Christian Dussarrat

Person

Houston, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Bis-ketoiminate copper precursors for deposition of copper-containi...
- Patent number 9,121,093
- Issue date Sep 1, 2015
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal precursors containing beta-diketiminato ligands
- Patent number 9,103,019
- Issue date Aug 11, 2015
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nitridation of atomic layer deposited high-k dielectrics using tris...
- Patent number 9,064,694
- Issue date Jun 23, 2015
- Tokyo Electron Limited
- Steven P Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hafnium- and zirconium-containing precursors and methods of using t...
- Patent number 9,045,509
- Issue date Jun 2, 2015
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic amino compounds for low-k silylation
- Patent number 8,999,734
- Issue date Apr 7, 2015
- American Air Liquide, Inc.
- James J. F. McAndrew
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Methods of purifying COS
- Patent number 8,974,758
- Issue date Mar 10, 2015
- American Air Liquide, Inc.
- Asli Ertan
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of atomic layer deposition using metal precursors
- Patent number 8,906,457
- Issue date Dec 9, 2014
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a titanium-containing layer on a substrate using...
- Patent number 8,853,075
- Issue date Oct 7, 2014
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Satoko Gatineau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alkali earth metal precursors for depositing calcium and strontium...
- Patent number 8,852,460
- Issue date Oct 7, 2014
- Air Liquide Electronics U.S. LP
- Olivier Letessier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation of cerium-containing precursors and deposition of ceriu...
- Patent number 8,809,849
- Issue date Aug 19, 2014
- American Air Liquide, Inc.
- Venkateswara R. Pallem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of making and deposition methods using hafnium- or zirconiu...
- Patent number 8,765,220
- Issue date Jul 1, 2014
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Neutral ligand containing precursors and methods for deposition of...
- Patent number 8,758,867
- Issue date Jun 24, 2014
- L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
- Benjamin J. Jurcik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming silicon oxide containing films
- Patent number 8,613,976
- Issue date Dec 24, 2013
- L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the deposition of a Ruthenium containing film
- Patent number 8,557,339
- Issue date Oct 15, 2013
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation of lanthanide-containing precursors and deposition of l...
- Patent number 8,507,905
- Issue date Aug 13, 2013
- American Air Liquide, Inc.
- Venkateswara Pallem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of Ta- or Nb-doped high-k films
- Patent number 8,476,465
- Issue date Jul 2, 2013
- L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Porcédés Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Use of group V metal containing precursors for a process of deposit...
- Patent number 8,470,401
- Issue date Jun 25, 2013
- L'Air Liquide, Socété Anonyme pour l'Etude et l'Exploitation des Procédés Geo...
- Nicolas Merle
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Tellurium precursors for GST deposition
- Patent number 8,454,928
- Issue date Jun 4, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the deposition of a ruthenium containing film
- Patent number 8,404,306
- Issue date Mar 26, 2013
- L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Titanium-containing precursors for vapor deposition
- Patent number 8,404,878
- Issue date Mar 26, 2013
- American Air Liquide, Inc.
- Venkateswara R. Pallem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high-k dielectric films based on novel titanium,...
- Patent number 8,399,056
- Issue date Mar 19, 2013
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Nicolas Blasco
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing silicon nitride films and/or silicon oxynitri...
- Patent number 8,377,511
- Issue date Feb 19, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt precursors for semiconductor applications
- Patent number 8,372,473
- Issue date Feb 12, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Aluminum implant using new compounds
- Patent number 8,367,531
- Issue date Feb 5, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Vincent M. Omarjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing silicon nitride films
- Patent number 8,357,430
- Issue date Jan 22, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal precursors for deposition of metal-containing films
- Patent number 8,349,738
- Issue date Jan 8, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Clement Lansalot-Matras
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High C content molecules for C implant
- Patent number 8,343,860
- Issue date Jan 1, 2013
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Vincent M. Omarjee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal precursors for semiconductor applications
- Patent number 8,329,583
- Issue date Dec 11, 2012
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heteroleptic iridium precursors to be used for the deposition of ir...
- Patent number 8,309,174
- Issue date Nov 13, 2012
- L'Air Liquide Societe Anonyme pour l'Etude et l'Exploitation des Procedes Geo...
- Julien Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heteroleptic cyclopentadienyl transition metal precursors for depos...
- Patent number 8,298,616
