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Changhun Lee
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sensors and system for in-situ edge ring erosion monitor
Patent number
12,009,236
Issue date
Jun 11, 2024
Applied Materials, Inc.
Yaoling Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ash rate recovery method in plasma strip chamber
Patent number
11,955,318
Issue date
Apr 9, 2024
Applied Materials, Inc.
Yongkwan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for reducing particle defects in plasma etch c...
Patent number
11,488,812
Issue date
Nov 1, 2022
Applied Materials, Inc.
Xikun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support pedestal
Patent number
D931240
Issue date
Sep 21, 2021
Applied Materials, Inc.
Changhun Lee
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Processing chamber with substrate edge enhancement processing
Patent number
11,094,511
Issue date
Aug 17, 2021
Applied Materials, Inc.
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer based corrosion and time dependent chemical effects
Patent number
11,088,000
Issue date
Aug 10, 2021
Applied Materials, Inc.
Leonard Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for reducing particle defects in plasma etch c...
Patent number
10,658,161
Issue date
May 19, 2020
Applied Materials, Inc.
Xikun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer based corrosion and time dependent chemical effects
Patent number
10,515,862
Issue date
Dec 24, 2019
Applied Materials, Inc.
Leonard Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of non-destructive post tungsten etch residue removal
Patent number
10,217,627
Issue date
Feb 26, 2019
Applied Materials, Inc.
Danny Chien Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate placement detection in semiconductor equipment using ther...
Patent number
9,885,567
Issue date
Feb 6, 2018
Applied Materials, Inc.
Jared Ahmad Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generation source employing dielectric conduit assemblies ha...
Patent number
9,155,184
Issue date
Oct 6, 2015
Applied Materials, Inc.
Siu Tang Ng
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Low sloped edge ring for plasma processing chamber
Patent number
8,771,423
Issue date
Jul 8, 2014
Applied Materials, Inc.
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low sloped edge ring for plasma processing chamber
Patent number
8,287,650
Issue date
Oct 16, 2012
Applied Materials, Inc.
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for controlling corrosion of a substrate
Patent number
8,101,025
Issue date
Jan 24, 2012
Applied Materials, Inc.
Eu Jin Lim
B08 - CLEANING
Information
Patent Grant
Hydrogen ashing enhanced with water vapor and diluent gas
Patent number
7,807,579
Issue date
Oct 5, 2010
Applied Materials, Inc.
Chan-Syun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for fabricating an interconnect line
Patent number
6,767,821
Issue date
Jul 27, 2004
Chan-syun David Yang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20240321610
Publication date
Sep 26, 2024
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASH RATE RECOVERY METHOD IN PLASMA STRIP CHAMBER
Publication number
20220293395
Publication date
Sep 15, 2022
Applied Materials, Inc.
Yongkwan KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LOW CONTACT AREA SUBSTRATE SUPPORT FOR ETCHING CHAMBER
Publication number
20210035851
Publication date
Feb 4, 2021
Applied Materials, Inc.
CHANGHUN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSORS AND SYSTEM FOR IN-SITU EDGE RING EROSION MONITOR
Publication number
20200335368
Publication date
Oct 22, 2020
Applied Materials, Inc.
Yaoling PAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING CHAMBER WITH SUBSTRATE EDGE ENHANCEMENT PROCESSING
Publication number
20200152431
Publication date
May 14, 2020
Applied Materials, Inc.
Changhun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
Publication number
20200152425
Publication date
May 14, 2020
Applied Materials, Inc.
Vahid FIROUZDOR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS
Publication number
20200118896
Publication date
Apr 16, 2020
Applied Materials, Inc.
Leonard Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR REDUCING PARTICLE DEFECTS IN PLASMA ETCH C...
Publication number
20190295826
Publication date
Sep 26, 2019
Applied Materials, Inc.
Xikun WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER BASED CORROSION & TIME DEPENDENT CHEMICAL EFFECTS
Publication number
20180294200
Publication date
Oct 11, 2018
Applied Materials, Inc.
Leonard TEDESCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENDPOINT GAS LINE FILTER FOR SUBSTRATE PROCESSING EQUIPMENT
Publication number
20180122655
Publication date
May 3, 2018
Applied Materials, Inc.
Vahid FIROUZDOR
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER COMPONENT ASSEMBLY WITH PLASMA RESISTA...
Publication number
20180019104
Publication date
Jan 18, 2018
Applied Materials, Inc.
Vahid FIROUZDOR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINGLE RING DESIGN FOR HIGH YIELD, SUBSTRATE EXTREME EDGE DEFECT RE...
Publication number
20160099162
Publication date
Apr 7, 2016
Applied Materials, Inc.
Siu Tang NG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION SOURCE EMPLOYING DIELECTRIC CONDUIT ASSEMBLIES HA...
Publication number
20150137681
Publication date
May 21, 2015
Applied Materials, Inc.
Siu Tang NG
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD OF NON-DESTRUCTIVE POST TUNGSTEN ETCH RESIDUE REMOVAL
Publication number
20150096589
Publication date
Apr 9, 2015
Applied Materials, Inc.
Danny Chien LU
B08 - CLEANING
Information
Patent Application
SUBSTRATE PLACEMENT DETECTION IN SEMICONDUCTOR EQUIPMENT USING THER...
Publication number
20150063405
Publication date
Mar 5, 2015
Applied Materials, Inc.
JARED AHMAD LEE
G01 - MEASURING TESTING
Information
Patent Application
POST ETCH TREATMENT TECHNOLOGY FOR ENHANCING PLASMA-ETCHED SILICON...
Publication number
20150064880
Publication date
Mar 5, 2015
Applied Materials, Inc.
Jun Wan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW SLOPED EDGE RING FOR PLASMA PROCESSING CHAMBER
Publication number
20130032478
Publication date
Feb 7, 2013
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR REDUCING PARTICLE DEFECTS IN PLASMA ETCH C...
Publication number
20120091095
Publication date
Apr 19, 2012
Applied Materials, Inc.
Xikun WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW SLOPED EDGE RING FOR PLASMA PROCESSING CHAMBER
Publication number
20100059181
Publication date
Mar 11, 2010
Changhun Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR ADJUSTING CRITICAL DIMENSION UNIFORMITY IN AN ETCH PROC...
Publication number
20100003828
Publication date
Jan 7, 2010
Guowen Ding
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR EXTENDING CHAMBER COMPONENT LIFE TIME
Publication number
20090163033
Publication date
Jun 25, 2009
GUOWEN DING
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCH SYSTEM
Publication number
20090139657
Publication date
Jun 4, 2009
Applied Materials, Inc.
CHANGHUN LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYDROGEN ASHING ENHANCED WITH WATER VAPOR AND DILUENT GAS
Publication number
20080261405
Publication date
Oct 23, 2008
Applied Materials, Inc.
Chan-Syun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for controlling corrosion of a substrate
Publication number
20060137710
Publication date
Jun 29, 2006
Applied Materials, Inc.
Eu Jin Lim
B08 - CLEANING