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Ching-Hwa Chen
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Milpitas, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor devices with gate electrodes and with monocrystalline...
Patent number
8,283,733
Issue date
Oct 9, 2012
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming ONO-type sidewall with reduced bird's beak
Patent number
7,910,429
Issue date
Mar 22, 2011
Promos Technologies, Inc.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of repairing deep subsurface defects in a silicon substrate...
Patent number
7,851,339
Issue date
Dec 14, 2010
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication of integrated circuits with isolation trenches
Patent number
7,807,577
Issue date
Oct 5, 2010
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reducing nitrogen concentration with in-situ steam generation
Patent number
7,387,972
Issue date
Jun 17, 2008
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for simultaneously fabricating ONO-type memory cell, and gat...
Patent number
7,297,597
Issue date
Nov 20, 2007
Promos Technologies, Inc.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer deposition of interpoly oxides in a non-volatile memor...
Patent number
7,122,415
Issue date
Oct 17, 2006
Promos Technologies, Inc.
Chuck Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Floating gate nitridation
Patent number
7,001,810
Issue date
Feb 21, 2006
ProMOS Technologies Inc.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nonvolatile memory with pedestals
Patent number
6,787,415
Issue date
Sep 7, 2004
Mosel Vitelic, Inc.
Mei-Hua Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clean chemistry low-k organic polymer etch
Patent number
6,337,277
Issue date
Jan 8, 2002
Lam Research Corporation
Wen-Ben Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal and metal silicide nitridization in a high density, low press...
Patent number
6,221,792
Issue date
Apr 24, 2001
Lam Research Corporation
Yun-Yen Jack Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas dispersion window for plasma apparatus and method of use thereof
Patent number
5,824,605
Issue date
Oct 20, 1998
Lam Research Corporation
Ching-Hwa Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamic feedback electrostatic wafer chuck
Patent number
5,812,361
Issue date
Sep 22, 1998
Lam Research Corporation
Phillip Lawrence Jones
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of treating an article with a plasma apparatus in which a un...
Patent number
5,368,710
Issue date
Nov 29, 1994
Lam Research Corporation
Ching-Hwa Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma cleaning method for removing residues in a plasma treatment...
Patent number
5,356,478
Issue date
Oct 18, 1994
Lam Research Corporation
Ching-Hwa Chen
B08 - CLEANING
Information
Patent Grant
Window for microwave plasma processing device
Patent number
5,234,526
Issue date
Aug 10, 1993
Lam Research Corporation
Ching-Hwa Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma apparatus including dielectric window for inducing a uniform...
Patent number
5,226,967
Issue date
Jul 13, 1993
Lam Research Corporation
Ching-Hwa Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of producing flat ECR layer in microwave plasma device and a...
Patent number
5,198,725
Issue date
Mar 30, 1993
Lam Research Corporation
Ching-Hwa Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of Improving Minority Lifetime in Silicon Channel and Produc...
Publication number
20110095344
Publication date
Apr 28, 2011
Zhong DONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTOLITHOGRAPHIC PATTERNING OF ARRAYS OF PILLARS HAVING WIDTHS AND...
Publication number
20100068658
Publication date
Mar 18, 2010
ProMOST Technologies Pte.Ltd.
Fenghong Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
USE OF DIFFERENT PAIRS OF OVERLAY LAYERS TO CHECK AN OVERLAY MEASUR...
Publication number
20100063764
Publication date
Mar 11, 2010
Limin Lou
G05 - CONTROLLING REGULATING
Information
Patent Application
FABRICATION OF INTEGRATED CIRCUITS WITH ISOLATION TRENCHES
Publication number
20100047994
Publication date
Feb 25, 2010
Zhong DONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Improving Minority Lifetime in Silicon Channel and Produc...
Publication number
20090294806
Publication date
Dec 3, 2009
Zhong DONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NONVOLATILE MEMORIES WHICH COMBINE A DIELECTRIC, CHARGE-TRAPPING LA...
Publication number
20090096009
Publication date
Apr 16, 2009
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NONVOLATILE MEMORIES WITH CHARGE TRAPPING LAYERS CONTAINING SILICON...
Publication number
20090032861
Publication date
Feb 5, 2009
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION
Publication number
20080132086
Publication date
Jun 5, 2008
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REDUCING NITROGEN CONCENTRATION WITH IN-SITU STEAM GENERATION
Publication number
20070205446
Publication date
Sep 6, 2007
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Reducing nitrogen concentration with in-situ steam generation
Publication number
20070207627
Publication date
Sep 6, 2007
ProMOS Technologies Pte. Ltd.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for simultaneously fabricating ONO-type memory cell, and gat...
Publication number
20060017092
Publication date
Jan 26, 2006
ProMos Technologies Inc.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic layer deposition of interpoly oxides in a non-volatile memor...
Publication number
20060008997
Publication date
Jan 12, 2006
Chuck Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming ONO-type sidewall with reduced bird's beak
Publication number
20050227437
Publication date
Oct 13, 2005
ProMos Technologies Inc.
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NONVOLATILE MEMORY WITH PEDESTALS
Publication number
20040191986
Publication date
Sep 30, 2004
Mei-Hua Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Floating gate nitridation
Publication number
20040185647
Publication date
Sep 23, 2004
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Atomic layer deposition of interpoly oxides in a non-volatile memor...
Publication number
20040051134
Publication date
Mar 18, 2004
Chuch Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Floating gate nitridation
Publication number
20030153150
Publication date
Aug 14, 2003
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Floating gate nitridation
Publication number
20030153149
Publication date
Aug 14, 2003
Zhong Dong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metal and metal silicide nitridization in a high density, low press...
Publication number
20010002326
Publication date
May 31, 2001
Yun-Yen Jack Yang
H01 - BASIC ELECTRIC ELEMENTS