CHEN-HSIANG LU

Person

HSIN-CHU CITY, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Storage environment monitoring system and methods of operation
- Patent number 12,174,528
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Wei Lu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for operating conveying system
- Patent number 12,094,745
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yong-Jyu Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multilayer ALD coating for critical components in process chamber
- Patent number 12,049,697
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Buffer layer(s) on a stacked structure having a via
- Patent number 12,021,066
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating conveying system
- Patent number 11,854,849
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yong-Jyu Lin
- B66 - HOISTING LIFTING HAULING
Information Patent Grant
Semiconductor device and forming method thereof
- Patent number 11,855,171
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Miin-Jang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure of semiconductor device structure having fins
- Patent number 11,682,716
- Issue date Jun 20, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with ultra thick metal and manufacturing me...
- Patent number 11,670,584
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etcher edge ring with a chamfer geometry and impedance design
- Patent number 11,404,250
- Issue date Aug 2, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Yu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer layer(s) on a stacked structure having a via
- Patent number 11,270,978
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with ultra thick metal and manufacturing me...
- Patent number 11,114,378
- Issue date Sep 7, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and forming method thereof
- Patent number 11,101,362
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Miin-Jang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with tapered conductor
- Patent number 10,867,921
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of semiconductor device structure
- Patent number 10,686,060
- Issue date Jun 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure of semiconductor device structure having fins
- Patent number 10,686,059
- Issue date Jun 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure
- Patent number 10,665,456
- Issue date May 26, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shih-Pei Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method to reduce pre-back-grinding process defects
- Patent number 10,534,353
- Issue date Jan 14, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chen-Fa Lu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Buffer layer(s) on a stacked structure having a via
- Patent number 10,510,723
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of semiconductor device structure
- Patent number 10,326,005
- Issue date Jun 18, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure having tapered damascene aperture and metho...
- Patent number 10,304,774
- Issue date May 28, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor device structure
- Patent number 10,276,469
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Weibo Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure with ultra thick metal and manufacturing me...
- Patent number 10,269,701
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stress monitoring device and method of manufacturing the same
- Patent number 10,134,645
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,128,113
- Issue date Nov 13, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shih-Pei Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of semiconductor device with metal gate
- Patent number 10,014,394
- Issue date Jul 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and formation method of semiconductor device structure
- Patent number 9,899,271
- Issue date Feb 20, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure and method for forming the same
- Patent number 9,892,957
- Issue date Feb 13, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device structure and method for forming the same
- Patent number 9,842,765
- Issue date Dec 12, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Ting Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Formation method of semiconductor device structure
- Patent number 9,812,549
- Issue date Nov 7, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Buffer layer(s) on a stacked structure having a via
- Patent number 9,793,243
- Issue date Oct 17, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240384401
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240377727
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF
- Publication number 20240088255
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Miin-Jang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING CONVEYING SYSTEM
- Publication number 20240087934
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- YONG-JYU LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUORINE-CONTAINING ELASTOMER COMPOSITION AND METHOD FOR MAKING CUR...
- Publication number 20240067796
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHUNG-MING HUANG
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...
- Publication number 20240060173
- Publication date Feb 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan DUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240043992
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REMOVING A BY-PRODUCT FROM A COMPONENT OF A SEMICONDUCTOR...
- Publication number 20240014029
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- REN-GUAN DUAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC ARTICLE, SEMICONDUCTOR APPARATUS FOR MANUFACTURING A SEMICO...
- Publication number 20240010566
- Publication date Jan 11, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- REN-GUAN DUAN
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Structure of Semiconductor Device Structure Having Fins
- Publication number 20230275142
- Publication date Aug 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING CONVEYING SYSTEM
- Publication number 20220384230
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YONG-JYU LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN
- Publication number 20220375729
- Publication date Nov 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Yu WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20220308442
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EDGE FIN TRIM PROCESS
- Publication number 20220301937
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Chun Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Buffer Layer(s) on a Stacked Structure Having a Via
- Publication number 20220189928
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN
- Publication number 20220013337
- Publication date Jan 13, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chien-Yu WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING CONVEYING SYSTEM
- Publication number 20210391201
- Publication date Dec 16, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- YONG-JYU LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF
- Publication number 20210384315
- Publication date Dec 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Miin-Jang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH ULTRA THICK METAL AND MANUFACTURING ME...
- Publication number 20210366828
- Publication date Nov 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- CHEN-FA LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure of Semiconductor Device Structure Having Fins
- Publication number 20200312985
- Publication date Oct 1, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Che-Cheng CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Buffer Layer(s) on a Stacked Structure Having a Via
- Publication number 20200118977
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF
- Publication number 20200035807
- Publication date Jan 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Miin-Jang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Formation Method of Semiconductor Device Structure
- Publication number 20190305115
- Publication date Oct 3, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20190287914
- Publication date Sep 19, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI TING CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH ULTRA THICK METAL AND MANUFACTURING ME...
- Publication number 20190252317
- Publication date Aug 15, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- CHEN-FA LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE
- Publication number 20190080907
- Publication date Mar 14, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- Shih-Pei Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Formation Method of Semiconductor Device Structure
- Publication number 20180308956
- Publication date Oct 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRESS MINITORING DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180286769
- Publication date Oct 4, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- CHEN-FA LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Structure and Formation Method of Semiconductor Device Structure
- Publication number 20180174925
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Cheng Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Buffer Layer(s) on a Stacked Structure Having a Via
- Publication number 20180053748
- Publication date Feb 22, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Fa Lu
- H01 - BASIC ELECTRIC ELEMENTS

