Patent Grant
12094745
The semiconductor industry has experienced exponential growth, and integrated circuits (ICs) are used in a wide variety of applications. ICs are typically manufactured by automated or semi-automated equipment. Workpieces, such as substrates or wafers, are loaded into the equipment, and electrical components and circuitries are then fabricated over or within the workpieces through numerous manufacturing operations.
Automated Material Handling Systems (AMHS) have been widely used in semiconductor fabrication to automatically handle and transport groups of the workpieces between various processing instruments. There are numerous types of automated vehicles (including automated guided vehicles (AGV), rail-guided vehicles (RGV), overhead hoist transport (OHT), and the like) for moving and transporting carriers (such as front-opening unified pods (FOUPs)) carrying the workpieces during fabrication. For example, an OHT system includes automatically-moving OHT vehicles carrying workpieces from a load port of one processing instrument to a load port of another processing instrument.
There is a continuous need to modify the manufacturing operations and improve efficiency of transport of the workpieces between the processing instruments, such as reducing power consumption during transport of different types and quantities of the workpieces.
Aspects of the present disclosure are best understanding from the following detailed description when read with the accompanying figures. It should be noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of elements and arrangements are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “over,” “upper,” “on” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
As used herein, although the terms such as “first,” “second” and “third” describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another. The terms such as “first,” “second” and “third” when used herein do not imply a sequence or order unless clearly indicated by the context.
Notwithstanding that the numerical ranges and parameters setting forth the broad scope of the disclosure are approximations, the numerical values set forth in the specific examples are reported as precisely as possible. Any numerical value, however, inherently contains certain errors necessarily resulting from the standard deviation found in the respective testing measurements. Also, as used herein, the terms “substantially,” “approximately” and “about” generally mean within a value or range that can be contemplated by people having ordinary skill in the art. Alternatively, the terms “substantially,” “approximately” and “about” mean within an acceptable standard error of the mean when considered by one of ordinary skill in the art. People having ordinary skill in the art can understand that the acceptable standard error may vary according to different technologies. Other than in the operating/working examples, or unless otherwise expressly specified, all of the numerical ranges, amounts, values and percentages such as those for quantities of materials, durations of times, temperatures, operating conditions, ratios of amounts, and the likes thereof disclosed herein should be understood as modified in all instances by the terms “substantially,” “approximately” or “about.” Accordingly, unless indicated to the contrary, the numerical parameters set forth in the present disclosure and attached claims are approximations that can vary as desired. At the very least, each numerical parameter should at least be construed in light of the number of reported significant digits and by applying ordinary rounding techniques. Ranges can be expressed herein as from one endpoint to another endpoint or between two endpoints. All ranges disclosed herein are inclusive of the endpoints, unless specified otherwise.
A conveying system is utilized during semiconductor fabrication. The conveying system includes a conveying unit configured to travel along a rail and carry a workpiece or a semiconductor structure from one processing machine to another. The conveying unit is able to lift a carrier for carrying semiconductor structures or workpieces from a load port of a machine station and move the carrier along the rail to another machine station. The conveying unit provides a constant force to ensure all carriers with different weights can be lifted and held safely by the conveying unit during transportation. Normally, the carrier should be unlocked from the load port prior to being lifted by the conveying unit; however, when a carrier is abnormally locked to the load port, the force may still be applied to the abnormally-locked carrier by the conveying unit, which can result in damage to the semiconductor structures or the workpieces in the carrier, damage to the load port, and/or damage to the carrier.
The present disclosure therefore provides a method for operating a conveying system including an automatic calculating operation to adjust a minimum force to lift a carrier. The minimum force can be calculated based on information of a weight of the carrier, a number of workpieces or semiconductor substrates in the carrier, a weight of each of the workpieces or semiconductor substrates, and/or a vertical distance between an overhead hoist transport (OHT) vehicle and the carrier. Minimum forces required to lift different carriers after different stages of the semiconductor fabrication can be different, and the conveying system of the present disclosure is able to adjust lifting forces applied to different carriers. Therefore, damage to the semiconductor substrates, the workpieces, the carrier and the load port during the lifting process can be prevented.
