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Foster City, CA, US
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last 30 patents
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Patent Grant
Methods of removing a material layer from a substrate using water v...
Patent number
9,653,327
Issue date
May 16, 2017
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for substrate clamping in a plasma chamber
Patent number
9,337,072
Issue date
May 10, 2016
Applied Materials, Inc.
Ganesh Balasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
Patent number
8,993,454
Issue date
Mar 31, 2015
Applied Materials, Inc.
Martin Jay Seamons
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultra high selectivity doped amorphous carbon strippable hardmask d...
Patent number
8,536,065
Issue date
Sep 17, 2013
Applied Materials, Inc.
Martin Jay Seamons
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Planarizing etch hardmask to increase pattern density and aspect ratio
Patent number
8,513,129
Issue date
Aug 20, 2013
Applied Materials, Inc.
Martin Jay Seamons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra high selectivity ashable hard mask film
Patent number
8,361,906
Issue date
Jan 29, 2013
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
Patent number
8,282,734
Issue date
Oct 9, 2012
Applied Materials, Inc.
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Systems for plasma enhanced chemical vapor deposition and bevel edg...
Patent number
8,197,636
Issue date
Jun 12, 2012
Applied Materials, Inc.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for centering a substrate in a process chamber
Patent number
7,922,440
Issue date
Apr 12, 2011
Applied Materials, Inc.
Dale R. Du Bois
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for depositing an amorphous carbon film with improved densit...
Patent number
7,867,578
Issue date
Jan 11, 2011
Applied Materials, Inc.
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods to improve the in-film defectivity of PECVD amorphous carbo...
Patent number
7,514,125
Issue date
Apr 7, 2009
Applied Materials, Inc.
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for chemical mechanical planarization
Patent number
7,048,607
Issue date
May 23, 2006
Applied Materials
Li Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Tungsten CMP with improved alignment mark integrity, reduced edge r...
Patent number
6,468,136
Issue date
Oct 22, 2002
Applied Materials, Inc.
Robert T. Lum
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...
Publication number
20140017897
Publication date
Jan 16, 2014
Applied Materials, Inc.
Martin Jay SEAMONS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPENSATING CONCENTRATION UNCERTAINITY
Publication number
20130284090
Publication date
Oct 31, 2013
Ganesh BALASUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF REMOVING A MATERIAL LAYER FROM A SUBSTRATE USING WATER V...
Publication number
20120285481
Publication date
Nov 15, 2012
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDG...
Publication number
20120211164
Publication date
Aug 23, 2012
Applied Materials, Inc.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...
Publication number
20120204795
Publication date
Aug 16, 2012
Applied Materials, Inc.
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
Publication number
20120208373
Publication date
Aug 16, 2012
Applied Materials, Inc.
DEENESH PADHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ULTRA HIGH SELECTIVITY DOPED AMORPHOUS CARBON STRIPPABLE HARDMASK D...
Publication number
20120080779
Publication date
Apr 5, 2012
Applied Materials, Inc.
Martin Jay SEAMONS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLANARIZING ETCH HARDMASK TO INCREASE PATTERN DENSITY AND ASPECT RATIO
Publication number
20110291243
Publication date
Dec 1, 2011
Applied Materials, Inc.
Martin Jay Seamons
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA HIGH SELECTIVITY ASHABLE HARD MASK FILM
Publication number
20110287633
Publication date
Nov 24, 2011
Applied Materials, Inc.
Kwangduk Douglas Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
Publication number
20110159211
Publication date
Jun 30, 2011
Applied Materials, Inc.
Dale R. Du Bois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
Publication number
20110104400
Publication date
May 5, 2011
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
Publication number
20110090613
Publication date
Apr 21, 2011
Ganesh Balasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...
Publication number
20090044753
Publication date
Feb 19, 2009
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE EDGE REGION
Publication number
20090017635
Publication date
Jan 15, 2009
APPLIED MATERIALS, INC.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CENTERING A SUBSTRATE IN A PROCESS CHAMBER
Publication number
20090017228
Publication date
Jan 15, 2009
Dale R. Du Bois
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION AND BEVEL EDG...
Publication number
20090014127
Publication date
Jan 15, 2009
APPLIED MATERIALS, INC.
Ashish Shah
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITING AN AMORPHOUS CARBON FILM WITH IMPROVED DENSIT...
Publication number
20080153311
Publication date
Jun 26, 2008
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR SUBSTRATE CLAMPING IN A PLASMA CHAMBER
Publication number
20080084650
Publication date
Apr 10, 2008
APPLIED MATERIALS, INC.
Ganesh Balasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method For Depositing an Amorphous Carbon Film with Improved Densit...
Publication number
20080003824
Publication date
Jan 3, 2008
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS TO IMPROVE THE IN-FILM DEFECTIVITY OF PECVD AMORPHOUS CARBO...
Publication number
20070295272
Publication date
Dec 27, 2007
Deenesh Padhi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SILICON NITRIDE COMPOSITE HDP/CVD PROCESS
Publication number
20020000664
Publication date
Jan 3, 2002
LIE-YEA CHENG
H01 - BASIC ELECTRIC ELEMENTS