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Patents Grants
last 30 patents
Information
Patent Grant
Stage system, lithographic apparatus, method for positioning and de...
Patent number
11,860,552
Issue date
Jan 2, 2024
ASML Netherlands B.V.
Stef Marten Johan Janssens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus, method for unloading a substrate and method...
Patent number
11,664,264
Issue date
May 30, 2023
ASML Netherlands B.V.
Andre Bernardus Jeunink
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
Patent number
11,579,533
Issue date
Feb 14, 2023
ASML Netherlands B.V.
Günes Nakiboglu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
11,269,259
Issue date
Mar 8, 2022
ASML Netherlands B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrates and methods of using those substrates
Patent number
11,016,401
Issue date
May 25, 2021
ASML Holding N.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder, a lithographic apparatus and method of manufactur...
Patent number
10,895,808
Issue date
Jan 19, 2021
ASML Netherlands B.V.
Günes Nakiboglu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
10,871,715
Issue date
Dec 22, 2020
ASML Netherlands B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus, a method of manufacturing a device and a con...
Patent number
10,534,270
Issue date
Jan 14, 2020
ASML Netherlands B.V.
Norbertus Josephus Martinus Van Den Nieuwelaar
G02 - OPTICS
Information
Patent Grant
Lithography apparatus and method of manufacturing a device
Patent number
10,261,422
Issue date
Apr 16, 2019
ASML Netherlands B.V.
Norbertus Josephus Martinus Van Den Nieuwelaar
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...
Publication number
20240168394
Publication date
May 23, 2024
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
Publication number
20230260820
Publication date
Aug 17, 2023
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
TOOL FOR MODIFYING A SUPPORT SURFACE
Publication number
20210263418
Publication date
Aug 26, 2021
ASML NETHERLANDS B.V.
Bert Dirk SCHOLTEN
B24 - GRINDING POLISHING
Information
Patent Application
SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTUR...
Publication number
20210141312
Publication date
May 13, 2021
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Publication number
20210072649
Publication date
Mar 11, 2021
ASML NETHERLANDS B.V.
Thomas Poiesz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM, DEVICE AND METHOD FOR RECONDITIONING A SUBSTRATE SUPPORT
Publication number
20210053177
Publication date
Feb 25, 2021
ASML NETHERLANDS B.V.
Bert Dirk SCHOLTEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACT...
Publication number
20200183287
Publication date
Jun 11, 2020
ASML NETHERLANDS B.V.
Günes NAKIBOGLU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Publication number
20200183289
Publication date
Jun 11, 2020
ASML NETHERLANDS B.V.
Thomas POIESZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A SYSTEM FOR CLEANING A SUBSTRATE SUPPORT, A METHOD OF REMOVING MAT...
Publication number
20200103770
Publication date
Apr 2, 2020
ASML NETHERLANDS B.V.
Tiannan GUAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATES AND METHODS OF USING THOSE SUBSTRATES
Publication number
20200073262
Publication date
Mar 5, 2020
ASML Holding N.V.
Matthew LIPSON
B08 - CLEANING
Information
Patent Application
STAGE SYSTEM, LITHOGRAPHIC APPARATUS, METHOD FOR POSITIONING AND DE...
Publication number
20190187571
Publication date
Jun 20, 2019
ASML NETHERLANDS B.V.
Stef Marten Johan JANSSENS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY APPARATUS, A METHOD OF MANUFACTURING A DEVICE AND A CON...
Publication number
20190187568
Publication date
Jun 20, 2019
ASML NETHERLANDS B.V.
Norbertus Josephus Martinus VAN DEN NIEUWELAAR
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS, METHOD FOR UNLOADING A SUBSTRATE AND METHOD...
Publication number
20190043749
Publication date
Feb 7, 2019
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING A DEVICE
Publication number
20170219933
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Norbertus Josephus Martinus VAN DEN NIEUWELAAR
G02 - OPTICS