The travelling member 12 is configured to moveably mount the OHT vehicle 10 to the rail 20. In some embodiments, the travelling member 12 can be a wheeled trolley, which is configured to complement and cooperate with the rail 20 for rolling movement along the rail 20 laterally or horizontally. In other words, the OHT vehicle 10 is suspended on the rail 20 through the travelling member 12. In some embodiments, the travelling member 12 is installed on the rail 20 and connected to the housing 11. In some embodiments, the housing 11 is mounted on the travelling member 12. The travelling member 12 may include a travelling motor 121 and one or more wheels 122. The OHT vehicle 10 travels laterally upon rotation of the wheel 122 of the travelling member 12. In some embodiments, the travelling motor 121 is configured to actuate the wheel 122 such that the wheel 122 can be rotated and the OHT vehicle 10 can travel laterally along the rail 20.
In some embodiments, the housing 11 of the OHT vehicle 10 can be a rigid frame surrounding several components, such as the hoisting member 13 and the gripping member 14. The first carrier C10 can be a FOUP, a standard mechanical interface (SMIF) pod, or the like. In some embodiments, the gripping member 14 is configured to grip the first carrier C10 for carrying the workpiece SB. In some embodiments, the workpiece SB can be a wafer, a semiconductor substrate, a semiconductor structure or a package. In some embodiments, the workpiece SB includes semiconductive materials such as silicon and/or other suitable materials. In some embodiments, the workpiece SB includes circuitries or electrical components disposed on a semiconductor substrate. In some embodiments, a lot or a group of workpieces SB are disposed inside the first carrier C10 to isolate the workpieces SB from the surrounding environment and prevent contamination.
In some embodiments, the gripping member 14 is configured to securely hold and release the first carrier C10 in order to transport the workpiece SB along the rail 20 from one location to another. In some embodiments, the gripping member 14 is connected to the housing 11 through the hoisting member 13. In some embodiments, the gripping member 14 can hold the first carrier C10 inside and outside the housing 11 using the hoisting member 13.
The hoisting member 13 is configured to lift and lower the first carrier C10 from and to a load port of a process machine station using the gripping member 14. In some embodiments, when the hoisting member 13 is in a retracted status, the hoisting member 13 is disposed in and surrounded by the housing 11. In some embodiments, when the hoisting member 13 is in an extended status, the hoisting member 13 is disposed out of the housing 11. The hoisting member 13 is extendable from and retractable toward the housing 11. In some embodiments, the hoisting member 13 connects the housing 11 to the gripping member 14. In some embodiments, the hoisting member 13 is extendable to move the gripping member 14 out of the housing 11 and retractable to move the gripping member 14 back to the housing 11. In some embodiments, the hoisting member 13 is telescopically extendable and retractable.
In some embodiments, the hoisting member 13 includes a hoisting motor 131, at least a wheel 132 and at least a belt 133. The hoisting motor 131 is configured to actuate the wheel 132 such that the wheel 132 can be rotated and the belt 133, which is connected to the wheel 132, can be vertically extended from or retracted toward the wheel 132. The hoisting member 13 can lower the gripping member 14 by extending the belt 133 from the housing 11. A top portion of the first carrier C10 can then be held by the gripping member 14 and lifted from a load port of a processing machine station by retracting the belt 133 toward the housing 11. In some embodiments, when the belt 133 is in a retracted status, the hoisting member 13, the gripping unit 14 and the carrier C10 are disposed inside the housing 11. In some embodiments, the hoisting member 13 is in the retracted status upon movement of the OHT vehicle 10 along the rail 20.
