Chih Wei Wen

Person

Taipei, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 12,153,341
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask cleaning tool
- Patent number 12,085,848
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Pin Cheng Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask inspection method and apparatus thereof
- Patent number 12,072,621
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Wei Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for fabricating a semiconductor device and method for fab...
- Patent number 12,009,238
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing particles from pellicle and photomask
- Patent number 11,822,231
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 11,809,076
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- B08 - CLEANING
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 11,703,754
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of accelerated hazing of mask assembly
- Patent number 11,703,752
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wu-Hung Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask inspection method and apparatus thereof
- Patent number 11,614,684
- Issue date Mar 28, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chih-Wei Wen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 11,347,143
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- B08 - CLEANING
Information Patent Grant
Photomask, method of fabricating a photomask, and method of fabrica...
- Patent number 11,340,524
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for mounting a pellicle to a photomask and method for mou...
- Patent number 11,294,275
- Issue date Apr 5, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for generating extreme ultraviolet radiation and an extreme...
- Patent number 11,239,001
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Apparatus for fabricating a semiconductor device and method for fab...
- Patent number 11,088,003
- Issue date Aug 10, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask assembly and haze acceleration method
- Patent number 10,983,430
- Issue date Apr 20, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wu-Hung Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for mounting a pellicle to a photomask and method for mou...
- Patent number 10,775,694
- Issue date Sep 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical image capturing module, alignment method, and observation m...
- Patent number 9,874,807
- Issue date Jan 23, 2018
- Metal Industries Research & Development Centre
- Shi-Wei Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration plate for calibrating a plurality of image capturing de...
- Patent number 9,749,621
- Issue date Aug 29, 2017
- Metal Industries Research & Development Centre
- Shi-Wei Lin
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Optical image capturing module, aligning method, and observing method
- Patent number 9,459,460
- Issue date Oct 4, 2016
- Metal Industries Research & Development Centre
- Shi-Wei Lin
- G02 - OPTICS
Information Patent Grant
Method for aligning substrates in different spaces and having diffe...
- Patent number 9,362,153
- Issue date Jun 7, 2016
- Metal Industries Research & Development Centre
- Chorng-Tyan Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Endpoint detection for photolithography mask repair
- Patent number 9,312,101
- Issue date Apr 12, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Lin Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Display module
- Patent number 9,271,407
- Issue date Feb 23, 2016
- AU OPTRONICS CORPORATION
- Jia-Lang Hsu
- F21 - LIGHTING
Information Patent Grant
Endpoint detection for photolithography mask repair
- Patent number 9,040,212
- Issue date May 26, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Lin Chen
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Lithography mask repairing process
- Patent number 8,999,610
- Issue date Apr 7, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsing Lu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Alignment method for assembling substrates in different spaces with...
- Patent number 8,854,450
- Issue date Oct 7, 2014
- Metal Industries Research & Development Centre
- Chorng-tyan Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for repairing photomask
- Patent number 8,703,364
- Issue date Apr 22, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kun-Lung Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Display module
- Patent number 8,693,180
- Issue date Apr 8, 2014
- AU OPTRONICS CORPORATION
- Jia-Lang Hsu
- F21 - LIGHTING
Information Patent Grant
Alignment method for assembling substrates without fiducial mark
- Patent number 8,644,591
- Issue date Feb 4, 2014
- Metal Industries Research & Development Centre
- Chorng-tyan Lin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for chemical mechanical polishing including fi...
- Patent number 7,799,689
- Issue date Sep 21, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Min Wen
- B24 - GRINDING POLISHING
Information Patent Grant
Method for repair of photomasks
- Patent number 7,097,948
- Issue date Aug 29, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wu Hung Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE WITH THERMAL STABILIZATION
- Publication number 20240422888
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsing Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE WITH DEEP TRENCH ISOLATION AND SHALLOW TRENCH...
- Publication number 20240420991
- Publication date Dec 19, 2024
- UNITED MICROELECTRONICS CORP.
- Jing-Wen Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE
- Publication number 20240393679
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kun-Lung Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK CLEANING TOOL
- Publication number 20240393680
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Pin Cheng CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20240385512
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
PELLICLE, PELLICLE REMOVAL TOOL, AND METHOD OF UTILIZING PELLICLE A...
- Publication number 20240385544
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- H.J. CHANG
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD AND APPARATUS TO ENHANCE SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20240387601
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yao-Ren KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS FOR CLEANING SURFACE OF PHOTOMASK
- Publication number 20240385543
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Hsien Ko
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS FOR THREE DIMENSIONAL RETICLE DEFECT SMART RE...
- Publication number 20240379464
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Chien HUANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...
- Publication number 20240369939
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-HSING LU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...
- Publication number 20240369936
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- HSIN-FU TSENG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20240361684
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
- Publication number 20240297057
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIEN HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REMOVING PARTICLES FROM PELLICLE AND PHOTOMASK
- Publication number 20240036463
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM
- Publication number 20240003827
- Publication date Jan 4, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Chien-Lin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV SOURCE STABILIZATION APPARATUS AND METHOD
- Publication number 20240004318
- Publication date Jan 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tzu Jeng HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20230367206
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE
- Publication number 20230333465
- Publication date Oct 19, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Kun-Lung Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20230213853
- Publication date Jul 6, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE PREVENTION METHOD IN RETICLE POD
- Publication number 20220382143
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING APPARATUS FOR CLEANING SURFACE OF PHOTOMASK
- Publication number 20220357678
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Hsien Ko
- B08 - CLEANING
Information Patent Application
METHOD FOR REMOVING PARTICLES FROM PELLICLE AND PHOTOMASK
- Publication number 20220317562
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20220291580
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS FOR THREE DIMENSIONAL RETICLE DEFECT SMART RE...
- Publication number 20220285226
- Publication date Sep 8, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Chien HUANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTOMASK, METHOD OF FABRICATING A PHOTOMASK, AND METHOD OF FABRICA...
- Publication number 20220276552
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20220075262
- Publication date Mar 10, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIH-WEI WEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOMASK CLEANING TOOL
- Publication number 20220035244
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Cheng Pin CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE PREVENTION METHOD IN RETICLE POD
- Publication number 20210356857
- Publication date Nov 18, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU HAN LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
- Publication number 20210327735
- Publication date Oct 21, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIEN HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ACCELERATED HAZING OF MASK ASSEMBLY
- Publication number 20210216007
- Publication date Jul 15, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wu-Hung KO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Chih Wei Wen

