Chang Liu

Person

Winnetka, IL, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fusion sensor wireless decision device and system for using the same
- Patent number 10,613,493
- Issue date Apr 7, 2020
- Chang Liu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Soft MEMS
- Patent number 8,431,080
- Issue date Apr 30, 2013
- The Board of Trustees of the University of Illinois
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Artificial lateral line
- Patent number 8,056,419
- Issue date Nov 15, 2011
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Conformal mesh for thermal imaging
- Patent number 7,768,376
- Issue date Aug 3, 2010
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Microfabricated micro fluid channels
- Patent number 7,737,045
- Issue date Jun 15, 2010
- The Board of Trustees of the University of Illinois
- Chang Liu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Micromachined artificial haircell
- Patent number 7,661,319
- Issue date Feb 16, 2010
- The Board of Trustees of the University of Illinois
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Artificial lateral line
- Patent number 7,644,624
- Issue date Jan 12, 2010
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Multifunctional probe array system
- Patent number 7,523,650
- Issue date Apr 28, 2009
- The Board of Trustees of the University of Illinois
- Xuefeng Wang
- G01 - MEASURING TESTING
Information Patent Grant
Sensor chip and apparatus for tactile and/or flow sensing
- Patent number 7,516,671
- Issue date Apr 14, 2009
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Microfabricated pressure and shear stress sensors
- Patent number 7,509,869
- Issue date Mar 31, 2009
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Flexible structures for sensors and electronics
- Patent number 7,501,069
- Issue date Mar 10, 2009
- The Board of Trustees of the University of Illinois
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating a microscale anemometer
- Patent number 7,451,537
- Issue date Nov 18, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Sensor for monitoring material deposition
- Patent number 7,445,675
- Issue date Nov 4, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel, individually addressable probes for nanolithography
- Patent number 7,402,849
- Issue date Jul 22, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Sensor chip and apparatus for tactile and/or flow sensing
- Patent number 7,357,035
- Issue date Apr 15, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Microfluidic systems and components
- Patent number 7,351,303
- Issue date Apr 1, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus for detecting environmental conditions for a structure or...
- Patent number 7,343,136
- Issue date Mar 11, 2008
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Multifunctional probe array system
- Patent number 7,281,419
- Issue date Oct 16, 2007
- The Board of Trustees of the University of Illinois
- Xuefeng Wang
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic nanolithography probe actuation device and method
- Patent number 7,247,895
- Issue date Jul 24, 2007
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Microfabricated micro fluid channels
- Patent number 7,217,396
- Issue date May 15, 2007
- The Board of Trustees of the University of Illinois
- Chang Liu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Microdischarge devices and arrays having tapered microcavities
- Patent number 7,112,918
- Issue date Sep 26, 2006
- The Board of Trustees of the University of Illinois
- J. Gary Eden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning probe microscopy probes and methods
- Patent number 7,081,624
- Issue date Jul 25, 2006
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Microscale out-of-plane anemometer
- Patent number 6,923,054
- Issue date Aug 2, 2005
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Raised on-chip inductor and method of manufacturing same
- Patent number 6,922,127
- Issue date Jul 26, 2005
- The Trustees of the University of Illinois
- Jun Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor for monitoring material deposition and method of monitoring...
- Patent number 6,884,458
- Issue date Apr 26, 2005
- The Board of Trustees of the University of Illinois
- Chang Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel, individually addressable probes for nanolithography
- Patent number 6,867,443
- Issue date Mar 15, 2005
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Parallel, individually addressable probes for nanolithography
- Patent number 6,642,129
- Issue date Nov 4, 2003
- The Board of Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Grant
Wide tuning range variable MEMs capacitor
- Patent number 6,418,006
- Issue date Jul 9, 2002
- The Board of Trustees of the University of Illinois
- Chang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for assembly of microelectromechanical systems using magneti...
- Patent number 6,166,478
- Issue date Dec 26, 2000
- The Board of Trustees of the University of Illinois
- Yong Wuk Yi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
FUSION SENSOR WIRELESS DECISION DEVICE AND SYSTEM FOR USING THE SAME
- Publication number 20180039241
- Publication date Feb 8, 2018
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Advanced micro flow sensor
- Publication number 20120042715
- Publication date Feb 23, 2012
- Northwestern University
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
SCANNING PROBE EPITAXY
- Publication number 20100115672
- Publication date May 6, 2010
- Northwestern University
- Chad A. Mirkin
- G01 - MEASURING TESTING
Information Patent Application
Soft Mems
- Publication number 20100072565
- Publication date Mar 25, 2010
- The Board of trustees of the University of Illinois
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING PROBE EPITAXY
- Publication number 20100071098
- Publication date Mar 18, 2010
- Northwestern University
- Chad A. Mirkin
- G01 - MEASURING TESTING
Information Patent Application
Artificial Lateral Line
- Publication number 20100010754
- Publication date Jan 14, 2010
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
CONFORMAL MESH FOR THERMAL IMAGING
- Publication number 20080219320
- Publication date Sep 11, 2008
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Microfabricated temperature sensor
- Publication number 20080089383
- Publication date Apr 17, 2008
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Micromachined artificial haircell
- Publication number 20080072683
- Publication date Mar 27, 2008
- The Board of trustees of the University of Illinois
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Artificial lateral line
- Publication number 20080072682
- Publication date Mar 27, 2008
- The Board of trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Method of fabricating an artificial haircell
- Publication number 20080022513
- Publication date Jan 31, 2008
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Microfabricated pressure and shear stress sensors
- Publication number 20080022778
- Publication date Jan 31, 2008
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
MICROFLUIDIC SYSTEMS AND COMPONENTS
- Publication number 20080017306
- Publication date Jan 24, 2008
- The Board of Trustees of the University of Illinoi
- Chang Liu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
MULTIFUNCTIONAL PROBE ARRAY SYSTEM
- Publication number 20070289369
- Publication date Dec 20, 2007
- Xuefeng Wang
- G01 - MEASURING TESTING
Information Patent Application
Sensor chip and apparatus for tactile and/or flow sensing
- Publication number 20070234793
- Publication date Oct 11, 2007
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
MICROFABRICATED MICRO FLUID CHANNELS
- Publication number 20070163647
- Publication date Jul 19, 2007
- Chang Liu
- C40 - COMBINATORIAL CHEMISTRY
Information Patent Application
MULTIFUNCTIONAL PROBE ARRAY SYSTEM
- Publication number 20070062264
- Publication date Mar 22, 2007
- Xuefeng Wang
- G01 - MEASURING TESTING
Information Patent Application
Flexible Structures For Sensors And Electronics
- Publication number 20070020445
- Publication date Jan 25, 2007
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Chang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrostatic nanolithography probe actuation device and method
- Publication number 20060228873
- Publication date Oct 12, 2006
- The Board of trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Parallel, individually addressable probes for nanolithography
- Publication number 20060082379
- Publication date Apr 20, 2006
- The Board Trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Method for fabricating a microscale anemometer
- Publication number 20050268455
- Publication date Dec 8, 2005
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Scanning probe microscope probe with integrated capillary channel
- Publication number 20050236566
- Publication date Oct 27, 2005
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Sensor for monitoring material deposition
- Publication number 20050178326
- Publication date Aug 18, 2005
- Chang Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROSCALE OUT-OF-PLANE ANEMOMETER
- Publication number 20050109102
- Publication date May 26, 2005
- The Board of Trustees of the University o f Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Sensor chip and apparatus for tactile and/or flow sensing
- Publication number 20050021247
- Publication date Jan 27, 2005
- The Board of Trustees of the University of Illionis
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for detecting environmental conditions for a structure or...
- Publication number 20050017873
- Publication date Jan 27, 2005
- The Board of trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Scanning probe microscopy probe and method for scanning probe conta...
- Publication number 20040228962
- Publication date Nov 18, 2004
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Scanning probe microscopy probe and method for scanning probe conta...
- Publication number 20040227075
- Publication date Nov 18, 2004
- Chang Liu
- G01 - MEASURING TESTING
Information Patent Application
Microfabricated micro fluid channels
- Publication number 20040223886
- Publication date Nov 11, 2004
- Chang Liu
- C40 - COMBINATORIAL CHEMISTRY
Information Patent Application
Parallel, individually addressable probes for nanolithography
- Publication number 20040119490
- Publication date Jun 24, 2004
- The Board of trustees of the University of Illinois
- Chang Liu
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Fusion sensor wireless decision device and system for using the same

