep 25, 2018
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 10,000,853
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of etching films with reduced surface roughness
- Patent number 9,896,770
- Issue date Feb 20, 2018
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition methods for uniform and conformal hybrid titanium oxide...
- Patent number 9,881,787
- Issue date Jan 30, 2018
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of etching films comprising transition metals
- Patent number 9,799,533
- Issue date Oct 24, 2017
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controllable non-volatile metal removal
- Patent number 9,611,552
- Issue date Apr 4, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of etching films with reduced surface roughness
- Patent number 9,540,736
- Issue date Jan 10, 2017
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt removal for chamber clean or pre-clean process
- Patent number 9,528,183
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Kai Wu
- B08 - CLEANING
Information Patent Grant
Film deposition using spatial atomic layer deposition or pulsed che...
- Patent number 9,514,933
- Issue date Dec 6, 2016
- Applied Materials, Inc.
- Yu Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selectively etching metals and metal nitrides conformally
- Patent number 9,449,843
- Issue date Sep 20, 2016
- Applied Materials, Inc.
- Mikhail Korolik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of etching films comprising transition metals
- Patent number 9,390,940
- Issue date Jul 12, 2016
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxide and metal removal
- Patent number 9,309,598
- Issue date Apr 12, 2016
- Applied Materials, Inc.
- Xikun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films comprising cobalt and cobalt nitrides
- Patent number 9,005,704
- Issue date Apr 14, 2015
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR DEPOSITING YTTRIUM-CONTAINING FILMS
- Publication number 20200392624
- Publication date Dec 17, 2020
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ruthenium Precursors For ALD And CVD Thin Film Deposition And Uses...
- Publication number 20200148712
- Publication date May 14, 2020
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Self-Aligned Vias
- Publication number 20190385849
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Deposition Defects Removal By Chemical Etch
- Publication number 20190080904
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lanthanide, Yttrium and Scandium precursors for ALD, CVD and Thin F...
- Publication number 20190062916
- Publication date Feb 28, 2019
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for Depositing Yttrium-Containing Films
- Publication number 20190017171
- Publication date Jan 17, 2019
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Forming Self-Aligned Vias
- Publication number 20190013202
- Publication date Jan 10, 2019
- APPLIED MATERIALS,INC.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
In-Situ Formation of Non-Volatile Lanthanide Thin Film Precursors a...
- Publication number 20180366322
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective Dry Etching of Metal Films Comprising Multiple Metal Oxides
- Publication number 20180342403
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Jeffrey W. Anthis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20180265988
- Publication date Sep 20, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Etching Films with Reduced Surface Roughness
- Publication number 20180195179
- Publication date Jul 12, 2018
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ruthenium Precursors For ALD And CVD Thin Film Deposition And Uses...
- Publication number 20180155379
- Publication date Jun 7, 2018
- Applied Materials, Inc.
- Benjamin Schmiege
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Precursors For Deposition Of Metal, Metal Nitride And Metal Oxide B...
- Publication number 20180148466
- Publication date May 31, 2018
- Applied Materials, Inc.
- Benjamin Schmiege
- C07 - ORGANIC CHEMISTRY
Information Patent Application
Methods Of Forming Self-Aligned Vias
- Publication number 20180096847
- Publication date Apr 5, 2018
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Etching Films Comprising Transition Metals
- Publication number 20180040486
- Publication date Feb 8, 2018
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lanthanide, Yttrium And Scandium Precursors For ALD, CVD And Thin F...
- Publication number 20170356083
- Publication date Dec 14, 2017
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20170159188
- Publication date Jun 8, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Etching Films With Reduced Surface Roughness
- Publication number 20170096740
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- Benjamin Schmiege
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Methods For Uniform And Conformal Hybrid Titanium Oxide...
- Publication number 20160372324
- Publication date Dec 22, 2016
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods Of Etching Films Comprising Transition Metals
- Publication number 20160293449
- Publication date Oct 6, 2016
- Applied Materials, Inc.
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System And Method For Controllable Non-Volatile Metal Removal
- Publication number 20160265121
- Publication date Sep 15, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Tsung-Liang Chen
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
OXIDE AND METAL REMOVAL
- Publication number 20160222522
- Publication date Aug 4, 2016
- Applied Materials, Inc.
- Xikun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Etching Films With Reduced Surface Roughness
- Publication number 20160032460
- Publication date Feb 4, 2016
- Applied Materials, Inc.
- Benjamin Schmiege
- C30 - CRYSTAL GROWTH
Information Patent Application
OXIDE AND METAL REMOVAL
- Publication number 20150345028
- Publication date Dec 3, 2015
- Xikun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Deposition Using Spatial Atomic Layer Deposition Or Pulsed Che...
- Publication number 20150194298
- Publication date Jul 9, 2015
- Applied Materials, Inc.
- Yu Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COBALT REMOVAL FOR CHAMBER CLEAN OR PRE-CLEAN PROCESS
- Publication number 20140326276
- Publication date Nov 6, 2014
- Applied Materials, Inc.
- Kai WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods Of Etching Films Comprising Transition Metals
- Publication number 20140273492
- Publication date Sep 18, 2014
- Jeffrey W. Anthis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods For Depositing Films Comprising Cobalt And Cobalt Nitrides
- Publication number 20140255606
- Publication date Sep 11, 2014
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Benjamin Schmiege