In order to automatically adjust a lifting force applied to the first carrier C10, the OHT vehicle 10 can further include a control unit 15 installed on the housing 11. The configuration shown in
In some embodiments, a torque is calculated by the control unit 15 based on the data or the information of the first carrier C10. The control unit 15 then sends a signal including the torque to the hoisting motor 131 of the hoisting member 13. After the gripping member 14 grips the first carrier C10, the hoisting motor 131 of the hoisting member 13 generates the torque, which is calculated by the control unit 15, to actuate rotation of the wheels 132 to retract the belt 133. The hoisting motor 131 generates the torque to drive the wheel 132 and retract the belt 133 and thus convert the torque to the lifting force. In other words, the torque is applied to an axis of the wheel 132 to turn the wheel 131, and the belt 133 converts the torque to the lifting force applied to the first carrier C10 through the gripping member 14, wherein the lifting force is an upward force for raising the first carrier C10.
Under normal circumstances, the first carrier C10 can be lifted by the lifting force. However, in an abnormal circumstance, such as when the first carrier C10 is abnormally locked to a load port, the first carrier C10 cannot be lifted by the lifting force determined by the control unit 15 due to a downward force on the first carrier C10 from the load port. In some embodiments, under the abnormal circumstance, the conveying system S10 will stop providing the lifting force to the first carrier C10. In some embodiments, the conveying system S10 can detect the abnormal circumstance and send a signal or an alert to notify the operator that an abnormal circumstance exists. In some embodiments, the OHT vehicle 10 further includes a sensor 17 to detect whether the first carrier C10 is lifted. The sensor can be installed on the housing 11 and electrically connected to the hoisting motor 131, but the disclosure is not limited thereto. In some embodiments, the sensor 17 is installed on the load port and electrically connected to the control unit 15 in order to notify the operator about the lifting of the first carrier C10.
In accordance with the above description, one aspect of the present disclosure also provides a method M10 for operating the conveying system S10. The method M10 includes a number of operations and the description and illustration are not deemed as a limitation as the sequence of the operations.
Another embodiment of the present disclosure provides a method M20 for operating the conveying system S10. The method M20 includes a number of operations and the description and illustration are not deemed as a limitation as the sequence of the operations.
In order to further illustrate the method M10 and the method M20 of the disclosure,
In accordance with some embodiments and the operations 0101 and 0102, the OHT vehicle 10 of the conveying system S10 as shown in
In the operation 0102, one or more signals (or data) including the information for determining the first lifting force F1 is transmitted to the receiver 16. In some embodiments, the signal (or the data) including information of the weight of the first carrier C10 and the number of workpieces SB in the first carrier C10 is transmitted from the first server SV1 to the receiver 16. In some embodiments, the signal (or the data) including information of the vertical distance between the OHT vehicle 10 and the first carrier C10 is transmitted from the second server SV2 to the receiver 16. The signal (or the data) may include more or less of the above-described information according to different applications or a different design, and is not limited herein. In some embodiments, at least one of the weight of the first carrier C10, the number of workpieces SB in the first carrier C10, and the vertical distance of the OHT vehicle 10 and the first carrier C10 is transmitted to the receiver 16.
In some embodiments, the travelling member 12 can be electrically connected to the one or more servers. As shown in
In some embodiments, the method M10 and the method M20 further include extending the hoisting member 13 toward the first carrier C10 after the operation 0103 or 0201 and prior to the operation 0104 or 0202. The hoisting motor 131 actuates rotation of the wheels 132 to release the belt 133 in order to lower the gripping member 14 toward the first carrier C10.
