Brian H. Burrows

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-layer EPI chamber body
- Patent number 12,188,148
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Shu-Kwan Lau
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber injector
- Patent number 11,807,931
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Linear lamp array for improved thermal uniformity and profile control
- Patent number 11,680,338
- Issue date Jun 20, 2023
- Applied Materials, Inc.
- Brian Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for depositing materials on a continuous subs...
- Patent number 11,578,004
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- David Masayuki Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber injector
- Patent number 11,492,704
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Shu-Kwan Lau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purged viewport for quartz dome in epitaxy reactor
- Patent number 11,189,508
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Ji-Dih Hu
- G01 - MEASURING TESTING
Information Patent Grant
Additive manufacturing having energy beam and lamp array
- Patent number 11,117,194
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- David Masayuki Ishikawa
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Methods and apparatus for gallium nitride deposition
- Patent number 10,995,419
- Issue date May 4, 2021
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflector and susceptor assembly for chemical vapor deposition reactor
- Patent number 10,932,323
- Issue date Feb 23, 2021
- Alta Devices, Inc.
- Brian Burrows
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Epitaxial lift off systems and methods
- Patent number 10,259,206
- Issue date Apr 16, 2019
- Alta Devices, Inc.
- Brian Brown
- B32 - LAYERED PRODUCTS
Information Patent Grant
Process gas preheating systems and methods for double-sided multi-s...
- Patent number 9,982,364
- Issue date May 29, 2018
- Applied Materials, Inc.
- David Masayuki Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 9,644,267
- Issue date May 9, 2017
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial lift off systems and methods
- Patent number 9,381,731
- Issue date Jul 5, 2016
- Alta Devices, Inc.
- Brian Brown
- B32 - LAYERED PRODUCTS
Information Patent Grant
Fastener system for supporting a liner plate in a gas showerhead re...
- Patent number 9,267,205
- Issue date Feb 23, 2016
- Alta Devices, Inc.
- David Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for improved epitaxial lift off
- Patent number 9,142,707
- Issue date Sep 22, 2015
- Alta Devices, Inc.
- Brian Burrows
- B32 - LAYERED PRODUCTS
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 8,663,390
- Issue date Mar 4, 2014
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for improved epitaxial lift off
- Patent number 8,657,994
- Issue date Feb 25, 2014
- Alta Devices, Inc.
- Brian Burrows
- B32 - LAYERED PRODUCTS
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 8,481,118
- Issue date Jul 9, 2013
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for fabricating group III nitride structures with a cluster...
- Patent number 8,183,132
- Issue date May 22, 2012
- Applied Materials, Inc.
- Sandeep Nijhawan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-gas straight channel showerhead
- Patent number 7,976,631
- Issue date Jul 12, 2011
- Applied Materials, Inc.
- Brian H. Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Independent radiant gas preheating for precursor disassociation con...
- Patent number 7,976,634
- Issue date Jul 12, 2011
- Applied Materials, Inc.
- David Keith Carlson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature anneal with improved substrate support
- Patent number 7,704,327
- Issue date Apr 27, 2010
- Applied Materials, Inc.
- Ann P. Waldhauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gutter and splash-guard for protecting a wafer during transfer from...
- Patent number 6,807,972
- Issue date Oct 26, 2004
- Applied Materials, Inc.
- Ho-Man Rodney Chiu
- B08 - CLEANING
Information Patent Grant
Wafer transfer cassette
- Patent number 6,145,673
- Issue date Nov 14, 2000
- Applied Materials, Inc.
- Brian H. Burrows
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
- Publication number 20230167581
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Kartik Bhupendra SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTARY REACTOR FOR DEPOSITION OF FILMS ONTO PARTICLES
- Publication number 20230127489
- Publication date Apr 27, 2023
- APPLIED MATERIALS, INC.
- Brian Hayes Burrows
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ROTARY REACTOR WITH DRUM FOR DEPOSITION OF FILMS ONTO PARTICLES
- Publication number 20230128094
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Brian Hayes Burrows
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
ISOLATION FOR REACTOR FOR DEPOSITION OF FILMS ONTO PARTICLES
- Publication number 20230132290
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Brian Hayes Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER INJECTOR
- Publication number 20230027683
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPITAXIAL DEPOSITION CHAMBER
- Publication number 20220322492
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CHAMBER BODY FEEDTHROUGH FOR IN CHAMBER RESISTIVE HEATING ELEMENT
- Publication number 20220254634
- Publication date Aug 11, 2022
- Applied Materials, Inc.
- Brian Hayes BURROWS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER EPI CHAMBER BODY
- Publication number 20220195617
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...
- Publication number 20220157604
- Publication date May 19, 2022
- Applied Materials, Inc.
- Chen-Ying WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20210324514
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Zhiyuan YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR LAMP ARRAY FOR IMPROVED THERMAL UNIFORMITY AND PROFILE CONTROL
- Publication number 20210189593
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- Brian BURROWS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR GALLIUM NITRIDE DEPOSITION
- Publication number 20200332437
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Brian H. BURROWS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DEPOSITING MATERIALS ON A CONTINUOUS SUBS...
- Publication number 20200290932
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- David Masayuki ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT
- Publication number 20200291523
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- David M. ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUALIFICATION AND REPAIR STATION
- Publication number 20200290835
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Andreas SCHMID
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
PURGED VIEWPORT FOR QUARTZ DOME IN EPITAXY REACTOR
- Publication number 20200105554
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Ji-Dih HU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER INJECTOR
- Publication number 20200071832
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Shu-Kwan LAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOOL ARCHITECTURE USING VARIABLE FREQUENCY MICROWAVE FOR RESIDUAL M...
- Publication number 20190132910
- Publication date May 2, 2019
- Applied Materials, Inc.
- Jean DELMAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lamp configuration for Additive Manufacturing
- Publication number 20180264549
- Publication date Sep 20, 2018
- Applied Materials Inc.
- David Masayuki Ishikawa
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
Additive Manufacturing Having Energy Beam and Lamp Array
- Publication number 20180264551
- Publication date Sep 20, 2018
- David Masayuki Ishikawa
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20170362702
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARALLEL PLATE INLINE SUBSTRATE PROCESSING TOOL
- Publication number 20170244006
- Publication date Aug 24, 2017
- Applied Materials, Inc.
- BRIAN H. BURROWS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH SPEED EPITAXY SYSTEM AND METHODS
- Publication number 20170221751
- Publication date Aug 3, 2017
- Applied Materials, Inc.
- Brian H. BURROWS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REFLECTOR AND SUSCEPTOR ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION REACTOR
- Publication number 20170037515
- Publication date Feb 9, 2017
- Alta Devices, Inc.
- Brian Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH SPEED EPI SYSTEM AND CHAMBER CONCEPTS
- Publication number 20160348240
- Publication date Dec 1, 2016
- Brian H. BURROWS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS GAS PREHEATING SYSTEMS AND METHODS FOR DOUBLE-SIDED MULTI-S...
- Publication number 20160298263
- Publication date Oct 13, 2016
- Applied Materials, Inc.
- DAVID MASAYUKI ISHIKAWA
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS FOR SUBSTRATE PROCESSING
- Publication number 20150155407
- Publication date Jun 4, 2015
- Applied Materials, Inc.
- LANCE A. SCUDDER
- B32 - LAYERED PRODUCTS
Information Patent Application
EPITAXIAL LIFT OFF SYSTEMS AND METHODS
- Publication number 20140251547
- Publication date Sep 11, 2014
- ALTA DEVICES, INC.
- Brian BROWN
- B32 - LAYERED PRODUCTS
Information Patent Application
INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...
- Publication number 20140175054
- Publication date Jun 26, 2014
- Applied Materials, Inc.
- David Keith CARLSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Brian H. Burrows

