Burn J. Lin

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Simple repair method for phase shifting masks
- Patent number 5,795,685
- Issue date Aug 18, 1998
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Step and repeat apparatus having enhanced accuracy and increased th...
- Patent number 5,715,064
- Issue date Feb 3, 1998
- International Business Machines Corporation
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proximity-dispensing high-throughput low-consumption resist coating...
- Patent number 5,571,560
- Issue date Nov 5, 1996
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Combined attenuated-alternating phase shifting mask structure and f...
- Patent number 5,565,286
- Issue date Oct 15, 1996
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Split and cover technique for phase shifting photolithography
- Patent number 5,523,186
- Issue date Jun 4, 1996
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Orthogonally separated phase shifted and unphase shifted mask patte...
- Patent number 5,472,814
- Issue date Dec 5, 1995
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Material-saving resist spinner and process
- Patent number 5,449,405
- Issue date Sep 12, 1995
- International Business Machines Corporation
- Thomas J. Cardinali
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of inspecting phase shift masks employing phase-error enhancing
- Patent number 5,446,540
- Issue date Aug 29, 1995
- International Business Machines Corporation
- Burn J. Lin
- G02 - OPTICS
Information Patent Grant
Alternating rim phase-shifting mask
- Patent number 5,403,682
- Issue date Apr 4, 1995
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Material-saving resist spinner and process
- Patent number 5,378,511
- Issue date Jan 3, 1995
- International Business Machines Corporation
- Thomas J. Cardinali
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ resist control during spray and spin in vapor
- Patent number 5,366,757
- Issue date Nov 22, 1994
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feature biassing and absorptive phase-shifting techniques to improv...
- Patent number 5,288,569
- Issue date Feb 22, 1994
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask-structure and process to repair missing or unwanted phase-shif...
- Patent number 5,272,024
- Issue date Dec 21, 1993
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic process having improved image quality
- Patent number 4,902,899
- Issue date Feb 20, 1990
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterned resist and process
- Patent number 4,737,425
- Issue date Apr 12, 1988
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for real-time monitoring the characteristics, variations and...
- Patent number 4,585,342
- Issue date Apr 29, 1986
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polystyrene-tetrathiafulvalene polymers as deep-ultraviolet mask ma...
- Patent number 4,543,319
- Issue date Sep 24, 1985
- International Business Machines Corporation
- Vivian W. Chao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical projection printing threshold leveling arrangement
- Patent number 4,456,371
- Issue date Jun 26, 1984
- International Business Machines Corporation
- Burn J. Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of using a o-quinone diazide sensitized phenol-formaldehyde...
- Patent number 4,211,834
- Issue date Jul 8, 1980
- International Business Machines Corporation
- Constantino Lapadula
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist development control system
- Patent number 4,142,107
- Issue date Feb 27, 1979
- International Business Machines Corporation
- Michael Hatzakis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Jig and process for contact printing
- Patent number 4,054,383
- Issue date Oct 18, 1977
- International Business Machines Corporation
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dynamic magnetic bubble display system
- Patent number 3,971,887
- Issue date Jul 27, 1976
- International Business Machines Corporation
- Burn Jeng Lin
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Dynamic magnetic bubble display system
- Patent number 3,965,299
- Issue date Jun 22, 1976
- International Business Machines Corporation
- Burn Jeng Lin
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS

Burn J. Lin

Person

Patents Grantslast 30 patents

Simple repair method for phase shifting masks

Step and repeat apparatus having enhanced accuracy and increased th...

Proximity-dispensing high-throughput low-consumption resist coating...

Combined attenuated-alternating phase shifting mask structure and f...

Split and cover technique for phase shifting photolithography

Orthogonally separated phase shifted and unphase shifted mask patte...

Material-saving resist spinner and process

Method of inspecting phase shift masks employing phase-error enhancing

Alternating rim phase-shifting mask

Material-saving resist spinner and process

In situ resist control during spray and spin in vapor

Feature biassing and absorptive phase-shifting techniques to improv...

Mask-structure and process to repair missing or unwanted phase-shif...

Lithographic process having improved image quality

Patterned resist and process

System for real-time monitoring the characteristics, variations and...

Polystyrene-tetrathiafulvalene polymers as deep-ultraviolet mask ma...

Optical projection printing threshold leveling arrangement

Method of using a o-quinone diazide sensitized phenol-formaldehyde...

Resist development control system

Jig and process for contact printing

Dynamic magnetic bubble display system

Dynamic magnetic bubble display system