- Issue date Oct 30, 2012
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PREPARATION OF CERIUM-CONTAINING PRECURSORS AND DEPOSITION OF CERIU...
- Publication number 20140113456
- Publication date Apr 24, 2014
- American Air Liquide Inc.
- Venkateswara R. PALLEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...
- Publication number 20140017907
- Publication date Jan 16, 2014
- Steven P. Consiglio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH CARBON CONTENT MOLECULES FOR AMORPHOUS CARBON DEPOSITION
- Publication number 20130109198
- Publication date May 2, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF MANGANESE-CONTAINING FILMS FOR VARIOU...
- Publication number 20130089679
- Publication date Apr 11, 2013
- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEO...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF NICKEL-CONTAINING FILMS FOR VARIOUS A...
- Publication number 20130089678
- Publication date Apr 11, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF TITANIUM-CONTAINING FILMS FOR VARIOUS...
- Publication number 20130089681
- Publication date Apr 11, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF RUTHENIUM-CONTAINING FILMS FOR VARIOU...
- Publication number 20130089680
- Publication date Apr 11, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED DEPOSITION OF COPPER-CONTAINING FILMS FOR VARIOUS A...
- Publication number 20130084407
- Publication date Apr 4, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Atomic Layer Deposition Using Metal Precursors
- Publication number 20130059077
- Publication date Mar 7, 2013
- Applied Materials, Inc.
- David Thompson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILANE BLEND FOR THIN FILM VAPOR DEPOSITION
- Publication number 20130022745
- Publication date Jan 24, 2013
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CYCLOPENTADIENYL TRANSITION METAL PRECURSORS FOR DEPOSITION OF TRAN...
- Publication number 20130011580
- Publication date Jan 10, 2013
- American Air Liquide, Inc.
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF L...
- Publication number 20120329999
- Publication date Dec 27, 2012
- American Air Liquide, Inc.
- Venkateswara R. PALLEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BIS-KETOIMINATE COPPER PRECURSORS FOR DEPOSITION OF COPPER-CONTAINI...
- Publication number 20120321817
- Publication date Dec 20, 2012
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON OXIDE CONTAINING FILMS
- Publication number 20120276292
- Publication date Nov 1, 2012
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ASHING COMPOUNDS AND METHODS OF USE
- Publication number 20120227762
- Publication date Sep 13, 2012
- American Air Liquide, Inc.
- Christian Dussarrat
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF MAKING AND DEPOSITION METHODS USING HAFNIUM- OR ZIRCONIU...
- Publication number 20120207928
- Publication date Aug 16, 2012
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HAFNIUM- AND ZIRCONIUM-CONTAINING PRECURSORS AND METHODS OF USING T...
- Publication number 20120207927
- Publication date Aug 16, 2012
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREPARATION OF CERIUM-CONTAINING PRECURSORS AND DEPOSITION OF CERIU...
- Publication number 20120156373
- Publication date Jun 21, 2012
- American Air Liquide, Inc.
- Venkateswara R. PALLEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHIUM PRECURSORS FOR LixMyOz MATERIALS FOR BATTERIES
- Publication number 20120145953
- Publication date Jun 14, 2012
- Venkateswara R. Pallem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PRECURSORS FOR DEPOSITION OF METAL-CONTAINING FILMS
- Publication number 20120122313
- Publication date May 17, 2012
- American Air Liquide, Inc.
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF TERNARY OXIDE FILMS CONTAINING RUTHENIUM AND ALKALI E...
- Publication number 20120070582
- Publication date Mar 22, 2012
- L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEO...
- Satoko GATINEAU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF TA- OR NB-DOPED HIGH-K FILMS
- Publication number 20120065420
- Publication date Mar 15, 2012
- L'Air Liquide Societe Anonyme pour I'Etude et I'Exploitation des Procedes Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A TITANIUM-CONTAINING LAYER ON A SUBSTRATE USING...
- Publication number 20110275215
- Publication date Nov 10, 2011
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLE...
- Publication number 20110275507
- Publication date Nov 10, 2011
- L'air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation Des Procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TITANIUM-CONTAINING PRECURSORS FOR VAPOR DEPOSITION
- Publication number 20110250354
- Publication date Oct 13, 2011
- American Air Liquide, Inc.
- Venkateswara R. Pallem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...
- Publication number 20110207337
- Publication date Aug 25, 2011
- L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNTHESIS OF ALLYL-CONTAINING PRECURSORS FOR THE DEPOSITION OF META...
- Publication number 20100256405
- Publication date Oct 7, 2010
- Christian DUSSARRAT
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR THE DEPOSITION OF A RUTHENIUM CONTAINING FILM
- Publication number 20100221577
- Publication date Sep 2, 2010
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING SILICON NITRIDE FILMS AND/OR SILICON OXYNITRI...
- Publication number 20100221428
- Publication date Sep 2, 2010
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PRECURSORS FOR DEPOSITION OF METAL-CONTAINING FILMS
- Publication number 20100193951
- Publication date Aug 5, 2010
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Christian Dussarrat

