Burn Jeng Lin

Person

HsinChu City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Defect measurement method
- Patent number 12,142,537
- Issue date Nov 12, 2024
- National Tsing Hua University
- Burn-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection using semiconductor detector
- Patent number 12,009,177
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Chin King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection using semiconductor detector
- Patent number 11,824,133
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ya-Chin King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micro detector
- Patent number 11,335,609
- Issue date May 17, 2022
- National Tsing Hua University
- Burn-Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an integrated circuit with non-printable dumm...
- Patent number 11,061,317
- Issue date Jul 13, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Immersion lithography system using a sealed wafer bath
- Patent number 11,003,097
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating an integrated circuit with a pattern density-...
- Patent number 10,811,225
- Issue date Oct 20, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersion lithography system using a sealed wafer bath
- Patent number 10,520,836
- Issue date Dec 31, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating an integrated circuit with a pattern density-...
- Patent number 10,431,423
- Issue date Oct 1, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating an integrated circuit with non-printable dumm...
- Patent number 10,359,695
- Issue date Jul 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of fabricating an integrated circuit with a pattern density-...
- Patent number 10,170,276
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersion lithography system using a sealed wafer bath
- Patent number 10,168,625
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for planarizing material layers
- Patent number 9,934,991
- Issue date Apr 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd
- Burn Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for charged particle lithography system
- Patent number 9,911,575
- Issue date Mar 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,810,994
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography system using a sealed wafer bath
- Patent number 9,696,634
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Grid refinement method
- Patent number 9,678,434
- Issue date Jun 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating an integrated circuit with non-printable dumm...
- Patent number 9,594,862
- Issue date Mar 14, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating an integrated circuit with a pattern density-...
- Patent number 9,552,964
- Issue date Jan 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid refinement method
- Patent number 9,529,271
- Issue date Dec 27, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple edge enabled patterning
- Patent number 9,524,939
- Issue date Dec 20, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Feng Shieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,519,225
- Issue date Dec 13, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating an integrated circuit with block dummy for op...
- Patent number 9,436,788
- Issue date Sep 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of fabricating an integrated circuit with optimized pattern...
- Patent number 9,436,787
- Issue date Sep 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for charged particle lithography system
- Patent number 9,390,891
- Issue date Jul 12, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for planarizing a polymer layer
- Patent number 9,330,933
- Issue date May 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grid refinement method
- Patent number 9,329,488
- Issue date May 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern generator for a lithography system
- Patent number 9,291,913
- Issue date Mar 22, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Hua Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multiple edge enabled patterning
- Patent number 9,287,125
- Issue date Mar 15, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Feng Shieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for high-throughput and small-footprint scannin...
- Patent number 9,229,332
- Issue date Jan 5, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240405087
- Publication date Dec 5, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE, SYSTEM AND METHOD FOR VOLTAGE GENERATING
- Publication number 20240395641
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin King
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION USING SEMICONDUCTOR DETECTOR
- Publication number 20240290575
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
- Publication number 20240111210
- Publication date Apr 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Hsiung LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
- Publication number 20240112912
- Publication date Apr 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Hsiung LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR
- Publication number 20240038921
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND DETECTING M...
- Publication number 20230378377
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND MET...
- Publication number 20230259024
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jui-Hsiung LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION USING SEMICONDUCTOR DETECTOR
- Publication number 20230026707
- Publication date Jan 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS AND METHOD OF USING THE SAME
- Publication number 20220252989
- Publication date Aug 11, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Der Chih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION USING SEMICONDUCTOR DETECTOR
- Publication number 20210407764
- Publication date Dec 30, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ya-Chin KING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT MEASUREMENT METHOD
- Publication number 20210159129
- Publication date May 27, 2021
- National Tsing Hua University
- Burn-Jeng LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICRO DETECTOR AND DEFECT MEASUREMENT METHOD
- Publication number 20200321255
- Publication date Oct 8, 2020
- National Tsing Hua University
- Burn-Jeng LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSION LITHOGRAPHY SYSTEM USING A SEALED WAFER BATH
- Publication number 20200124992
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...
- Publication number 20200027699
- Publication date Jan 23, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating an Integrated Circuit with Non-Printable Dumm...
- Publication number 20190339610
- Publication date Nov 7, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...
- Publication number 20190214227
- Publication date Jul 11, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Immersion Lithography System Using a Sealed Wafer Bath
- Publication number 20190113855
- Publication date Apr 18, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion Lithography System Using a Sealed Wafer Bath
- Publication number 20170299968
- Publication date Oct 19, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng LIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...
- Publication number 20170186584
- Publication date Jun 29, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating an Integrated Circuit With Non-Printable Dumm...
- Publication number 20170176849
- Publication date Jun 22, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
GRID REFINEMENT METHOD
- Publication number 20170102624
- Publication date Apr 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...
- Publication number 20170082926
- Publication date Mar 23, 2017
- Taiwan Semiconductor Manufacturing Co., LTD
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for Charged Particle Lithography System
- Publication number 20160322199
- Publication date Nov 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Grid Refinement Method
- Publication number 20160246912
- Publication date Aug 25, 2016
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Multiple Edge Enabled Patterning
- Publication number 20160190070
- Publication date Jun 30, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ming-Feng Shieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...
- Publication number 20160091795
- Publication date Mar 31, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Burn Jeng Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Grid Refinement Method
- Publication number 20160055291
- Publication date Feb 25, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Chuan Wang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus for Charged Particle Lithography System
- Publication number 20160049278
- Publication date Feb 18, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Chi Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Fabricating an Integrated Circuit with a Pattern Density-...
- Publication number 20150371821
- Publication date Dec 24, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyuh-Fuh Lin
- H01 - BASIC ELECTRIC ELEMENTS