Person

Patents Grantslast 30 patents

Methods of forming self-aligned vias

Ruthenium precursors for ALD and CVD thin film deposition and uses...

Methods and apparatus for depositing yttrium-containing films

In-situ formation of non-volatile lanthanide thin film precursors a...

Selective deposition defects removal by chemical etch

System and method for controllable non-volatile metal removal

Ruthenium precursors for ALD and CVD thin film deposition and uses...

Oxide and metal removal

Methods of forming self-aligned vias

Precursors for deposition of metal, metal nitride and metal oxide b...

Methods of etching films comprising transition metals

Selective dry etching of metal films comprising multiple metal oxides

Methods of etching films with reduced surface roughness

Methods of forming self-aligned vias

System and method for controllable non-volatile metal removal

Methods of etching films with reduced surface roughness

Deposition methods for uniform and conformal hybrid titanium oxide...

Methods of etching films comprising transition metals

System and method for controllable non-volatile metal removal

Methods of etching films with reduced surface roughness

Cobalt removal for chamber clean or pre-clean process

Film deposition using spatial atomic layer deposition or pulsed che...

Selectively etching metals and metal nitrides conformally

Methods of etching films comprising transition metals

Oxide and metal removal

Methods for depositing films comprising cobalt and cobalt nitrides

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR DEPOSITING YTTRIUM-CONTAINING FILMS

Ruthenium Precursors For ALD And CVD Thin Film Deposition And Uses...

Methods Of Forming Self-Aligned Vias

Selective Deposition Defects Removal By Chemical Etch

Lanthanide, Yttrium and Scandium precursors for ALD, CVD and Thin F...

Methods and Apparatus for Depositing Yttrium-Containing Films

Methods Of Forming Self-Aligned Vias

In-Situ Formation of Non-Volatile Lanthanide Thin Film Precursors a...

Selective Dry Etching of Metal Films Comprising Multiple Metal Oxides

System And Method For Controllable Non-Volatile Metal Removal

Methods of Etching Films with Reduced Surface Roughness

Ruthenium Precursors For ALD And CVD Thin Film Deposition And Uses...

Precursors For Deposition Of Metal, Metal Nitride And Metal Oxide B...

Methods Of Forming Self-Aligned Vias

Methods Of Etching Films Comprising Transition Metals

Lanthanide, Yttrium And Scandium Precursors For ALD, CVD And Thin F...

System And Method For Controllable Non-Volatile Metal Removal

Methods Of Etching Films With Reduced Surface Roughness

Deposition Methods For Uniform And Conformal Hybrid Titanium Oxide...

Methods Of Etching Films Comprising Transition Metals

System And Method For Controllable Non-Volatile Metal Removal

OXIDE AND METAL REMOVAL

Methods Of Etching Films With Reduced Surface Roughness

OXIDE AND METAL REMOVAL

Film Deposition Using Spatial Atomic Layer Deposition Or Pulsed Che...

COBALT REMOVAL FOR CHAMBER CLEAN OR PRE-CLEAN PROCESS

Methods Of Etching Films Comprising Transition Metals

Methods For Depositing Films Comprising Cobalt And Cobalt Nitrides