-
-
-
-
-
CATALYST ENHANCED SEAMLESS RUTHENIUM GAP FILL
-
Publication number 20220333232
-
Publication date Oct 20, 2022
-
Applied Materials, Inc.
-
Byunghoon Yoon
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
DEPOSITION OF METAL FILMS
-
Publication number 20210317570
-
Publication date Oct 14, 2021
-
Applied Materials, Inc.
-
Byunghoon Yoon
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
GAP FILL METHODS USING CATALYZED DEPOSITION
-
Publication number 20210285102
-
Publication date Sep 16, 2021
-
Applied Materials, Inc.
-
Byunghoon Yoon
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
CATALYST ENHANCED SEAMLESS RUTHENIUM GAP FILL
-
Publication number 20210214842
-
Publication date Jul 15, 2021
-
Applied Materials, Inc.
-
Byunghoon Yoon
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
-
CATALYZED DEPOSITION OF METAL FILMS
-
Publication number 20190390340
-
Publication date Dec 26, 2019
-
Applied Materials, Inc.
-
Sang Ho Yu
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-