Charles Arthur Whiting

Person

Milton, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for detection of photolithographic defocus
- Patent number 6,968,288
- Issue date Nov 22, 2005
- International Business Machines Corporation
- Dennis L. Macaluso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of photolithographic exposure dose control as a function of...
- Patent number 6,856,378
- Issue date Feb 15, 2005
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Feedback method utilizing lithographic exposure field dimensions to...
- Patent number 6,735,492
- Issue date May 11, 2004
- International Business Machines Corporation
- Edward W. Conrad
- G05 - CONTROLLING REGULATING
Information Patent Grant
Feed-forward lithographic overlay offset method and system
- Patent number 6,694,498
- Issue date Feb 17, 2004
- Internationl Business Machines Corporation
- Edward W. Conrad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of photolithographic exposure dose control as a function of...
- Patent number 6,674,516
- Issue date Jan 6, 2004
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and arrangement for controlling image size of integrated cir...
- Patent number 6,606,533
- Issue date Aug 12, 2003
- International Business Machines Corporation
- Charles A. Whiting
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Capacitive alignment structure and method for chip stacking
- Patent number 6,518,679
- Issue date Feb 11, 2003
- International Business Machines Corporation
- Ning Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling image size of integrated circuits on wafers...
- Patent number 6,377,334
- Issue date Apr 23, 2002
- International Business Machines Corporation
- Charles A. Whiting
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual use alignment aid
- Patent number 6,342,735
- Issue date Jan 29, 2002
- International Business Machines Corporation
- James J. Colelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for adjusting a tilt of a lithography tool
- Patent number 6,278,515
- Issue date Aug 21, 2001
- International Business Machines Corporation
- Stephen E. Knight
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling image size of integrated circuits on wafers...
- Patent number 6,235,439
- Issue date May 22, 2001
- International Business Machines Corporation
- Charles A. Whiting
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hot plate with in situ surface temperature adjustment
- Patent number 6,100,506
- Issue date Aug 8, 2000
- International Business Machines Corporation
- James J. Colelli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recovery of an anodically bonded glass device from a substrate by u...
- Patent number 5,783,309
- Issue date Jul 21, 1998
- International Business Machines Corporation
- Thomas Benjamin Faure
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid immersion heating process for substrate temperature uniformity
- Patent number 5,716,763
- Issue date Feb 10, 1998
- International Business Machines Corporation
- Douglas Earl Benoit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High contrast photoresists comprising acid sensitive crosslinked po...
- Patent number 5,712,078
- Issue date Jan 27, 1998
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Recovery of an anodically bonded glass device from a susstrate by u...
- Patent number 5,538,151
- Issue date Jul 23, 1996
- International Business Machines Corp.
- Thomas B. Faure
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
AN EXTRA DOSE TRIM MASK, METHOD OF MANUFACTURE, AND LITHOGRAPHIC PR...
- Publication number 20060204859
- Publication date Sep 14, 2006
- International Business Machines Corporation
- Robert K. Leidy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETECTION OF PHOTOLITHOGRAPHIC DEFOCUS
- Publication number 20050033550
- Publication date Feb 10, 2005
- International Business Machines Corporation
- Dennis L. Macaluso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of photolithographic exposure dose control as a function of...
- Publication number 20040080738
- Publication date Apr 29, 2004
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Feedback method utilizing lithographic exposure field dimensions to...
- Publication number 20040015256
- Publication date Jan 22, 2004
- International Business Machines Corporation
- Edward W. Conrad
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of photolithographic exposure dose control as a function of...
- Publication number 20030156267
- Publication date Aug 21, 2003
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Feed-forward lithographic overlay offset method and system
- Publication number 20030115556
- Publication date Jun 19, 2003
- International Business Machines Corporation
- Edward W. Conrad
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CAPACITIVE ALIGNMENT STRUCTURE AND METHOD FOR CHIP STACKING
- Publication number 20020191835
- Publication date Dec 19, 2002
- Ning Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for controlling image size of integrated circuits on wafers...
- Publication number 20010001697
- Publication date May 24, 2001
- International Business Machines Corporation
- Charles A. Whiting
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Charles Arthur Whiting

Person

Patents Grantslast 30 patents

Method for detection of photolithographic defocus

Method of photolithographic exposure dose control as a function of...

Feedback method utilizing lithographic exposure field dimensions to...

Feed-forward lithographic overlay offset method and system

Method of photolithographic exposure dose control as a function of...

Method and arrangement for controlling image size of integrated cir...

Capacitive alignment structure and method for chip stacking

Method for controlling image size of integrated circuits on wafers...

Dual use alignment aid

Method and apparatus for adjusting a tilt of a lithography tool

Method for controlling image size of integrated circuits on wafers...

Hot plate with in situ surface temperature adjustment

Recovery of an anodically bonded glass device from a substrate by u...

Liquid immersion heating process for substrate temperature uniformity

High contrast photoresists comprising acid sensitive crosslinked po...

Recovery of an anodically bonded glass device from a susstrate by u...

Patents Applicationslast 30 patents

AN EXTRA DOSE TRIM MASK, METHOD OF MANUFACTURE, AND LITHOGRAPHIC PR...

METHOD FOR DETECTION OF PHOTOLITHOGRAPHIC DEFOCUS

Method of photolithographic exposure dose control as a function of...

Feedback method utilizing lithographic exposure field dimensions to...

Method of photolithographic exposure dose control as a function of...

Feed-forward lithographic overlay offset method and system

CAPACITIVE ALIGNMENT STRUCTURE AND METHOD FOR CHIP STACKING

Method for controlling image size of integrated circuits on wafers...