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Beth A. Ward
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Essex Junction, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
Patent number
8,709,887
Issue date
Apr 29, 2014
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
CMOS transistor with a polysilicon gate electrode having varying gr...
Patent number
7,714,366
Issue date
May 11, 2010
International Business Machines Corporation
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating a nitrided silicon-oxide gate dielectric
Patent number
7,291,568
Issue date
Nov 6, 2007
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nitrided ultra thin gate dielectrics
Patent number
7,109,559
Issue date
Sep 19, 2006
International Business Machines Corporation
Mukesh V. Khare
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal nitrogen distribution method to improve uniformity of highl...
Patent number
6,909,157
Issue date
Jun 21, 2005
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improved plasma nitridation of ultra thin gate dielectrics
Patent number
6,893,979
Issue date
May 17, 2005
International Business Machines Corporation
Mukesh V. Khare
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of reducing polysilicon depletion in a polysilicon gate elec...
Patent number
6,893,948
Issue date
May 17, 2005
International Business Machines Corporation
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thermal nitrogen distribution method to improve uniformity of highl...
Patent number
6,706,644
Issue date
Mar 16, 2004
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of reducing polysilicon depletion in a polysilicon gate elec...
Patent number
6,670,263
Issue date
Dec 30, 2003
International Business Machines Corporation
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC
Publication number
20080014692
Publication date
Jan 17, 2008
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CMOS TRANSISTOR WITH A POLYSILICON GATE ELECTRODE HAVING VARYING GR...
Publication number
20050110096
Publication date
May 26, 2005
International Business Machines Corporation
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Nitrided ultrathin gate dielectrics
Publication number
20050087822
Publication date
Apr 28, 2005
Mukesh V. Khare
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING A NITRIDED SILICON-OXIDE GATE DIELECTRIC
Publication number
20050048705
Publication date
Mar 3, 2005
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Thermal nitrogen distribution method to improve uniformity of highl...
Publication number
20050040480
Publication date
Feb 24, 2005
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of reducing polysilicon depletion in a polysilicon gate elec...
Publication number
20040023476
Publication date
Feb 5, 2004
International Business Machines
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL NITROGEN DISTRIBUTION METHOD TO IMPROVE UNIFORMITY OF HIGHL...
Publication number
20040018688
Publication date
Jan 29, 2004
International Business Machines Corporation
Jay S. Burnham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of reducing polysilicon depletion in a polysilicon gate elec...
Publication number
20020149064
Publication date
Oct 17, 2002
Arne W. Ballantine
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for improved plasma nitridation of ultra thin gate dielectrics
Publication number
20020130377
Publication date
Sep 19, 2002
International Business Machines Corporation
Mukesh V. Khare
H01 - BASIC ELECTRIC ELEMENTS