Benny Wu

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-plane heater for semiconductor substrate support
- Patent number 10,690,414
- Issue date Jun 23, 2020
- Lam Research Corporation
- Keith William Gaff
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Auto-correction of electrostatic chuck temperature non-uniformity
- Patent number 10,381,248
- Issue date Aug 13, 2019
- Lam Research Corporation
- Benny Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detecting partial unclamping of a substrate from an ESC of a substr...
- Patent number 10,224,187
- Issue date Mar 5, 2019
- Lam Research Corporation
- Dmitry Opaits
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCKS WITH SELF-SEALING GAS CONDUITS AND/OR REDUCED...
- Publication number 20250062149
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Kadthala R. NARENDRNATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...
- Publication number 20230274954
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Harmeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20220277928
- Publication date Sep 1, 2022
- LAM RESEARCH CORPORATION
- Changyou JING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT
- Publication number 20170167790
- Publication date Jun 15, 2017
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CORRECTION OF ELECTROSTATIC CHUCK TEMPERATURE NON-UNIFORMITY
- Publication number 20160372352
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Benny Wu
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

In situ real-time sensing and compensation of non-uniformities in s...

Multi-plane heater for semiconductor substrate support

Auto-correction of electrostatic chuck temperature non-uniformity

Detecting partial unclamping of a substrate from an ESC of a substr...

Patents Applicationslast 30 patents

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

ELECTROSTATIC CHUCKS WITH SELF-SEALING GAS CONDUITS AND/OR REDUCED...

SUBSTRATE SUPPORTS WITH MULTILAYER STRUCTURE INCLUDING COUPLED HEAT...

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

MULTI-PLANE HEATER FOR SEMICONDUCTOR SUBSTRATE SUPPORT

AUTO-CORRECTION OF ELECTROSTATIC CHUCK TEMPERATURE NON-UNIFORMITY