Bin Luo

Person

  • Tigard, OR, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma viewport

    • Patent number 12,272,534
    • Issue date Apr 8, 2025
    • Lam Researh Corporation
    • Bin Luo
    • G02 - OPTICS
  • Information Patent Grant

    Cooling plate for a semiconductor processing apparatus

    • Patent number D956705
    • Issue date Jul 5, 2022
    • Lam Research Corporation
    • Bin Luo
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Showerhead tilt mechanism

    • Patent number 10,760,160
    • Issue date Sep 1, 2020
    • Lam Research Corporation
    • Bin Luo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Carrier ring wall for reduction of back-diffusion of reactive speci...

    • Patent number 10,475,627
    • Issue date Nov 12, 2019
    • Lam Research Corporation
    • Chengzhu Qi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead tilt mechanism

    • Patent number 10,190,216
    • Issue date Jan 29, 2019
    • Lam Research Corporation
    • Bin Luo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA VIEWPORT

    • Publication number 20250226191
    • Publication date Jul 10, 2025
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHOWERHEAD FACEPLATE CONFIGURATIONS

    • Publication number 20250054734
    • Publication date Feb 13, 2025
    • LAM RESEARCH CORPORATION
    • Bin LUO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VALVE FOR SEMICONDUCTOR EQUIPMENT

    • Publication number 20240418276
    • Publication date Dec 19, 2024
    • LAM RESEARCH CORPORATION
    • John Michael WILTSE
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    REMOVABLE SHOWERHEAD FACEPLATE FOR SEMICONDUCTOR PROCESSING TOOLS

    • Publication number 20230279547
    • Publication date Sep 7, 2023
    • LAM RESEARCH CORPORATION
    • Manjesh Shankarnarayana
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    AUTOMATED SHOWERHEAD TILT ADJUSTMENT

    • Publication number 20230272533
    • Publication date Aug 31, 2023
    • LAM RESEARCH CORPORATION
    • Sam Jafarian Tehrani
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD WITH FACEPLATE HAVING INTERNAL CONTOURS

    • Publication number 20230044064
    • Publication date Feb 9, 2023
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA VIEWPORT

    • Publication number 20220301835
    • Publication date Sep 22, 2022
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THERMALLY CONTROLLED CHANDELIER SHOWERHEAD

    • Publication number 20220282377
    • Publication date Sep 8, 2022
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD TILT MECHANISM

    • Publication number 20190153601
    • Publication date May 23, 2019
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD TILT MECHANISM

    • Publication number 20190032214
    • Publication date Jan 31, 2019
    • LAM RESEARCH CORPORATION
    • Bin Luo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CARRIER RING WALL FOR REDUCTION OF BACK-DIFFUSION OF REACTIVE SPECI...

    • Publication number 20170278681
    • Publication date Sep 28, 2017
    • LAM RESEARCH CORPORATION
    • Chengzhu Qi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...