Chenghung Paul Chang

Person

Easton, PA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-filament heater assembly
- Patent number D921431
- Issue date Jun 8, 2021
- Sandeep Krishnan
- D07 - Equipment for preparing or serving food or drink not elsewhere specified
Information Patent Grant
Self-centering wafer carrier system for chemical vapor deposition
- Patent number 10,438,795
- Issue date Oct 8, 2019
- Veeco Instruments, Inc.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Terminal for mechanical support of a heating element
- Patent number 10,136,472
- Issue date Nov 20, 2018
- Plansee SE
- Arno Plankensteiner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-centering wafer carrier for chemical vapor deposition
- Patent number D819580
- Issue date Jun 5, 2018
- Veeco Instruments, Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Self-centering wafer carrier for chemical vapor deposition
- Patent number D810705
- Issue date Feb 20, 2018
- Veeco Instruments Inc.
- Sandeep Krishnan
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Self-cleaning shutter for CVD reactor
- Patent number 9,388,493
- Issue date Jul 12, 2016
- Veeco Instruments Inc.
- Chenghung Paul Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer carrier having pockets
- Patent number D695241
- Issue date Dec 10, 2013
- Veeco Instruments Inc.
- Alexander I. Gurary
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Wafer carrier having pockets
- Patent number D690671
- Issue date Oct 1, 2013
- Veeco Instruments Inc.
- Alexander I. Gurary
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
Self-Centering Wafer Carrier System for Chemical Vapor Deposition
- Publication number 20190362963
- Publication date Nov 28, 2019
- VEECO INSTRUMENTS, INC.
- Sandeep Krishnan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Self-Centering Wafer Carrier System For Chemical Vapor Deposition
- Publication number 20160372321
- Publication date Dec 22, 2016
- VEECO INSTRUMENTS, INC.
- Sandeep Krishnan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-CLEANING SHUTTER FOR CVD REACTOR
- Publication number 20140190405
- Publication date Jul 10, 2014
- VEECO INSTRUMENTS INC.
- Chenghung Paul Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT
- Publication number 20140042147
- Publication date Feb 13, 2014
- VEECO INSTRUMENTS INC.
- ARNO PLANKENSTEINER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chenghung Paul Chang

Person

Patents Grantslast 30 patents

Multi-filament heater assembly

Self-centering wafer carrier system for chemical vapor deposition

Terminal for mechanical support of a heating element

Self-centering wafer carrier for chemical vapor deposition

Self-centering wafer carrier for chemical vapor deposition

Self-cleaning shutter for CVD reactor

Wafer carrier having pockets

Wafer carrier having pockets

Patents Applicationslast 30 patents

Self-Centering Wafer Carrier System for Chemical Vapor Deposition

Self-Centering Wafer Carrier System For Chemical Vapor Deposition

SELF-CLEANING SHUTTER FOR CVD REACTOR

TERMINAL FOR MECHANICAL SUPPORT OF A HEATING ELEMENT