Bernhard Gellrich

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection exposure apparatus for semiconductor lithography
- Patent number 11,281,114
- Issue date Mar 22, 2022
- Carl Zeiss SMT GmbH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement, in particular lithography system
- Patent number 10,809,636
- Issue date Oct 20, 2020
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optical system for microlithography
- Patent number 10,754,132
- Issue date Aug 25, 2020
- Carl Zeiss SMT GmbH
- Olaf Rogalsky
- G02 - OPTICS
Information Patent Grant
Connection arrangement for a force-fit connection between ceramic c...
- Patent number 10,571,813
- Issue date Feb 25, 2020
- Carl Zeiss SMT GmbH
- Karsten Siegmanski
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical element unit for exposure processes
- Patent number 10,203,607
- Issue date Feb 12, 2019
- Carl Zeiss SMT GmbH
- Tilman Schwertner
- G02 - OPTICS
Information Patent Grant
Mirror module, in particular for a microlithographic projection exp...
- Patent number 9,996,015
- Issue date Jun 12, 2018
- Carl Zeiss SMT GmbH
- Jens Prochnau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,891,535
- Issue date Feb 13, 2018
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device and method for reducing dynamic fluctuations...
- Patent number 9,817,322
- Issue date Nov 14, 2017
- Carl Zeiss SMT GmbH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device with thermal attenuation
- Patent number 9,810,996
- Issue date Nov 7, 2017
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,557,653
- Issue date Jan 31, 2017
- Carl Zeiss SMT GmbH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement in a projection exposure apparatus for EUV lith...
- Patent number 9,298,111
- Issue date Mar 29, 2016
- Carl Zeiss SMT GmbH
- Viktor Kulitzki
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,182,679
- Issue date Nov 10, 2015
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 9,104,016
- Issue date Aug 11, 2015
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Optical element unit for exposure processes having sealing element
- Patent number 9,046,795
- Issue date Jun 2, 2015
- Carl Zeiss SMT GmbH
- Tilman Schwertner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device with thermal attenuation
- Patent number 8,902,401
- Issue date Dec 2, 2014
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,860,922
- Issue date Oct 14, 2014
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Holding device for an optical element in an objective
- Patent number 8,854,602
- Issue date Oct 7, 2014
- ASML Netherlands B.V.
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,810,771
- Issue date Aug 19, 2014
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,659,745
- Issue date Feb 25, 2014
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Optical system with an exchangeable, manipulable correction arrange...
- Patent number 8,542,346
- Issue date Sep 24, 2013
- Carl Zeiss SMT GmbH
- Guido Limbach
- G02 - OPTICS
Information Patent Grant
Optical system for microlithography
- Patent number 8,456,616
- Issue date Jun 4, 2013
- Carl Zeiss SMT GmbH
- Daniel Kraehmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device with thermal attenuation
- Patent number 8,363,206
- Issue date Jan 29, 2013
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection system
- Patent number 8,300,210
- Issue date Oct 30, 2012
- Carl Zeiss SMT GmbH
- Johannes Rau
- G02 - OPTICS
Information Patent Grant
Optical arrangement for immersion lithography with a hydrophobic co...
- Patent number 8,279,402
- Issue date Oct 2, 2012
- Carl Zeiss SMT GmbH
- Stephan Six
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,102,502
- Issue date Jan 24, 2012
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic appararus and method
- Patent number 8,094,287
- Issue date Jan 10, 2012
- ASML Netherlands B.V.
- Tjarko Adriaan Rudolf Van Empel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device and method for reducing dynamic fluctuations...
- Patent number 8,027,023
- Issue date Sep 27, 2011
- Carl Zeiss SMT GmbH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Replacement device for an optical element
- Patent number 8,027,024
- Issue date Sep 27, 2011
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical imaging device having at least one system diaphragm
- Patent number 8,009,343
- Issue date Aug 30, 2011
- Carl Zeiss SMT GmbH
- Bernhard Gellrich
- G02 - OPTICS
Information Patent Grant
Optical element module
- Patent number 7,986,472
- Issue date Jul 26, 2011
- Carl Zeiss SMT, AG.
- Jens Kugler
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM
- Publication number 20230305290
- Publication date Sep 28, 2023
- Carl Zeiss SMT GMBH
- Hartmut Enkisch
- G02 - OPTICS
Information Patent Application
SUPPORT OF AN OPTICAL UNIT
- Publication number 20220283509
- Publication date Sep 8, 2022
- Carl Zeiss SMT GMBH
- Boaz Pnini
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY
- Publication number 20210080841
- Publication date Mar 18, 2021
- Carl Zeiss SMT GMBH
- Jens Kugler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM
- Publication number 20190339626
- Publication date Nov 7, 2019
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Projection System
- Publication number 20180259856
- Publication date Sep 13, 2018
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
- Publication number 20180181007
- Publication date Jun 28, 2018
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Projection System
- Publication number 20170219929
- Publication date Aug 3, 2017
- Carl Zeiss SMT GMBH
- Johannes Rau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...
- Publication number 20170184982
- Publication date Jun 29, 2017
- Carl Zeiss SMT GMBH
- Karsten Siegmanski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXP...
- Publication number 20170153552
- Publication date Jun 1, 2017
- Carl Zeiss SMT GMBH
- Jens Prochnau
- G02 - OPTICS
Information Patent Application
OPTICAL IMAGING DEVICE
- Publication number 20160147159
- Publication date May 26, 2016
- Carl Zeiss SMT GMBH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL PROJECTION SYSTEM
- Publication number 20150323873
- Publication date Nov 12, 2015
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES
- Publication number 20150168846
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Tilman Schwertner
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AN...
- Publication number 20150168853
- Publication date Jun 18, 2015
- Carl Zeiss SMT GMBH
- Mathias Schumacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding Device for an Optical Element in an Objective
- Publication number 20150138520
- Publication date May 21, 2015
- ASML NETHERLANDS B.V.
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
- Publication number 20150109591
- Publication date Apr 23, 2015
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150015858
- Publication date Jan 15, 2015
- ASML NETHERLANDS B.V.
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20140021324
- Publication date Jan 23, 2014
- Mathias Schumacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20130278911
- Publication date Oct 24, 2013
- Guido Limbach
- G02 - OPTICS
Information Patent Application
Imaging Optical System for Microlithography
- Publication number 20130188246
- Publication date Jul 25, 2013
- Carl Zeiss SMT GMBH
- Olaf Rogalsky
- G02 - OPTICS
Information Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
- Publication number 20130114057
- Publication date May 9, 2013
- Carl Zeiss SMT GMBH
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL PROJECTION SYSTEM
- Publication number 20130044304
- Publication date Feb 21, 2013
- Carl Zeiss SMT GMBH
- Johannes Rau
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...
- Publication number 20120188523
- Publication date Jul 26, 2012
- Carl Zeiss SMT GMBH
- Viktor Kulitsky
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120120377
- Publication date May 17, 2012
- Carl Zeiss SMT AG
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL IMAGING DEVICE AND METHOD FOR REDUCING DYNAMIC FLUCTUATIONS...
- Publication number 20120026479
- Publication date Feb 2, 2012
- Carl Zeiss SMT GMBH
- Stefan Hembacher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20110069295
- Publication date Mar 24, 2011
- Carl Zeiss SMT GMBH
- Daniel Kraehmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...
- Publication number 20090244509
- Publication date Oct 1, 2009
- Carl Zeiss SMT AG
- Guido Limbach
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...
- Publication number 20090233233
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Stephan SIX
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090197211
- Publication date Aug 6, 2009
- ASML NETHERLANDS B.V.
- Christiaan Alexander HOOGENDAM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Optical Projection System
- Publication number 20090174874
- Publication date Jul 9, 2009
- Johannes Rau
- G02 - OPTICS
Information Patent Application
OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION
- Publication number 20090135385
- Publication date May 28, 2009
- Carl Zeiss SMT AG
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Bernhard Gellrich

