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Chang Ju Choi
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Fremont, CA, US
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Patents Grants
last 30 patents
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Patent Grant
EUV phase-shift SRAF masks by means of embedded phase shift layers
Patent number
11,300,885
Issue date
Apr 12, 2022
Intel Corporation
Robert Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask processing techniques
Patent number
8,679,706
Issue date
Mar 25, 2014
Intel Corporation
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
High resolution phase shift mask
Patent number
8,399,158
Issue date
Mar 19, 2013
Intel Corporation
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
EUV PHASE-SHIFT SRAF MASKS BY MEANS OF EMBEDDED PHASE SHIFT LAYERS
Publication number
20200033736
Publication date
Jan 30, 2020
Intel Corporation
Robert BRISTOL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION PHOTOMASK OR RETICLE AND ITS METHOD OF FABRICATION
Publication number
20190025694
Publication date
Jan 24, 2019
Intel Corporation
Chang Ju CHOI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK PROCESSING TECHNIQUES
Publication number
20140030638
Publication date
Jan 30, 2014
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH RESOLUTION PHASE SHIFT MASK
Publication number
20120164563
Publication date
Jun 28, 2012
Chang Ju Choi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY