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Charles Steven Rhoades
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Los Gatos, CA, US
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last 30 patents
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Patent Grant
Dry cleaning of semiconductor processing chambers using non-metalli...
Patent number
5,753,137
Issue date
May 19, 1998
Applied Materials, Inc.
Yan Ye
B08 - CLEANING
Information
Patent Grant
Dry cleaning of semiconductor processing chambers
Patent number
5,685,916
Issue date
Nov 11, 1997
Applied Materials, Inc.
Yan Ye
B08 - CLEANING
Information
Patent Grant
Plasma dry cleaning of semiconductor processing chambers
Patent number
5,676,759
Issue date
Oct 14, 1997
Applied Materials, Inc.
Yan Ye
B08 - CLEANING
Information
Patent Grant
Passivating, stripping and corrosion inhibition of semiconductor su...
Patent number
5,545,289
Issue date
Aug 13, 1996
Applied Materials, Inc.
Jian Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Controlling plasma particulates by contouring the plasma sheath usi...
Patent number
5,494,523
Issue date
Feb 27, 1996
Applied Materials, Inc.
Robert J. Steger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma dry cleaning of semiconductor processing chambers
Patent number
5,486,235
Issue date
Jan 23, 1996
Applied Materials, Inc.
Yan Ye
B08 - CLEANING
Information
Patent Grant
Method for reducing particulate contamination during plasma process...
Patent number
5,423,918
Issue date
Jun 13, 1995
Applied Materials, Inc.
Anand Gupta
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching aluminum and its alloys using HC1, C1-containing etchant an...
Patent number
5,387,556
Issue date
Feb 7, 1995
Applied Materials, Inc.
Diana M. Xiaobing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma etching using xenon
Patent number
5,384,009
Issue date
Jan 24, 1995
Applied Materials, Inc.
Steven Mak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for removal of photoresist over metal which also removes or...
Patent number
5,221,424
Issue date
Jun 22, 1993
Applied Materials, Inc.
Charles S. Rhoades
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY