Chris E. Karlsrud

Person

Chandler, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Robotic method of transferring workpieces to and from workstations
- Patent number 6,852,007
- Issue date Feb 8, 2005
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Load and unload station for semiconductor wafers
- Patent number 6,520,839
- Issue date Feb 18, 2003
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning station integral with polishing machine for semiconductor...
- Patent number 6,390,897
- Issue date May 21, 2002
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number RE37622
- Issue date Apr 2, 2002
- SpeedFam-IPEC Corporation
- Chris E. Karlsrud
- 451 - Abrading
Information Patent Grant
Mapping system for semiconductor wafer cassettes
- Patent number 6,364,745
- Issue date Apr 2, 2002
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Combined CMP and wafer cleaning apparatus and associated methods
- Patent number 6,350,177
- Issue date Feb 26, 2002
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Arrangements for wafer polishing
- Patent number 6,309,279
- Issue date Oct 30, 2001
- SpeedFam-IPEC Corporation
- Mike L. Bowman
- B24 - GRINDING POLISHING
Information Patent Grant
Robot assisted method of polishing, cleaning and drying workpieces
- Patent number 6,227,946
- Issue date May 8, 2001
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Integral machine for polishing, cleaning, rinsing and drying workpi...
- Patent number 6,213,853
- Issue date Apr 10, 2001
- SpeedFam-IPEC Corporation
- Jose R. Gonzalez-Martin
- B24 - GRINDING POLISHING
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 6,125,861
- Issue date Oct 3, 2000
- SpeedFam-IPEC Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece carrier with monopiece pressure plate and low gimbal point
- Patent number 5,989,104
- Issue date Nov 23, 1999
- SpeedFam-IPEC Corporation
- Inki Kim
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for processing workpieces with multiple polish...
- Patent number 5,975,991
- Issue date Nov 2, 1999
- SpeedFam-IPEC Corporation
- Chris Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Post-CMP wet-HF cleaning station
- Patent number 5,954,888
- Issue date Sep 21, 1999
- Speedfam Corporation
- Anand Gupta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for detecting removal of thin film layers dur...
- Patent number 5,872,633
- Issue date Feb 16, 1999
- Speedfam Corporation
- Paul Holzapfel
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatus for the in-process detection of workpieces wi...
- Patent number 5,834,645
- Issue date Nov 10, 1998
- Speedfam Corporation
- Anthony Bartels
- B24 - GRINDING POLISHING
Information Patent Grant
Bearing assembly for wafer planarization carrier
- Patent number 5,791,978
- Issue date Aug 11, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Backing pad
- Patent number 5,791,975
- Issue date Aug 11, 1998
- Speedfam Corporation
- Joseph V. Cesna
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing pad conditioning
- Patent number 5,569,062
- Issue date Oct 29, 1996
- Speedfam Corporation
- Chris Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,196
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,498,199
- Issue date Mar 12, 1996
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Wafer polishing method and apparatus
- Patent number 5,329,732
- Issue date Jul 19, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- G05 - CONTROLLING REGULATING
Information Patent Grant
Uniform velocity double sided finishing machine
- Patent number 5,274,960
- Issue date Jan 4, 1994
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Circumferential pattern finishing machine
- Patent number 5,187,901
- Issue date Feb 23, 1993
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING
Information Patent Grant
Circumferential pattern finishing method
- Patent number 5,123,218
- Issue date Jun 23, 1992
- Speedfam Corporation
- Chris E. Karlsrud
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES
- Publication number 20160358808
- Publication date Dec 8, 2016
- LAM RESEARCH CORPORATION
- Eric Russell Madsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for removing a liquid from a rotating substrat...
- Publication number 20060042664
- Publication date Mar 2, 2006
- Vishwas Hardikar
- B08 - CLEANING

Chris E. Karlsrud

Person

Patents Grantslast 30 patents

Robotic method of transferring workpieces to and from workstations

Load and unload station for semiconductor wafers

Cleaning station integral with polishing machine for semiconductor...

Wafer polishing method and apparatus

Mapping system for semiconductor wafer cassettes

Combined CMP and wafer cleaning apparatus and associated methods

Arrangements for wafer polishing

Robot assisted method of polishing, cleaning and drying workpieces

Integral machine for polishing, cleaning, rinsing and drying workpi...

Post-CMP wet-HF cleaning station

Workpiece carrier with monopiece pressure plate and low gimbal point

Method and apparatus for processing workpieces with multiple polish...

Post-CMP wet-HF cleaning station

Methods and apparatus for detecting removal of thin film layers dur...

Methods and apparatus for the in-process detection of workpieces wi...

Bearing assembly for wafer planarization carrier

Backing pad

Polishing pad conditioning

Wafer polishing method and apparatus

Wafer polishing method and apparatus

Wafer polishing method and apparatus

Uniform velocity double sided finishing machine

Circumferential pattern finishing machine

Circumferential pattern finishing method

Patents Applicationslast 30 patents

HYBRID 200 MM/300 MM SEMICONDUCTOR PROCESSING APPARATUSES

Apparatus and method for removing a liquid from a rotating substrat...