Person

Patents Grantslast 30 patents

Bis-ketoiminate copper precursors for deposition of copper-containi...

Metal precursors containing beta-diketiminato ligands

Nitridation of atomic layer deposited high-k dielectrics using tris...

Hafnium- and zirconium-containing precursors and methods of using t...

Cyclic amino compounds for low-k silylation

Methods of purifying COS

Method of atomic layer deposition using metal precursors

Method for forming a titanium-containing layer on a substrate using...

Alkali earth metal precursors for depositing calcium and strontium...

Preparation of cerium-containing precursors and deposition of ceriu...

Methods of making and deposition methods using hafnium- or zirconiu...

Neutral ligand containing precursors and methods for deposition of...

Method of forming silicon oxide containing films

Method for the deposition of a Ruthenium containing film

Preparation of lanthanide-containing precursors and deposition of l...

Deposition of Ta- or Nb-doped high-k films

Use of group V metal containing precursors for a process of deposit...

Tellurium precursors for GST deposition

Method for the deposition of a ruthenium containing film

Titanium-containing precursors for vapor deposition

Method of forming high-k dielectric films based on novel titanium,...

Method for depositing silicon nitride films and/or silicon oxynitri...

Cobalt precursors for semiconductor applications

Aluminum implant using new compounds

Method for producing silicon nitride films

Metal precursors for deposition of metal-containing films

High C content molecules for C implant

Metal precursors for semiconductor applications

Heteroleptic iridium precursors to be used for the deposition of ir...

Heteroleptic cyclopentadienyl transition metal precursors for depos...

Patents Applicationslast 30 patents

PREPARATION OF CERIUM-CONTAINING PRECURSORS AND DEPOSITION OF CERIU...

NITRIDATION OF ATOMIC LAYER DEPOSITED HIGH-K DIELECTRICS USING TRIS...

HIGH CARBON CONTENT MOLECULES FOR AMORPHOUS CARBON DEPOSITION

PLASMA-ENHANCED DEPOSITION OF MANGANESE-CONTAINING FILMS FOR VARIOU...

PLASMA-ENHANCED DEPOSITION OF NICKEL-CONTAINING FILMS FOR VARIOUS A...

PLASMA-ENHANCED DEPOSITION OF TITANIUM-CONTAINING FILMS FOR VARIOUS...

PLASMA-ENHANCED DEPOSITION OF RUTHENIUM-CONTAINING FILMS FOR VARIOU...

PLASMA-ENHANCED DEPOSITION OF COPPER-CONTAINING FILMS FOR VARIOUS A...

Method of Atomic Layer Deposition Using Metal Precursors

SILANE BLEND FOR THIN FILM VAPOR DEPOSITION

CYCLOPENTADIENYL TRANSITION METAL PRECURSORS FOR DEPOSITION OF TRAN...

PREPARATION OF LANTHANIDE-CONTAINING PRECURSORS AND DEPOSITION OF L...

BIS-KETOIMINATE COPPER PRECURSORS FOR DEPOSITION OF COPPER-CONTAINI...

METHOD OF FORMING SILICON OXIDE CONTAINING FILMS

PLASMA ASHING COMPOUNDS AND METHODS OF USE

METHODS OF MAKING AND DEPOSITION METHODS USING HAFNIUM- OR ZIRCONIU...

HAFNIUM- AND ZIRCONIUM-CONTAINING PRECURSORS AND METHODS OF USING T...

PREPARATION OF CERIUM-CONTAINING PRECURSORS AND DEPOSITION OF CERIU...

LITHIUM PRECURSORS FOR LixMyOz MATERIALS FOR BATTERIES

METAL PRECURSORS FOR DEPOSITION OF METAL-CONTAINING FILMS

DEPOSITION OF TERNARY OXIDE FILMS CONTAINING RUTHENIUM AND ALKALI E...

DEPOSITION OF TA- OR NB-DOPED HIGH-K FILMS

METHOD FOR FORMING A TITANIUM-CONTAINING LAYER ON A SUBSTRATE USING...

METHOD FOR FORMING A DIELECTRIC FILM AND NOVEL PRECURSORS FOR IMPLE...

TITANIUM-CONTAINING PRECURSORS FOR VAPOR DEPOSITION

METHOD OF FORMING DIELECTRIC FILMS, NEW PRECURSORS AND THEIR USE IN...

SYNTHESIS OF ALLYL-CONTAINING PRECURSORS FOR THE DEPOSITION OF META...

METHOD FOR THE DEPOSITION OF A RUTHENIUM CONTAINING FILM

METHOD FOR DEPOSITING SILICON NITRIDE FILMS AND/OR SILICON OXYNITRI...

METAL PRECURSORS FOR DEPOSITION OF METAL-CONTAINING FILMS