Chi-Hua Tseng

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Jubei City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Electrode design for plasma processing chamber
- Patent number 8,367,965
- Issue date Feb 5, 2013
- Hermes-Epitek Corp.
- Benson Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus to collect side-view and/or plane-view imag...
- Patent number 7,705,301
- Issue date Apr 27, 2010
- Hermes Microvision, Inc.
- Chi-Hua Tseng
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
ELECTRODE DESIGN FOR PLASMA PROCESSING CHAMBER
- Publication number 20100051592
- Publication date Mar 4, 2010
- Benson CHAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF WAFER SURFACE POTENTIAL REGULATION
- Publication number 20080296496
- Publication date Dec 4, 2008
- Hermes Microvision, Inc. (TAIWAN)
- Yan ZHAO
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON BEAM APPARATUS TO COLLECT SIDE-VIEW AND/OR PLANE-VIEW IMAG...
- Publication number 20080006771
- Publication date Jan 10, 2008
- Hermes Microvision, Inc. (TAIWAN)
- Chi-Hua Tseng
- G01 - MEASURING TESTING