CHEN-HSIANG LU

Person

Patents Grantslast 30 patents

Storage environment monitoring system and methods of operation

Method for operating conveying system

Multilayer ALD coating for critical components in process chamber

Buffer layer(s) on a stacked structure having a via

Method for operating conveying system

Semiconductor device and forming method thereof

Structure of semiconductor device structure having fins

Semiconductor structure with ultra thick metal and manufacturing me...

Plasma etcher edge ring with a chamfer geometry and impedance design

Buffer layer(s) on a stacked structure having a via

Semiconductor structure with ultra thick metal and manufacturing me...

Semiconductor device and forming method thereof

Semiconductor structure with tapered conductor

Structure and formation method of semiconductor device structure

Structure of semiconductor device structure having fins

Semiconductor structure

System and method to reduce pre-back-grinding process defects

Buffer layer(s) on a stacked structure having a via

Structure and formation method of semiconductor device structure

Semiconductor structure having tapered damascene aperture and metho...

Method for forming semiconductor device structure

Semiconductor structure with ultra thick metal and manufacturing me...

Stress monitoring device and method of manufacturing the same

Semiconductor structure and manufacturing method thereof

Structure and formation method of semiconductor device with metal gate

Structure and formation method of semiconductor device structure

Semiconductor device structure and method for forming the same

Semiconductor device structure and method for forming the same

Formation method of semiconductor device structure

Buffer layer(s) on a stacked structure having a via

Patents Applicationslast 30 patents

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF

METHOD FOR OPERATING CONVEYING SYSTEM

FLUORINE-CONTAINING ELASTOMER COMPOSITION AND METHOD FOR MAKING CUR...

SYSTEM FOR PROCESSING SEMICONDUCTOR DEVICE, METHOD FOR FORMING SEMI...

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

METHOD OF REMOVING A BY-PRODUCT FROM A COMPONENT OF A SEMICONDUCTOR...

CERAMIC ARTICLE, SEMICONDUCTOR APPARATUS FOR MANUFACTURING A SEMICO...

Structure of Semiconductor Device Structure Having Fins

METHOD FOR OPERATING CONVEYING SYSTEM

PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

EDGE FIN TRIM PROCESS

Buffer Layer(s) on a Stacked Structure Having a Via

PLASMA ETCHER EDGE RING WITH A CHAMFER GEOMETRY AND IMPEDANCE DESIGN

METHOD FOR OPERATING CONVEYING SYSTEM

SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF

SEMICONDUCTOR STRUCTURE WITH ULTRA THICK METAL AND MANUFACTURING ME...

Structure of Semiconductor Device Structure Having Fins

Buffer Layer(s) on a Stacked Structure Having a Via

SEMICONDUCTOR DEVICE AND FORMING METHOD THEREOF

Structure and Formation Method of Semiconductor Device Structure

SEMICONDUCTOR STRUCTURE

SEMICONDUCTOR STRUCTURE WITH ULTRA THICK METAL AND MANUFACTURING ME...

SEMICONDUCTOR STRUCTURE

Structure and Formation Method of Semiconductor Device Structure

STRESS MINITORING DEVICE AND METHOD OF MANUFACTURING THE SAME

Structure and Formation Method of Semiconductor Device Structure

Buffer Layer(s) on a Stacked Structure Having a Via