Christopher Kimball

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for conditioning semiconductor processing chamber components
- Patent number 12,129,569
- Issue date Oct 29, 2024
- Lam Research Corporation
- Lin Xu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electrostatic chuck with ceramic monolithic body
- Patent number 11,967,517
- Issue date Apr 23, 2024
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 11,935,776
- Issue date Mar 19, 2024
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plate electrostatic chucks with ceramic baseplates
- Patent number 11,848,177
- Issue date Dec 19, 2023
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 10,923,380
- Issue date Feb 16, 2021
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly incorporation a gasket for distributin...
- Patent number 10,804,129
- Issue date Oct 13, 2020
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
ESC assembly including an electrically conductive gasket for unifor...
- Patent number 10,002,782
- Issue date Jun 19, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 9,922,857
- Issue date Mar 20, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck including declamping electrode and method of de...
- Patent number 9,101,038
- Issue date Aug 4, 2015
- Lam Research Corporation
- Harmeet Singh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for stabilizing contact surfaces of electrostatic chucks
- Patent number 8,906,164
- Issue date Dec 9, 2014
- Lam Research Corporation
- Chris Kimball
- B08 - CLEANING
Information Patent Grant
Methods for measuring a set of electrical characteristics in a plasma
- Patent number 7,994,794
- Issue date Aug 9, 2011
- Lam Research Corporation
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustable height PIF probe
- Patent number 7,867,355
- Issue date Jan 11, 2011
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to detect fault conditions of plasma processin...
- Patent number 7,829,468
- Issue date Nov 9, 2010
- Lam Research Corporation
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing chamber with an apparatus for measuring a set of...
- Patent number 7,723,994
- Issue date May 25, 2010
- Lam Research Corporation
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High power electrical connector for a laminated heater
- Patent number 7,699,634
- Issue date Apr 20, 2010
- Lam Research Corporation
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adjustable height PIF probe
- Patent number 7,479,207
- Issue date Jan 20, 2009
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for measuring a set of electrical characteristics in a pl...
- Patent number 7,319,316
- Issue date Jan 15, 2008
- Lam Research Corporation
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
POLYMERIC COATING FOR SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
- Publication number 20240120180
- Publication date Apr 11, 2024
- LAM RESEARCH CORPORATION
- Yuanping SONG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20240112893
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS
- Publication number 20230369026
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
- Publication number 20230092570
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
- Publication number 20220285136
- Publication date Sep 8, 2022
- LAM RESEARCH CORPORATION
- Hui Ling HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
- Publication number 20220270863
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...
- Publication number 20220254612
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TE...
- Publication number 20220172925
- Publication date Jun 2, 2022
- LAM RESEARCH CORPORATION
- Changyou Jing
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY
- Publication number 20220148903
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Feng WANG
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT
- Publication number 20220122878
- Publication date Apr 21, 2022
- LAM RESEARCH CORPORATION
- Joanna Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20210166965
- Publication date Jun 3, 2021
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20190267218
- Publication date Aug 29, 2019
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...
- Publication number 20180277412
- Publication date Sep 27, 2018
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20180166312
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...
- Publication number 20160111314
- Publication date Apr 21, 2016
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DE...
- Publication number 20150181683
- Publication date Jun 25, 2015
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods For Stabilizing Contact Surfaces of Electrostatic Chucks
- Publication number 20120031427
- Publication date Feb 9, 2012
- LAM RESEARCH CORPORATION
- Chris Kimball
- B08 - CLEANING
Information Patent Application
ELECTROSTATIC CHUCK WITH AN ANGLED SIDEWALL
- Publication number 20110126852
- Publication date Jun 2, 2011
- LAM RESEARCH CORPORATION
- Rajinder Dhindsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS TO DETECT FAULT CONDITIONS OF A PLASMA PROCESSING REACTOR
- Publication number 20110022215
- Publication date Jan 27, 2011
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR MEASURING A SET OF ELECTRICAL CHARACTERISTICS IN A PLASMA
- Publication number 20100229372
- Publication date Sep 16, 2010
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ADJUSTABLE HEIGHT PIF PROBE
- Publication number 20090133836
- Publication date May 28, 2009
- LAM RESEARCH CORPORATION
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Electrical Connector for a Laminated Heater
- Publication number 20080227323
- Publication date Sep 18, 2008
- LAM RESEARCH CORPORATION
- Arnold Kholodenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma processing chamber with an apparatus for measuring set of el...
- Publication number 20080066861
- Publication date Mar 20, 2008
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and apparatus to detect fault conditions of plasma processin...
- Publication number 20070284246
- Publication date Dec 13, 2007
- LAM RESEARCH CORPORATION
- Douglas Keil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Adjustable height PIF probe
- Publication number 20070215285
- Publication date Sep 20, 2007
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for measuring a set of electrical characteristics in a pl...
- Publication number 20070000843
- Publication date Jan 4, 2007
- Christopher Kimball
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Christopher Kimball

Person

Patents Grantslast 30 patents

Method for conditioning semiconductor processing chamber components

Electrostatic chuck with ceramic monolithic body

Electrostatically clamped edge ring

Multi-plate electrostatic chucks with ceramic baseplates

Electrostatically clamped edge ring

Electrostatic chuck assembly incorporation a gasket for distributin...

ESC assembly including an electrically conductive gasket for unifor...

Electrostatically clamped edge ring

Electrostatic chuck including declamping electrode and method of de...

Methods for stabilizing contact surfaces of electrostatic chucks

Methods for measuring a set of electrical characteristics in a plasma

Adjustable height PIF probe

Method and apparatus to detect fault conditions of plasma processin...

Plasma processing chamber with an apparatus for measuring a set of...

High power electrical connector for a laminated heater

Adjustable height PIF probe

Apparatus for measuring a set of electrical characteristics in a pl...

Patents Applicationslast 30 patents

POLYMERIC COATING FOR SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

MOVEABLE EDGE RINGS FOR PLASMA PROCESSING SYSTEMS

METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS

MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...

MOVEABLE EDGE RINGS WITH REDUCED CAPACITANCE VARIATION FOR SUBSTRAT...

ELECTROSTATIC CHUCK HEATER RESISTANCE MEASUREMENT TO APPROXIMATE TE...

ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY

AUTOMATED PROCESS MODULE RING POSITIONING AND REPLACEMENT

ELECTROSTATICALLY CLAMPED EDGE RING

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

ELECTROSTATIC CHUCK ASSEMBLY INCORPORATING A GASKET FOR DISTRIBUTIN...

ELECTROSTATICALLY CLAMPED EDGE RING

ESC ASSEMBLY INCLUDING AN ELECTRICALLY CONDUCTIVE GASKET FOR UNIFOR...

ELECTROSTATIC CHUCK INCLUDING DECLAMPING ELECTRODE AND METHOD OF DE...

Methods For Stabilizing Contact Surfaces of Electrostatic Chucks

ELECTROSTATIC CHUCK WITH AN ANGLED SIDEWALL

APPARATUS TO DETECT FAULT CONDITIONS OF A PLASMA PROCESSING REACTOR

METHODS FOR MEASURING A SET OF ELECTRICAL CHARACTERISTICS IN A PLASMA

ADJUSTABLE HEIGHT PIF PROBE

High Power Electrical Connector for a Laminated Heater

Plasma processing chamber with an apparatus for measuring set of el...

Method and apparatus to detect fault conditions of plasma processin...

Adjustable height PIF probe

Apparatus for measuring a set of electrical characteristics in a pl...