Chiliang L. Chen

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Remote plasma cleaning source having reduced reactivity with a subs...
- Patent number 8,075,789
- Issue date Dec 13, 2011
- Applied Materials, Inc.
- Karl A. Littau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing nitrogen concentration with in-situ steam generation
- Patent number 7,387,972
- Issue date Jun 17, 2008
- ProMOS Technologies Pte. Ltd.
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronically actuated valve
- Patent number 7,222,636
- Issue date May 29, 2007
- Applied Materials, Inc.
- Anh N. Nguyen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
High temperature resistive heater for a process chamber
- Patent number 6,066,836
- Issue date May 23, 2000
- Applied Materials, Inc.
- Steven Aihua Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STRONTIUM OXIDE INTERLAYERS FOR IMPROVED ELECTRICAL DEVICE PERFORMANCE
- Publication number 20240395459
- Publication date Nov 28, 2024
- Ruben Waldman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONVOLATILE MEMORIES WHICH COMBINE A DIELECTRIC, CHARGE-TRAPPING LA...
- Publication number 20090096009
- Publication date Apr 16, 2009
- ProMOS Technologies Pte. Ltd.
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO FORM UNIFORM TUNNEL OXIDE FOR FLASH DEVICES AND THE RESUL...
- Publication number 20090039413
- Publication date Feb 12, 2009
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONVOLATILE MEMORIES WITH CHARGE TRAPPING LAYERS CONTAINING SILICON...
- Publication number 20090032861
- Publication date Feb 5, 2009
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON-RICH LOW-HYDROGEN CONTENT SILICON NITRIDE FILM
- Publication number 20080286984
- Publication date Nov 20, 2008
- Jason B. Taylor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO FORM UNIFORM TUNNEL OXIDE FOR FLASH DEVICES AND THE RESUL...
- Publication number 20080135917
- Publication date Jun 12, 2008
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION
- Publication number 20080132086
- Publication date Jun 5, 2008
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for providing STI structures with high coupling ratio in int...
- Publication number 20070262476
- Publication date Nov 15, 2007
- ProMOS Technologies Pte. Ltd.
- Yi Ding
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION
- Publication number 20070205446
- Publication date Sep 6, 2007
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reducing nitrogen concentration with in-situ steam generation
- Publication number 20070207627
- Publication date Sep 6, 2007
- ProMOS Technologies Pte. Ltd.
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FABRICATION OF NITROGEN CONTAINING REGIONS ON SILICON CONTAINING RE...
- Publication number 20070138579
- Publication date Jun 21, 2007
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fabrication of nitrogen containing regions on silicon containing re...
- Publication number 20070090493
- Publication date Apr 26, 2007
- ProMos Technologies Inc.
- Zhong Dong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pulse nucleation enhanced nucleation technique for improved step co...
- Publication number 20070009658
- Publication date Jan 11, 2007
- Jong Hyun Yoo
- C30 - CRYSTAL GROWTH
Information Patent Application
Electronically actuated valve
- Publication number 20050229969
- Publication date Oct 20, 2005
- Anh N. Nguyen
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Substrate processing chamber
- Publication number 20030000647
- Publication date Jan 2, 2003
- APPLIED MATERIALS, INC.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition of tungsten silicide films
- Publication number 20020168840
- Publication date Nov 14, 2002
- APPLIED MATERIALS, INC.
- Soonil Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Chiliang L. Chen

Person

Patents Grantslast 30 patents

Remote plasma cleaning source having reduced reactivity with a subs...

Reducing nitrogen concentration with in-situ steam generation

Electronically actuated valve

High temperature resistive heater for a process chamber

Patents Applicationslast 30 patents

STRONTIUM OXIDE INTERLAYERS FOR IMPROVED ELECTRICAL DEVICE PERFORMANCE

NONVOLATILE MEMORIES WHICH COMBINE A DIELECTRIC, CHARGE-TRAPPING LA...

METHOD TO FORM UNIFORM TUNNEL OXIDE FOR FLASH DEVICES AND THE RESUL...

NONVOLATILE MEMORIES WITH CHARGE TRAPPING LAYERS CONTAINING SILICON...

SILICON-RICH LOW-HYDROGEN CONTENT SILICON NITRIDE FILM

METHOD TO FORM UNIFORM TUNNEL OXIDE FOR FLASH DEVICES AND THE RESUL...

REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION

Method for providing STI structures with high coupling ratio in int...

REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION

Reducing nitrogen concentration with in-situ steam generation

FABRICATION OF NITROGEN CONTAINING REGIONS ON SILICON CONTAINING RE...

Fabrication of nitrogen containing regions on silicon containing re...

Pulse nucleation enhanced nucleation technique for improved step co...

Electronically actuated valve

Substrate processing chamber

Deposition of tungsten silicide films