Person

Patents Grantslast 30 patents

Cleaning method, method for forming semiconductor structure and sys...

Photomask cleaning tool

Photomask inspection method and apparatus thereof

Apparatus for fabricating a semiconductor device and method for fab...

Method for removing particles from pellicle and photomask

Cleaning method, method for forming semiconductor structure and sys...

Particle prevention method in reticle pod

Method of accelerated hazing of mask assembly

Photomask inspection method and apparatus thereof

Cleaning method, method for forming semiconductor structure and sys...

Photomask, method of fabricating a photomask, and method of fabrica...

Apparatus for mounting a pellicle to a photomask and method for mou...

Method for generating extreme ultraviolet radiation and an extreme...

Apparatus for fabricating a semiconductor device and method for fab...

Mask assembly and haze acceleration method

Apparatus for mounting a pellicle to a photomask and method for mou...

Optical image capturing module, alignment method, and observation m...

Calibration plate for calibrating a plurality of image capturing de...

Optical image capturing module, aligning method, and observing method

Method for aligning substrates in different spaces and having diffe...

Endpoint detection for photolithography mask repair

Display module

Endpoint detection for photolithography mask repair

Lithography mask repairing process

Alignment method for assembling substrates in different spaces with...

Method for repairing photomask

Display module

Alignment method for assembling substrates without fiducial mark

Method and apparatus for chemical mechanical polishing including fi...

Method for repair of photomasks

Patents Applicationslast 30 patents

EXTREME ULTRAVIOLET LIGHT SOURCE WITH THERMAL STABILIZATION

SEMICONDUCTOR DEVICE WITH DEEP TRENCH ISOLATION AND SHALLOW TRENCH...

DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE

PHOTOMASK CLEANING TOOL

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

PELLICLE, PELLICLE REMOVAL TOOL, AND METHOD OF UTILIZING PELLICLE A...

METHOD AND APPARATUS TO ENHANCE SEMICONDUCTOR DEVICE MANUFACTURING

CLEANING APPARATUS FOR CLEANING SURFACE OF PHOTOMASK

APPARATUS AND METHODS FOR THREE DIMENSIONAL RETICLE DEFECT SMART RE...

EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...

EXTREME ULTRAVIOLET (EUV) RADIATION SOURCE APPARATUS, EUV LITHOGRAP...

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...

METHOD FOR REMOVING PARTICLES FROM PELLICLE AND PHOTOMASK

SYSTEMS AND METHODS FOR ACTINIC MASK INSPECTION AND REVIEW IN VACUUM

EUV SOURCE STABILIZATION APPARATUS AND METHOD

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

DEVICE AND METHOD FOR CLEANING PELLICLE FRAME AND MEMBRANE

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

PARTICLE PREVENTION METHOD IN RETICLE POD

CLEANING APPARATUS FOR CLEANING SURFACE OF PHOTOMASK

METHOD FOR REMOVING PARTICLES FROM PELLICLE AND PHOTOMASK

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

APPARATUS AND METHODS FOR THREE DIMENSIONAL RETICLE DEFECT SMART RE...

PHOTOMASK, METHOD OF FABRICATING A PHOTOMASK, AND METHOD OF FABRICA...

PHOTOMASK INSPECTION METHOD AND APPARATUS THEREOF

PHOTOMASK CLEANING TOOL

PARTICLE PREVENTION METHOD IN RETICLE POD

APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...

METHOD OF ACCELERATED HAZING OF MASK ASSEMBLY