In the operation 0105 of the method M10, the first lifting force F1 is determined based on information of the weight of the first carrier C10, the number of workpieces SB in the first carrier C10, or the vertical distance between the OHT vehicle 10 and the first carrier C10. As illustrated above, the first lifting force F1 is determined by the control unit 15 based on the information transmitted from the servers SV1 and SV2. In some embodiments, in order to determine the first lifting force F1 from the information of the signal, a first torque T1 is calculated by the control unit 15 according to the weight of the first carrier C10, the number of workpieces SB in the first carrier C10, or the vertical distance between the OHT vehicle 10 and the first carrier C10. The control unit 15 transmits a signal or a command to generate the first torque T1 to the hoisting motor 131 of the hoisting member 13, and the hoisting motor 131 generates the first torque T1. The first torque T1 is converted to the first lifting force F1 by the belt 133 in order to lift the first carrier C10 and the gripping member 14. In some embodiments, the first lifting force F1 is first calculated and then the first torque T1 is determined by the control unit 15 based on the calculated first lifting force F1. In some embodiments, the first lifting force F1 is calculated based on at least one of the weight of the first carrier C10, the number of workpieces SB in the first carrier C10, and the vertical distance between the OHT vehicle 10 and the first carrier C10. In addition, energy consumption during conversion from the first torque T1 to the first lifting force F1 is also be considered and calculated by the control unit 15 in order to acquire the first torque T1. The first lifting force F1 is designed and calculated to be a minimum force required for lifting the first carrier C10 for a purpose of minimizing power consumption. The operation 0105 is performed prior to applying the first lifting force F1 to the first carrier C10 (i.e., the operation 0106 of the method M10), and a sequence of the operation 0105 relative to operations 0101, 0102, 0103 and 0104 is not limited herein. Similarly, the method M20 can further include: determining the first lifting force F1 based on the data including at least one of the weight of the first carrier C10, the number of workpieces SB in the first carrier C10, and the vertical distance between the OHT vehicle 10 and the first carrier C10 prior to the operation 0202.
When an abnormal event happens, the first carrier C10 may receive a first downward force F2 from the first load port LP1 as shown in
In some embodiments, the method M10 or the method M20 further includes detecting whether the first carrier C10 is lifted by the first lifting force F1 after the first lifting force F1 is applied. In some embodiments, the OHT vehicle 10 includes a sensor 17, and the sensor 17 can detect if the first carrier C10 is not approaching the housing 10, or if the vertical distance between the OHT vehicle 10 and the first carrier C10 does not decrease, after the first lifting force F1 is applied. In some embodiments, the sensor 17 can be installed on the first load port LP1 to detect if the first carrier C10 is lifted off the first load port LP1. In some embodiments, the sensor 17 can be installed adjacent to the first load port LP1 or the first carrier C10 to detect a vertical movement of the first carrier C10. Different types of the sensor 17 can be applied according to different requirements, and is not limited herein.
As shown in
In some embodiments, the method M10 or the method M20 can further include sending an alert if the first carrier C10 cannot be lifted with the first lifting force F1. An alert or a notification is sent to notify an operator that an abnormal circumstance exists or an error has occurred. A type of the alert or the notification is not limited herein. For instance, the alert or the notification can be a message appearing on a user interface or an alarm sounded in a factory, depending on different applications. In some embodiments, the method M10 or the method M20 can further include stopping application of the first lifting force F1 if the total downward force is greater than the first lifting force F1, for purposes of power saving and preventing damage to the workpieces SB, the first carrier C10, and/or the first load port LP1.
In some embodiments, the sensor 17 is electrically connected to the control unit 15 directly or indirectly (please refer to
In some embodiments, the OHT vehicle 10 stops moving or moves back to a default position after transporting the first carrier C10. In some embodiments, as illustrated in the flow chart of
In some embodiments, the method M20 further includes extending the hoisting member 13 toward a second carrier C20 after the operation 0203 and prior to the operation 0204. The hoisting motor 131 actuates rotation of the wheels 132 to release the belt 133 in order to lower the gripping member 14 toward the second carrier C20.