Person

Patents Grantslast 30 patents

Projection exposure apparatus for semiconductor lithography

Optical arrangement, in particular lithography system

Imaging optical system for microlithography

Connection arrangement for a force-fit connection between ceramic c...

Optical element unit for exposure processes

Mirror module, in particular for a microlithographic projection exp...

Optical projection system

Optical imaging device and method for reducing dynamic fluctuations...

Optical imaging device with thermal attenuation

Optical projection system

Optical arrangement in a projection exposure apparatus for EUV lith...

Lithographic apparatus and device manufacturing method

Optical projection system

Optical element unit for exposure processes having sealing element

Optical imaging device with thermal attenuation

Lithographic apparatus and device manufacturing method

Holding device for an optical element in an objective

Lithographic apparatus and device manufacturing method

Optical system with an exchangeable, manipulable correction arrange...

Optical system with an exchangeable, manipulable correction arrange...

Optical system for microlithography

Optical imaging device with thermal attenuation

Optical projection system

Optical arrangement for immersion lithography with a hydrophobic co...

Lithographic apparatus and device manufacturing method

Lithographic appararus and method

Optical imaging device and method for reducing dynamic fluctuations...

Replacement device for an optical element

Optical imaging device having at least one system diaphragm

Optical element module

Patents Applicationslast 30 patents

MIRROR, OPTICAL SYSTEM AND METHOD FOR OPERATING AN OPTICAL SYSTEM

SUPPORT OF AN OPTICAL UNIT

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY

OPTICAL ARRANGEMENT, IN PARTICULAR LITHOGRAPHY SYSTEM

Optical Projection System

OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION

Optical Projection System

CONNECTION ARRANGEMENT FOR A FORCE-FIT CONNECTION BETWEEN CERAMIC C...

MIRROR MODULE, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXP...

OPTICAL IMAGING DEVICE

OPTICAL PROJECTION SYSTEM

OPTICAL ELEMENT UNIT FOR EXPOSURE PROCESSES

LITHOGRAPHY APPARATUS WITH RESTRICTED MOVEMENT RELATIVE TO FLOOR AN...

Holding Device for an Optical Element in an Objective

OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHY APPARATUS AND METHOD

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

Imaging Optical System for Microlithography

OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION

OPTICAL PROJECTION SYSTEM

OPTICAL ARRANGEMENT IN A PROJECTION EXPOSURE APPARATUS FOR EUV LITH...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

OPTICAL IMAGING DEVICE AND METHOD FOR REDUCING DYNAMIC FLUCTUATIONS...

OPTICAL SYSTEM FOR MICROLITHOGRAPHY

OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGE...

OPTICAL ARRANGEMENT FOR IMMERSION LITHOGRAPHY WITH A HYDROPHOBIC CO...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Optical Projection System

OPTICAL IMAGING DEVICE WITH THERMAL ATTENUATION