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Chiu Chi
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Methods of forming moisture barrier for low K film integration with...
Patent number
8,003,549
Issue date
Aug 23, 2011
Novellus Systems, Inc.
Ming Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming moisture barrier for low k film integration with...
Patent number
7,642,202
Issue date
Jan 5, 2010
Novellus Systems, Inc.
Ming Li
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for patterning multilevel interconnects
Patent number
6,875,699
Issue date
Apr 5, 2005
Lam Research Corporation
Stephan Lassig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming an FeRAM capacitor having a bottom electrode diff...
Patent number
6,773,930
Issue date
Aug 10, 2004
Texas Instruments Incorporated
Scott R. Summerfelt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detection of AIOx ears for process control in FeRAM processing
Patent number
6,767,750
Issue date
Jul 27, 2004
Texas Instruments Incorporated
Scott R. Summerfelt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FeRAM sidewall diffusion barrier etch
Patent number
6,713,342
Issue date
Mar 30, 2004
Texas Instruments Incorporated
Francis G. Celii
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Plasma etching of Ir and PZT using a hard mask and C12/N2/O2 and C1...
Publication number
20030176073
Publication date
Sep 18, 2003
Chentsau Ying
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of forming an FeRAM capacitor having a bottom electrode diff...
Publication number
20030129771
Publication date
Jul 10, 2003
Scott R. Summerfelt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FeRAM sidewall diffusion barrier etch
Publication number
20030129847
Publication date
Jul 10, 2003
Francis G. Celii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Detection of AIOx ears for process control in FeRAM processing
Publication number
20030124791
Publication date
Jul 3, 2003
Scott R. Summerfelt
H01 - BASIC ELECTRIC ELEMENTS