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Chang-Chia Chang
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Hsin-Chu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS device structure and methods of forming same
Patent number
9,802,816
Issue date
Oct 31, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Chia Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device structure and methods of forming same
Patent number
9,139,420
Issue date
Sep 22, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Chia Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS Device Structure and Methods of Forming Same
Publication number
20160009551
Publication date
Jan 14, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Chia Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device Structure and Methods of Forming Same
Publication number
20130277777
Publication date
Oct 24, 2013
Taiwan Semiconductor Manufacturing Company, Ltd.
Chang-Chia Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY