Cédric Désiré GROUWSTRA

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Device manufacturing methods
- Patent number 12,078,935
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Rizvi Rahman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,782,349
- Issue date Oct 10, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,592,753
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 11,525,786
- Issue date Dec 13, 2022
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optimizing an apparatus for multi-stage processing of product units
- Patent number 11,520,238
- Issue date Dec 6, 2022
- ASML Netherlands B.V.
- Jelle Nije
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Computational metrology based correction and control
- Patent number 11,448,973
- Issue date Sep 20, 2022
- ASML Netherlands B.V.
- Manouk Rijpstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device manufacturing methods
- Patent number 11,442,366
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Rizvi Rahman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of determining corrections for a patterning process, device...
- Patent number 11,327,407
- Issue date May 10, 2022
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optimizing an apparatus for multi-stage processing of product units
- Patent number 11,150,562
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Jelle Nije
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,955,353
- Issue date Mar 23, 2021
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Methods of determining corrections for a patterning process
- Patent number 10,877,381
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weitian Kou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 10,649,341
- Issue date May 12, 2020
- ASML Netherlands B.V.
- Clemens Johannes Gerardus Van den Dungen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,509,326
- Issue date Dec 17, 2019
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 10,241,055
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method of adjusting speed and/or routing of a table movement plan a...
- Patent number 9,964,865
- Issue date May 8, 2018
- ASML Netherlands B.V.
- Cédric Désiré Grouwstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,703,210
- Issue date Jul 11, 2017
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,465,302
- Issue date Oct 11, 2016
- ASML Netherlands B.V.
- Clemens Johannes Gerardus Van den Dungen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of adjusting speed and/or routing of a table movement plan a...
- Patent number 9,329,491
- Issue date May 3, 2016
- ASML Netherlands B.V.
- Cédric Désiré Grouwstra
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,036,127
- Issue date May 19, 2015
- ASML Netherlands B.V.
- Clemens Johannes Gerardus Van den Dungen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,941,811
- Issue date Jan 27, 2015
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,760,662
- Issue date Jun 24, 2014
- ASML Netherlands B.V.
- Arie Jeffrey Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,638,419
- Issue date Jan 28, 2014
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,553,230
- Issue date Oct 8, 2013
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a substrate and method of preparing a substrat...
- Patent number 8,435,593
- Issue date May 7, 2013
- ASML Netherlands B.V.
- Rik Teodoor Vangheluwe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,330,936
- Issue date Dec 11, 2012
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithography
- Patent number 8,129,097
- Issue date Mar 6, 2012
- ASML Netherlands B.V.
- Dirk De Vries
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,115,899
- Issue date Feb 14, 2012
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 8,054,467
- Issue date Nov 8, 2011
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,880,860
- Issue date Feb 1, 2011
- ASML Netherlands B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for angular-resolved spectroscopic lithography...
- Patent number 7,791,732
- Issue date Sep 7, 2010
- ASML Netherlands B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEVICE MANUFACTURING METHODS
- Publication number 20230004095
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL
- Publication number 20220365446
- Publication date Nov 17, 2022
- ASML NETHERLANDS B.V.
- Manouk RIJPSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20220229373
- Publication date Jul 21, 2022
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTIMIZING AN APPARATUS FOR MULTI-STAGE PROCESSING OF PRODUCT UNITS
- Publication number 20220004108
- Publication date Jan 6, 2022
- ASML NETHERLANDS B.V.
- Jelle NIJE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20210208083
- Publication date Jul 8, 2021
- ASML NETHERLANDS B.V.
- Arie Jeffrey DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...
- Publication number 20210080836
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL
- Publication number 20210080837
- Publication date Mar 18, 2021
- ASML NETHERLANDS B.V.
- Manouk RIJPSTRA
- G05 - CONTROLLING REGULATING
Information Patent Application
OPTIMIZING AN APPARATUS FOR MULTI-STAGE PROCESSING OF PRODUCT UNITS
- Publication number 20200233315
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Jelle NIJE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHODS
- Publication number 20200201191
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS
- Publication number 20200019067
- Publication date Jan 16, 2020
- ASML NETHERLANDS B.V.
- Weitian KOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20190170657
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170285488
- Publication date Oct 5, 2017
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20170023870
- Publication date Jan 26, 2017
- ASML NETHERLANDS B.V.
- Clemens Johannes Gerardus VAN DEN DUNGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF ADJUSTING SPEED AND/OR ROUTING OF A TABLE MOVEMENT PLAN A...
- Publication number 20160320714
- Publication date Nov 3, 2016
- ASML NETHERLANDS B.V.
- Cédric Désiré GROUWSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20150234294
- Publication date Aug 20, 2015
- ASML NETHERLANDS B.V.
- Clemens Johannes Gerardus VAN DEN DUNGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150116675
- Publication date Apr 30, 2015
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140233025
- Publication date Aug 21, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20140055788
- Publication date Feb 27, 2014
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria DEN BOEF
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Angular-Resolved Spectroscopic Lithography...
- Publication number 20120038929
- Publication date Feb 16, 2012
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120008119
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Hans JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF ADJUSTING SPEED AND/OR ROUTING OF A TABLE MOVEMENT PLAN A...
- Publication number 20120003381
- Publication date Jan 5, 2012
- ASML NETHERLANDS B.V.
- Cédric Désiré GROUWSTRA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110109887
- Publication date May 12, 2011
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20110007314
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20090262318
- Publication date Oct 22, 2009
- ASML NETHERLANDS B.V.
- Clemens Johannes Gerardus VAN DEN DUNGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography
- Publication number 20090170041
- Publication date Jul 2, 2009
- ASML NETHERLANDS B.V.
- Dirk De Vries
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of inspecting a substrate and method of preparing a substrat...
- Publication number 20080292780
- Publication date Nov 27, 2008
- ASML NETHERLANDS B.V.
- Rik Teodoor Vangheluwe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080068570
- Publication date Mar 20, 2008
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080002162
- Publication date Jan 3, 2008
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060132731
- Publication date Jun 22, 2006
- ASML NETHERLANDS B.V.
- Hans Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for angular-resolved spectroscopic lithography...
- Publication number 20060066855
- Publication date Mar 30, 2006
- ASML NETHERLANDS B.V.
- Arie Jeffrey Maria Den Boef
- G01 - MEASURING TESTING

