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Seamless Gap Fill
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Publication number 20220157934
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Publication date May 19, 2022
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Taiwan Semiconductor Manufacturing Co., LTD
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Yen-Chun Huang
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H01 - BASIC ELECTRIC ELEMENTS
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SEAMLESS GAP FILL
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Publication date Sep 17, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Yen-Chun Huang
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H01 - BASIC ELECTRIC ELEMENTS
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FinFETs and Methods of Forming the Same
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Publication number 20190140076
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Publication date May 9, 2019
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Bor Chiuan Hsieh
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H01 - BASIC ELECTRIC ELEMENTS
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Seamless Gap Fill
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Publication number 20180350906
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Publication date Dec 6, 2018
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Taiwan Semiconductor Manufacturing Co., LTD
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Yen-Chun Huang
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H01 - BASIC ELECTRIC ELEMENTS
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FinFETs and Methods of Forming the Same
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Publication number 20180315830
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Publication date Nov 1, 2018
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Bor Chiuan Hsieh
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H01 - BASIC ELECTRIC ELEMENTS
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Seamless Gap Fill
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Publication number 20170194424
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Publication date Jul 6, 2017
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Taiwan Semiconductor Manufacturing Co., LTD
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Yen-Chun Huang
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H01 - BASIC ELECTRIC ELEMENTS
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CMOS STRUCTURE WITH MULTIPLE SPACERS
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Publication number 20110031538
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Publication date Feb 10, 2011
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Bor Chiuan HSIEH
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H01 - BASIC ELECTRIC ELEMENTS
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