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Brad L. MAYS
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Findlay, OH, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
Patent number
11,615,973
Issue date
Mar 28, 2023
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
11,088,005
Issue date
Aug 10, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual zone common catch heat exchanger/chiller
Patent number
10,928,145
Issue date
Feb 23, 2021
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Showerhead with reduced backside plasma ignition
Patent number
10,745,807
Issue date
Aug 18, 2020
Applied Materials, Inc.
Haitao Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
Patent number
10,490,429
Issue date
Nov 26, 2019
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Showerhead with reduced backside plasma ignition
Patent number
10,378,108
Issue date
Aug 13, 2019
Applied Materials, Inc.
Haitao Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
10,304,715
Issue date
May 28, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual zone common catch heat exchanger/chiller
Patent number
10,274,270
Issue date
Apr 30, 2019
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
9,991,148
Issue date
Jun 5, 2018
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
Patent number
9,666,466
Issue date
May 30, 2017
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Feedforward temperature control for plasma processing apparatus
Patent number
9,338,871
Issue date
May 10, 2016
Applied Materials, Inc.
Chetan Mahadeswaraswamy
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
9,214,315
Issue date
Dec 15, 2015
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Temperature control in plasma processing apparatus using pulsed hea...
Patent number
8,916,793
Issue date
Dec 23, 2014
Applied Materials, Inc.
Fernando M. Silveira
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for operating an electrostatic chuck in a semi...
Patent number
6,898,065
Issue date
May 24, 2005
Brad Mays
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correction of wafer temperature drift in a plasma reactor based upo...
Patent number
6,575,622
Issue date
Jun 10, 2003
Applied Materials Inc.
Hamid Norrbakhsh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Support assembly with thermal expansion compensation
Patent number
6,364,957
Issue date
Apr 2, 2002
Applied Materials, Inc.
Gerhard M. Schneider
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Correction of wafer temperature drift in a plasma reactor based upo...
Patent number
6,353,210
Issue date
Mar 5, 2002
Applied Materials Inc.
Hamid Norrbakhsh
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
Publication number
20200051839
Publication date
Feb 13, 2020
Applied Materials, Inc.
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20190279893
Publication date
Sep 12, 2019
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
Publication number
20190271082
Publication date
Sep 5, 2019
Applied Materials, Inc.
Haitao WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER
Publication number
20190204032
Publication date
Jul 4, 2019
Applied Materials, Inc.
Fernando Silveira
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20180269098
Publication date
Sep 20, 2018
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20170250100
Publication date
Aug 31, 2017
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
Publication number
20170101713
Publication date
Apr 13, 2017
Applied Materials, Inc.
Haitao WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20160155612
Publication date
Jun 2, 2016
Chetan MAHADESWARASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
Publication number
20160148822
Publication date
May 26, 2016
Phillip Criminale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20150316941
Publication date
Nov 5, 2015
Applied Materials, Inc.
Fernando M. SILVEIRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
Publication number
20140334060
Publication date
Nov 13, 2014
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUAL ZONE COMMON CATCH HEAT EXCHANGER/CHILLER
Publication number
20130105081
Publication date
May 2, 2013
Fernando SILVEIRA
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
TEMPERATURE CONTROL IN PLASMA PROCESSING APPARATUS USING PULSED HEA...
Publication number
20120132397
Publication date
May 31, 2012
Applied Materials, Inc.
Fernando M. Silveira
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
Publication number
20110186545
Publication date
Aug 4, 2011
Applied Materials, Inc.
Chetan MAHADESWARASWAMY
G05 - CONTROLLING REGULATING
Information
Patent Application
Method and apparatus for operating an electrostatic chuck in a semi...
Publication number
20040016405
Publication date
Jan 29, 2004
APPLIED MATERIALS, INC.
Brad Mays
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chuck with dielectric coating
Publication number
20030010292
Publication date
Jan 16, 2003
APPLIED MATERIALS, INC.
Arnold V. Kholodenko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Correction of wafer temperature drift in a plasma reactor based upo...
Publication number
20020048311
Publication date
Apr 25, 2002
APPLIED MATERIALS, INC.
Hamid Norrbakhsh
C30 - CRYSTAL GROWTH