C. Neil Berglund

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Lake Oswego, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Gated photocathode for controlled single and multiple electron beam...
- Patent number 6,376,985
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of forming gated photocathode for controlled single and mult...
- Patent number 6,220,914
- Issue date Apr 24, 2001
- Etec Systems, Inc.
- Kim Y. Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for direct writing of semiconductor die using...
- Patent number 6,145,438
- Issue date Nov 14, 2000
- C. Neil Berglund
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dose modulation and pixel deflection for raster scan lithography
- Patent number 5,393,987
- Issue date Feb 28, 1995
- Etec Systems, Inc.
- Frank E. Abboud
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multiphase printing for E-beam lithography
- Patent number 5,103,101
- Issue date Apr 7, 1992
- Etec Systems, Inc.
- C. Neil Berglund
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Automated system for extracting design and layout information from...
- Patent number 5,086,477
- Issue date Feb 4, 1992
- Northwest Technology Corp.
- Kenneth K. Yu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
MOS Dynamic RAM cell and method of fabrication
- Patent number 4,409,259
- Issue date Oct 11, 1983
- Intel Corporation
- Mark T. Bohr
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
GATE PHOTOCATHODE FOR CONTROLLED SINGLE AND MULTIPLE ELECTRON BEAM...
- Publication number 20010038263
- Publication date Nov 8, 2001
- KIM Y. LEE
- B82 - NANO-TECHNOLOGY