Soft MEMS

Artificial lateral line

Conformal mesh for thermal imaging

Microfabricated micro fluid channels

Micromachined artificial haircell

Artificial lateral line

Multifunctional probe array system

Sensor chip and apparatus for tactile and/or flow sensing

Microfabricated pressure and shear stress sensors

Flexible structures for sensors and electronics

Method for fabricating a microscale anemometer

Sensor for monitoring material deposition

Parallel, individually addressable probes for nanolithography

Sensor chip and apparatus for tactile and/or flow sensing

Microfluidic systems and components

Apparatus for detecting environmental conditions for a structure or...

Multifunctional probe array system

Electrostatic nanolithography probe actuation device and method

Microfabricated micro fluid channels

Microdischarge devices and arrays having tapered microcavities

Scanning probe microscopy probes and methods

Microscale out-of-plane anemometer

Raised on-chip inductor and method of manufacturing same

Sensor for monitoring material deposition and method of monitoring...

Parallel, individually addressable probes for nanolithography

Parallel, individually addressable probes for nanolithography

Wide tuning range variable MEMs capacitor

Method for assembly of microelectromechanical systems using magneti...

Patents Applicationslast 30 patents

FUSION SENSOR WIRELESS DECISION DEVICE AND SYSTEM FOR USING THE SAME

Advanced micro flow sensor

SCANNING PROBE EPITAXY

Soft Mems

SCANNING PROBE EPITAXY

Artificial Lateral Line

CONFORMAL MESH FOR THERMAL IMAGING

Microfabricated temperature sensor

Micromachined artificial haircell

Artificial lateral line

Method of fabricating an artificial haircell

Microfabricated pressure and shear stress sensors

MICROFLUIDIC SYSTEMS AND COMPONENTS

MULTIFUNCTIONAL PROBE ARRAY SYSTEM

Sensor chip and apparatus for tactile and/or flow sensing

MICROFABRICATED MICRO FLUID CHANNELS

MULTIFUNCTIONAL PROBE ARRAY SYSTEM

Flexible Structures For Sensors And Electronics

Electrostatic nanolithography probe actuation device and method

Parallel, individually addressable probes for nanolithography

Method for fabricating a microscale anemometer

Scanning probe microscope probe with integrated capillary channel

Sensor for monitoring material deposition

MICROSCALE OUT-OF-PLANE ANEMOMETER

Sensor chip and apparatus for tactile and/or flow sensing

Apparatus for detecting environmental conditions for a structure or...

Scanning probe microscopy probe and method for scanning probe conta...

Scanning probe microscopy probe and method for scanning probe conta...

Microfabricated micro fluid channels

Parallel, individually addressable probes for nanolithography