Christopher Pena

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,764,086
- Issue date Sep 19, 2023
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,393,705
- Issue date Jul 19, 2022
- Lam Research Corporation
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,914,003
- Issue date Feb 9, 2021
- Lam Research Corporation
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,790,174
- Issue date Sep 29, 2020
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,557,197
- Issue date Feb 11, 2020
- Lam Research Corporation
- Andrew C. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monolithic manifold mask and substrate concepts
- Patent number 10,118,263
- Issue date Nov 6, 2018
- Lam Researech Corporation
- Michael C. Kellogg
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,014,196
- Issue date Jul 3, 2018
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,929,028
- Issue date Mar 27, 2018
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,502,275
- Issue date Nov 22, 2016
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brush core assembly
- Patent number 7,735,177
- Issue date Jun 15, 2010
- Lam Research Corporation
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge wheel assembly in a substrate processing brush box
- Patent number 6,907,637
- Issue date Jun 21, 2005
- Lam Research Corporation
- Christopher J. Peña
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Brush drive assembly in a substrate processing brush box
- Patent number 6,851,151
- Issue date Feb 8, 2005
- Lam Research Corporation
- Christopher J. Peña
- B08 - CLEANING
Information Patent Grant
Method and apparatus for chemically-mechanically polishing semicond...
- Patent number 6,261,959
- Issue date Jul 17, 2001
- Lam Research Corporation
- Glenn Travis
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
DELIVERY OF HIGH CONCENTRATIONS OF MOLECULAR HYDROGEN AND OTHER GAS...
- Publication number 20230245862
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Anthony John RICCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS
- Publication number 20230085987
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Danny Arthur BROWN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20220344183
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- David TRUSSELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20210005485
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20200141002
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Application
Wafer Transport Assembly With Integrated Buffers
- Publication number 20180233387
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- John DAUGHERTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SERVICE TUNNEL FOR USE ON CAPITAL EQUIPMENT IN SEMICONDUCTOR MANUFA...
- Publication number 20170110350
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20170110354
- Publication date Apr 20, 2017
- LAM RESEARCH CORPORATION
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS
- Publication number 20170057028
- Publication date Mar 2, 2017
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF
- Publication number 20160111257
- Publication date Apr 21, 2016
- Lam Research Corporation
- Michael C. Kellogg
- B32 - LAYERED PRODUCTS
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20160108523
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Christopher Pena

Person

Patents Grantslast 30 patents

Wafer transport assembly with integrated buffers

Wafer transport assembly with integrated buffers

Monolithic gas distribution manifold and various construction techn...

Wafer transport assembly with integrated buffers

Monolithic gas distribution manifold and various construction techn...

Monolithic manifold mask and substrate concepts

Wafer transport assembly with integrated buffers

Service tunnel for use on capital equipment in semiconductor manufa...

Service tunnel for use on capital equipment in semiconductor manufa...

Brush core assembly

Edge wheel assembly in a substrate processing brush box

Brush drive assembly in a substrate processing brush box

Method and apparatus for chemically-mechanically polishing semicond...

Patents Applicationslast 30 patents

DELIVERY OF HIGH CONCENTRATIONS OF MOLECULAR HYDROGEN AND OTHER GAS...

LINEAR ARRANGEMENT FOR SUBSTRATE PROCESSING TOOLS

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...

Wafer Transport Assembly With Integrated Buffers

SERVICE TUNNEL FOR USE ON CAPITAL EQUIPMENT IN SEMICONDUCTOR MANUFA...

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

MONOLITHIC MANIFOLD MASK AND SUBSTRATE CONCEPTS

SUBSTRATE FOR MOUNTING GAS SUPPLY COMPONENTS AND METHODS THEREOF

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...