Chikara Nobukuni

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and operation method of substrate pr...
- Patent number 11,043,399
- Issue date Jun 22, 2021
- Tokyo Electron Limited
- Tomiyasu Maezono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,591,935
- Issue date Mar 17, 2020
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate liquid processing apparatus and substrate liquid processi...
- Patent number 10,162,371
- Issue date Dec 25, 2018
- Tokyo Electron Limited
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND OPERATION METHOD OF SUBSTRATE PR...
- Publication number 20200211867
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Tomiyasu Maezono
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20190079544
- Publication date Mar 14, 2019
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS AND SUBSTRATE LIQUID PROCESSI...
- Publication number 20150131403
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Yasuhiro Takaki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL