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Bill H. Quon
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Tempe, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Inductively coupled high-density plasma source
Patent number
7,482,757
Issue date
Jan 27, 2009
Tokyo Electron Limited
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-linear test load and method of calibrating a plasma system
Patent number
7,216,067
Issue date
May 8, 2007
Tokyo Electron Limited
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for improved plasma processing uniformity
Patent number
7,164,236
Issue date
Jan 16, 2007
Tokyo Electron Limited
Andrej S. Mitrovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Impedance monitoring system and method
Patent number
7,019,543
Issue date
Mar 28, 2006
Tokyo Electron Limited
Bill H. Quon
G01 - MEASURING TESTING
Information
Patent Grant
Inter-stage plasma source
Patent number
6,979,954
Issue date
Dec 27, 2005
Tokyo Electron Limited
Bill H Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Closed-drift hall effect plasma vacuum pump for process reactors
Patent number
6,899,527
Issue date
May 31, 2005
Tokyo Electron Limited
Bill H Quon
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma processing apparatus and method
Patent number
6,885,153
Issue date
Apr 26, 2005
Tokyo Electron Limited
Bill H Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stand alone plasma vacuum pump
Patent number
6,873,113
Issue date
Mar 29, 2005
Tokyo Electron Limited
Raphael A. Dandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Applied plasma duct system
Patent number
6,729,850
Issue date
May 4, 2004
Tokyo Electron Limited
Raphael A. Dandl
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
Inductively coupled high-density plasma source
Publication number
20050099133
Publication date
May 12, 2005
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for processing a workpiece with a plasma
Publication number
20040219737
Publication date
Nov 4, 2004
TOKYO ELECTRON LIMITED
Bill H Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Non-linear test load and method of calibrating a plasma system
Publication number
20040210407
Publication date
Oct 21, 2004
TOKYO ELECTRON LIMITED
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for improved plasma processing uniformity
Publication number
20040168770
Publication date
Sep 2, 2004
TOKYO ELECTRON LIMITED
Andrej S. Mitrovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Inter-stage plasma source
Publication number
20040160191
Publication date
Aug 19, 2004
TOKYO ELECTRON LIMITED
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Closed-drift hall effect plasma vacuum pump for process reactors
Publication number
20040151595
Publication date
Aug 5, 2004
TOKYO ELECTRON LIMITED
Bill H. Quon
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Impedance monitoring system and method
Publication number
20040135590
Publication date
Jul 15, 2004
Bill H. Quon
G01 - MEASURING TESTING
Information
Patent Application
Plasma processing apparatus and method
Publication number
20040112536
Publication date
Jun 17, 2004
TOKYO ELECTRON LIMITED
Bill H Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method to control the uniformity of plasma by reducin...
Publication number
20030150562
Publication date
Aug 14, 2003
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for improved plasma processing uniformity
Publication number
20030137251
Publication date
Jul 24, 2003
Andrej S. Mitrovic
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stand alone plasma vacuum pump
Publication number
20030122492
Publication date
Jul 3, 2003
Raphael A. Dandl
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Applied plasma duct system
Publication number
20030117080
Publication date
Jun 26, 2003
Raphael A. Dandl
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Apparatus and method for improving electron ecceleration
Publication number
20030094239
Publication date
May 22, 2003
Bill H. Quon
H01 - BASIC ELECTRIC ELEMENTS