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Bjorn A.M. Hansson
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Stockholm, SE
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last 30 patents
Information
Patent Grant
Laser produced plasma EUV light source
Patent number
9,713,239
Issue date
Jul 18, 2017
ASML Netherlands B.V.
Bjorn A. M. Hansson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for reducing the influence of plasma-generated...
Patent number
7,732,793
Issue date
Jun 8, 2010
Cymer, Inc.
Alexander I. Ershov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Source material collection unit for a laser produced plasma EUV lig...
Patent number
7,476,886
Issue date
Jan 13, 2009
Cymer, Inc.
Alexander N. Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems for protecting internal components of a EUV light source fr...
Patent number
7,365,351
Issue date
Apr 29, 2008
Cymer, Inc.
Norbert Bowering
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and arrangement for producing radiation
Patent number
7,239,686
Issue date
Jul 3, 2007
Jettec AB
Magnus Berglund
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for generating X-ray or EUV radiation
Patent number
6,760,406
Issue date
Jul 6, 2004
Jettec AB
Hans Martin Hertz
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
LASER PRODUCED PLASMA EUV LIGHT SOURCE
Publication number
20120193547
Publication date
Aug 2, 2012
Bjorn A. M. Hansson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma EUV light source
Publication number
20110079736
Publication date
Apr 7, 2011
Cymer, Inc.
Bjorn A. M. Hansson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma euv light source
Publication number
20100024980
Publication date
Feb 4, 2010
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser produced plasma EUV light source
Publication number
20080149862
Publication date
Jun 26, 2008
Cymer, Inc.
Bjorn A. M. Hansson
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Source material collection unit for a laser produced plasma EUV lig...
Publication number
20080048133
Publication date
Feb 28, 2008
Cymer, Inc.
Alexander N. Bykanov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems and methods for reducing the influence of plasma-generated...
Publication number
20070187627
Publication date
Aug 16, 2007
Cymer, Inc.
Alexander I. Ershov
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Systems for protecting internal components of an EUV light source f...
Publication number
20070029512
Publication date
Feb 8, 2007
Cymer, Inc.
Norbert Bowering
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for producing radiation
Publication number
20050129177
Publication date
Jun 16, 2005
Magnus Berglund
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and apparatus for generating X-ray or EUV radiation
Publication number
20020044629
Publication date
Apr 18, 2002
Hans Martin Hertz
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR