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Brian Severson
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Chandler, AZ, US
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Patents Grants
last 30 patents
Information
Patent Grant
Variable depth edge ring for etch uniformity control
Patent number
11,342,163
Issue date
May 24, 2022
Lam Research Corporation
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable depth edge ring for etch uniformity control
Patent number
10,651,015
Issue date
May 12, 2020
Lam Research Corporation
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer lift ring system for wafer transfer
Patent number
10,438,833
Issue date
Oct 8, 2019
Lam Research Corporation
Brian Severson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pedestal covers
Patent number
8,851,463
Issue date
Oct 7, 2014
Novellus Systems, Inc.
Ivelin Angelov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Pedestal covers
Patent number
8,371,567
Issue date
Feb 12, 2013
Novellus Systems, Inc.
Ivelin Angelov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Pedestal cover
Patent number
D671901
Issue date
Dec 4, 2012
Novellus Systems, Inc.
Ivelin Angelov
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
CMP apparatuses with polishing assemblies that provide for the pass...
Patent number
7,632,170
Issue date
Dec 15, 2009
Novellus Systems, Inc.
Fergal O'Moore
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head for workpiece planarization/polishing
Patent number
7,402,098
Issue date
Jul 22, 2008
Novellus Systems, Inc.
Brian Severson
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head for workpiece planarization/polishing
Patent number
7,335,092
Issue date
Feb 26, 2008
Novellus Systems, Inc.
Brian Severson
B24 - GRINDING POLISHING
Information
Patent Grant
CMP apparatus and method
Patent number
7,229,339
Issue date
Jun 12, 2007
Novellus Systems, Inc.
John F. Stumpf
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
Publication number
20200273671
Publication date
Aug 27, 2020
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER LIFT RING SYSTEM FOR WAFER TRANSFER
Publication number
20170236743
Publication date
Aug 17, 2017
LAM RESEARCH CORPORATION
Brian Severson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
Publication number
20170236741
Publication date
Aug 17, 2017
LAM RESEARCH CORPORATION
Ivelin Angelov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PEDESTAL COVERS
Publication number
20130122431
Publication date
May 16, 2013
Ivelin Angelov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PEDESTAL COVERS
Publication number
20120264051
Publication date
Oct 18, 2012
Novellus Systems, Inc.
Ivelin Angelov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Partial Contact Wafer Retaining Ring Apparatus
Publication number
20100120335
Publication date
May 13, 2010
Novellus Systems, Inc.
Haoquan Fang
B24 - GRINDING POLISHING
Information
Patent Application
CMP APPARATUSES WITH POLISHING ASSEMBLIES THAT PROVIDE FOR THE PASS...
Publication number
20080318495
Publication date
Dec 25, 2008
Novellus Systems, Inc.
Fergal O'Moore
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER HEAD FOR WORKPIECE PLANARIZATION/POLISHING
Publication number
20080102732
Publication date
May 1, 2008
Novellus Systems, Inc.
Brian Severson
B24 - GRINDING POLISHING
Information
Patent Application
CMP apparatus and method
Publication number
20060003671
Publication date
Jan 5, 2006
John F. Stumpf
B24 - GRINDING POLISHING