Cédric Désiré GROUWSTRA

Person

Patents Grantslast 30 patents

Device manufacturing methods

Methods of determining corrections for a patterning process, device...

Methods of determining corrections for a patterning process, device...

Method and apparatus for angular-resolved spectroscopic lithography...

Optimizing an apparatus for multi-stage processing of product units

Computational metrology based correction and control

Device manufacturing methods

Methods of determining corrections for a patterning process, device...

Optimizing an apparatus for multi-stage processing of product units

Method and apparatus for angular-resolved spectroscopic lithography...

Methods of determining corrections for a patterning process

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...

Method of adjusting speed and/or routing of a table movement plan a...

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Method of adjusting speed and/or routing of a table movement plan a...

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...

Method of inspecting a substrate and method of preparing a substrat...

Lithographic apparatus and device manufacturing method

Immersion lithography

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...

Patents Applicationslast 30 patents

DEVICE MANUFACTURING METHODS

COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

OPTIMIZING AN APPARATUS FOR MULTI-STAGE PROCESSING OF PRODUCT UNITS

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS, DEVICE...

COMPUTATIONAL METROLOGY BASED CORRECTION AND CONTROL

OPTIMIZING AN APPARATUS FOR MULTI-STAGE PROCESSING OF PRODUCT UNITS

DEVICE MANUFACTURING METHODS

METHODS OF DETERMINING CORRECTIONS FOR A PATTERNING PROCESS

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS

METHOD OF ADJUSTING SPEED AND/OR ROUTING OF A TABLE MOVEMENT PLAN A...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

Method and Apparatus for Angular-Resolved Spectroscopic Lithography...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD OF ADJUSTING SPEED AND/OR ROUTING OF A TABLE MOVEMENT PLAN A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Method and apparatus for angular-resolved spectroscopic lithography...

LITHOGRAPHIC APPARATUS

Immersion lithography

Method of inspecting a substrate and method of preparing a substrat...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Method and apparatus for angular-resolved spectroscopic lithography...