Person

Patents Grantslast 30 patents

Multi-layer EPI chamber body

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Chamber injector

Linear lamp array for improved thermal uniformity and profile control

Methods and apparatus for depositing materials on a continuous subs...

Chamber injector

Purged viewport for quartz dome in epitaxy reactor

Additive manufacturing having energy beam and lamp array

Methods and apparatus for gallium nitride deposition

Reflector and susceptor assembly for chemical vapor deposition reactor

Epitaxial lift off systems and methods

Process gas preheating systems and methods for double-sided multi-s...

Multi-gas straight channel showerhead

Epitaxial lift off systems and methods

Fastener system for supporting a liner plate in a gas showerhead re...

System and method for improved epitaxial lift off

Independent radiant gas preheating for precursor disassociation con...

System and method for improved epitaxial lift off

Multi-gas straight channel showerhead

Methods for fabricating group III nitride structures with a cluster...

Multi-gas straight channel showerhead

Independent radiant gas preheating for precursor disassociation con...

High temperature anneal with improved substrate support

Gutter and splash-guard for protecting a wafer during transfer from...

Wafer transfer cassette

Patents Applicationslast 30 patents

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER

ROTARY REACTOR FOR DEPOSITION OF FILMS ONTO PARTICLES

ROTARY REACTOR WITH DRUM FOR DEPOSITION OF FILMS ONTO PARTICLES

ISOLATION FOR REACTOR FOR DEPOSITION OF FILMS ONTO PARTICLES

CHAMBER INJECTOR

EPITAXIAL DEPOSITION CHAMBER

CHAMBER BODY FEEDTHROUGH FOR IN CHAMBER RESISTIVE HEATING ELEMENT

MULTI-LAYER EPI CHAMBER BODY

APPARATUS, SYSTEMS, AND METHODS OF USING ATOMIC HYDROGEN RADICALS W...

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

LINEAR LAMP ARRAY FOR IMPROVED THERMAL UNIFORMITY AND PROFILE CONTROL

METHODS AND APPARATUS FOR GALLIUM NITRIDE DEPOSITION

METHODS AND APPARATUS FOR DEPOSITING MATERIALS ON A CONTINUOUS SUBS...

CONTINUOUS CHEMICAL VAPOR DEPOSITION (CVD) MULTI-ZONE PROCESS KIT

QUALIFICATION AND REPAIR STATION

PURGED VIEWPORT FOR QUARTZ DOME IN EPITAXY REACTOR

CHAMBER INJECTOR

TOOL ARCHITECTURE USING VARIABLE FREQUENCY MICROWAVE FOR RESIDUAL M...

Lamp configuration for Additive Manufacturing

Additive Manufacturing Having Energy Beam and Lamp Array

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...

PARALLEL PLATE INLINE SUBSTRATE PROCESSING TOOL

HIGH SPEED EPITAXY SYSTEM AND METHODS

REFLECTOR AND SUSCEPTOR ASSEMBLY FOR CHEMICAL VAPOR DEPOSITION REACTOR

HIGH SPEED EPI SYSTEM AND CHAMBER CONCEPTS

PROCESS GAS PREHEATING SYSTEMS AND METHODS FOR DOUBLE-SIDED MULTI-S...

METHODS FOR SUBSTRATE PROCESSING

EPITAXIAL LIFT OFF SYSTEMS AND METHODS

INDEPENDENT RADIANT GAS PREHEATING FOR PRECURSOR DISASSOCIATION CON...