Chih-Hong Hwang

Person

New Taipei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Via structure with low resistivity and method for forming the same
- Patent number 11,837,663
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Chiang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Via structure with low resistivity and method for forming the same
- Patent number 11,081,585
- Issue date Aug 3, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Kuo-Chiang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Via structure with low resistivity and method for forming the same
- Patent number 10,693,004
- Issue date Jun 23, 2020
- Taiwan Semiconductor Manufactruing Co., Ltd.
- Kuo-Chiang Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with charge and direction control
- Patent number 9,865,429
- Issue date Jan 9, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam dimension control for ion implantation process and apparat...
- Patent number 9,805,913
- Issue date Oct 31, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for monitoring ion implantation
- Patent number 9,449,889
- Issue date Sep 20, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen-containing oxide film and method of forming the same
- Patent number 9,330,901
- Issue date May 3, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Chun Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam dimension control for ion implantation process and apparat...
- Patent number 9,070,534
- Issue date Jun 30, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of ion neutralization with multiple-zoned plasma...
- Patent number 9,053,907
- Issue date Jun 9, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Lin Chang
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Multi-factor advanced process control method and system for integra...
- Patent number 9,031,684
- Issue date May 12, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Nai-Han Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for monitoring ion implantation
- Patent number 9,006,676
- Issue date Apr 14, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation with charge and direction control
- Patent number 8,922,122
- Issue date Dec 30, 2014
- Taiwan Semiconductor Manufaturing Company, Ltd.
- Chih-Hong Hwang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Beam monitoring device, method, and system
- Patent number 8,766,207
- Issue date Jul 1, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of ion beam source for semiconductor ion implanta...
- Patent number 8,664,622
- Issue date Mar 4, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hong Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-ion beam implantation apparatus and method
- Patent number 8,592,785
- Issue date Nov 26, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Nai-Han Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for monitoring ion implantation
- Patent number 8,581,204
- Issue date Nov 12, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GATE STACK OF FORKSHEET STRUCTURE
- Publication number 20240222377
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Che-Chia HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE WITH TREATED GATE DIELECTRIC LAYER AND METH...
- Publication number 20240204073
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING VIA STRUCTURE WITH LOW RESISTIVITY
- Publication number 20240055522
- Publication date Feb 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Chiang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME
- Publication number 20210359127
- Publication date Nov 18, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuo-Chiang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME
- Publication number 20200321460
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Chiang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME
- Publication number 20200058785
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Chiang TSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...
- Publication number 20150270103
- Publication date Sep 24, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hong HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Monitoring Ion Implantation
- Publication number 20150221561
- Publication date Aug 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION Implantation with Charge and Direction Control
- Publication number 20150069913
- Publication date Mar 12, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Monitoring Device, Method, and System
- Publication number 20140306119
- Publication date Oct 16, 2014
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NITROGEN-CONTAINING OXIDE FILM AND METHOD OF FORMING THE SAME
- Publication number 20140246758
- Publication date Sep 4, 2014
- An-Chun Tu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...
- Publication number 20130295753
- Publication date Nov 7, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hong HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Monitoring Ion Implantation
- Publication number 20130280823
- Publication date Oct 24, 2013
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD OF ION BEAM SOURCE FOR SEMICONDUCTOR ION IMPLANTA...
- Publication number 20130270454
- Publication date Oct 17, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hong HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD OF ION NEUTRALIZATION WITH MULTIPLE-ZONED PLASMA...
- Publication number 20130264498
- Publication date Oct 10, 2013
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Lin CHANG
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ION IMPLANTATION WITH CHARGE AND DIRECTION CONTROL
- Publication number 20130140987
- Publication date Jun 6, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-FACTOR ADVANCED PROCESS CONTROL METHOD AND SYSTEM FOR INTEGRA...
- Publication number 20130110276
- Publication date May 2, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Nai-Han Cheng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-ION BEAM IMPLANTATION APPARATUS AND METHOD
- Publication number 20130075623
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Nai-Han CHENG
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Beam Monitoring Device, Method, And System
- Publication number 20130075624
- Publication date Mar 28, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for Monitoring Ion Implantation
- Publication number 20130068960
- Publication date Mar 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Lin Chang
- H01 - BASIC ELECTRIC ELEMENTS

Chih-Hong Hwang

Person

Patents Grantslast 30 patents

Via structure with low resistivity and method for forming the same

Via structure with low resistivity and method for forming the same

Via structure with low resistivity and method for forming the same

Ion implantation with charge and direction control

Ion beam dimension control for ion implantation process and apparat...

Method for monitoring ion implantation

Nitrogen-containing oxide film and method of forming the same

Ion beam dimension control for ion implantation process and apparat...

System and method of ion neutralization with multiple-zoned plasma...

Multi-factor advanced process control method and system for integra...

Apparatus for monitoring ion implantation

Ion implantation with charge and direction control

Beam monitoring device, method, and system

System and method of ion beam source for semiconductor ion implanta...

Multi-ion beam implantation apparatus and method

Apparatus for monitoring ion implantation

Patents Applicationslast 30 patents

GATE STACK OF FORKSHEET STRUCTURE

SEMICONDUCTOR STRUCTURE WITH TREATED GATE DIELECTRIC LAYER AND METH...

METHOD FOR FORMING VIA STRUCTURE WITH LOW RESISTIVITY

VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME

VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME

VIA STRUCTURE WITH LOW RESISTIVITY AND METHOD FOR FORMING THE SAME

ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...

Method for Monitoring Ion Implantation

ION Implantation with Charge and Direction Control

Beam Monitoring Device, Method, and System

NITROGEN-CONTAINING OXIDE FILM AND METHOD OF FORMING THE SAME

ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...

Apparatus for Monitoring Ion Implantation

SYSTEM AND METHOD OF ION BEAM SOURCE FOR SEMICONDUCTOR ION IMPLANTA...

SYSTEM AND METHOD OF ION NEUTRALIZATION WITH MULTIPLE-ZONED PLASMA...

ION IMPLANTATION WITH CHARGE AND DIRECTION CONTROL

MULTI-FACTOR ADVANCED PROCESS CONTROL METHOD AND SYSTEM FOR INTEGRA...

MULTI-ION BEAM IMPLANTATION APPARATUS AND METHOD

Beam Monitoring Device, Method, And System

Apparatus for Monitoring Ion Implantation