Burn Jeng Lin

Person

Patents Grantslast 30 patents

Defect measurement method

Detection using semiconductor detector

Detection using semiconductor detector

Micro detector

Method of fabricating an integrated circuit with non-printable dumm...

Immersion lithography system using a sealed wafer bath

Method of fabricating an integrated circuit with a pattern density-...

Immersion lithography system using a sealed wafer bath

Method of fabricating an integrated circuit with a pattern density-...

Method of fabricating an integrated circuit with non-printable dumm...

Method of fabricating an integrated circuit with a pattern density-...

Immersion lithography system using a sealed wafer bath

Method and apparatus for planarizing material layers

Apparatus for charged particle lithography system

Systems and methods for high-throughput and small-footprint scannin...

Immersion lithography system using a sealed wafer bath

Grid refinement method

Method of fabricating an integrated circuit with non-printable dumm...

Method of fabricating an integrated circuit with a pattern density-...

Grid refinement method

Multiple edge enabled patterning

Systems and methods for high-throughput and small-footprint scannin...

Method of fabricating an integrated circuit with block dummy for op...

Method of fabricating an integrated circuit with optimized pattern...

Apparatus for charged particle lithography system

Method and apparatus for planarizing a polymer layer

Grid refinement method

Pattern generator for a lithography system

Multiple edge enabled patterning

Systems and methods for high-throughput and small-footprint scannin...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

DEVICE, SYSTEM AND METHOD FOR VOLTAGE GENERATING

DETECTION USING SEMICONDUCTOR DETECTOR

PHOTORESIST AND FORMATION METHOD THEREOF

PHOTORESIST AND FORMATION METHOD THEREOF

SEMICONDUCTOR DETECTOR

SEMICONDUCTOR DEVICE, MANUFACTURING METHOD THEREOF, AND DETECTING M...

PHOTORESIST, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND MET...

DETECTION USING SEMICONDUCTOR DETECTOR

SEMICONDUCTOR FABRICATION APPARATUS AND METHOD OF USING THE SAME

DETECTION USING SEMICONDUCTOR DETECTOR

DEFECT MEASUREMENT METHOD

MICRO DETECTOR AND DEFECT MEASUREMENT METHOD

IMMERSION LITHOGRAPHY SYSTEM USING A SEALED WAFER BATH

METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...

Method of Fabricating an Integrated Circuit with Non-Printable Dumm...

METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...

Immersion Lithography System Using a Sealed Wafer Bath

Immersion Lithography System Using a Sealed Wafer Bath

METHOD OF FABRICATING AN INTEGRATED CIRCUIT WITH A PATTERN DENSITY-...

Method of Fabricating an Integrated Circuit With Non-Printable Dumm...

GRID REFINEMENT METHOD

SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...

Apparatus for Charged Particle Lithography System

Grid Refinement Method

Multiple Edge Enabled Patterning

SYSTEMS AND METHODS FOR HIGH-THROUGHPUT AND SMALL-FOOTPRINT SCANNIN...

Grid Refinement Method

Apparatus for Charged Particle Lithography System

Method of Fabricating an Integrated Circuit with a Pattern Density-...