After the second lifting force F4 is applied as illustrated in the operation 0204, under normal circumstances, the second carrier C20 is lifted upward from the second load port LP2 with the second lifting force F4 as shown in
It should be noted that different types of carriers can have different weights. Carriers on different load ports of different machine stations can contain different numbers of workpieces SB and/or different weights of workpieces SB. Moreover, a vertical distance between the OHT vehicle 10 and different carriers on different load ports can also be different, and it might result in different torques required to lift the different carriers. Therefore, the second lifting force F4 is be different from the first lifting force F1 if one factor of the information used in the calculation is different from that of information for lifting the first carrier C10. In some embodiments, the weight of the first carrier C10 is different from the weight of the second carrier C20, and therefore the first lifting force F1 would be different from the second lifting force F4. In other embodiments, the vertical distance between the OHT vehicle 10 and the second carrier C20 is different from the vertical distance between the OHT vehicle 10 and the first carrier C10, and therefore the second torque T2 would be different from the first torque T1.
When an abnormal circumstance exists or an error occurs, the second carrier C20 may receive a second downward force F5 from the second load port LP2 as shown in FIG. 15, and the second carrier C20 may not be lifted with the second lifting force F4 applied by the hoisting member 13.
In some embodiments, the method M20 further includes a detection operation to detect if the second carrier C20 is lifted by the second lifting force F4 after the second lifting force F4 is applied, as illustrated in accordance with the operation 0204. The OHT vehicle 10 can include the sensor 17, or the sensor 17 can be installed on the second load port LP2 similar to the configuration described above. In some embodiments, the method M20 can further include lifting the second carrier C20 or sending a notification. The above-described sensor 17, detection operation, and types of notification can be also applied when an error occurs or an abnormal circumstance exists during the transportation of the second carrier C20, and repeated description is omitted herein.
In accordance with the above description, the present disclosure can prevent damage to the workpieces SB, the carriers C10 and C20, and the load ports LP1 and LP2 due to abnormal circumstances.
The present disclosure provides a method for operating a conveying system including an automatic calculation and adjustment of a minimum force required to be applied to a carrier to lift the carrier. The minimum force can be calculated and determined from information of a weight of the carrier, a number of workpieces in the carrier, a weight of each of the workpieces, and a vertical distance between an overhead hoist transport (OHT) vehicle and the carrier. Minimum forces required to lift different carriers after different stages of the semiconductor fabrication can be different, and the conveying system of the present disclosure is able to adjust lifting forces applied to different carriers. When an abnormal circumstance exists or an error occurs, an alert or a notification is sent to notify an operator of the situation. Therefore, damage to the semiconductor substrates, the workpieces, the carrier and the load port during the lifting process can be avoided.
Some embodiments of the disclosure provide a method for operating a conveying system. The method includes several operations. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.
Some embodiments of the disclosure provide a method for operating a conveying system. The method includes several operations. An overhead hoist transport (OHT) vehicle is positioned over a first load port, and a first lifting force is applied to a first carrier on the first load port. The OHT vehicle is positioned over a second load port, and a second lifting force is applied to a second carrier on the second load port, wherein the first lifting force is different from the second lifting force.
Some embodiments of the disclosure provide a method for operating a conveying system. The method includes several operations. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle, wherein the signal includes information of a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on the information, and the lifting force is applied to the carrier. A notification is sent if the carrier cannot be lifted with the lifting force.
The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.
This application is a divisional of Ser. No. 16/900,555, filed on Jun. 12, 2020, the disclosure of which is hereby incorporated by reference in its entirety.
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| Number | Date | Country |
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| 105263832 | Jan 2016 | CN |
| 105431933 | Mar 2016 | CN |
| 105575855 | Sep 2018 | CN |
| 2010215099 | Sep 2010 | JP |
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| First Office Action and search report of CN family patent Application No. 202110220685.0, mailed on Jul. 18, 2024. |
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| Number | Date | Country | |
|---|---|---|---|
| 20220384230 A1 | Dec 2022 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 16900555 | Jun 2020 | US |
| Child | 17818370 | US |
