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Semiconductor wafer handling transport
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Patent number 9,884,726
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Issue date Feb 6, 2018
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Brooks Automation, Inc.
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Peter van der Meulen
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Wafer center finding with kalman filter
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Patent number 8,934,706
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Issue date Jan 13, 2015
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Brooks Automation, Inc.
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Christopher C Kiley
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Wafer center finding with kalman filter
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Patent number 8,634,633
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Issue date Jan 21, 2014
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Brooks Automation, Inc.
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Christopher C Kiley
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Wafer center finding
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Patent number 7,792,350
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Issue date Sep 7, 2010
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Brooks Automation, Inc.
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Chris Kiley
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B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
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Batch loader arm
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Patent number 5,954,472
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Issue date Sep 21, 1999
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Brooks Automation, Inc.
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Christopher A. Hofmeister
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Coaxial drive loader arm
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Patent number 5,908,281
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Issue date Jun 1, 1999
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Brooks Automation Inc.
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Christopher Kiley
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS