Christopher R. Hatem

Person

Seabrook, NH, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and methods using an inline surface engineering source
- Patent number 11,862,433
- Issue date Jan 2, 2024
- Varlan Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for controlling radicals using a radical filter
- Patent number 11,721,530
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced substrate amorphization using intermittent ion exposure
- Patent number 11,315,790
- Issue date Apr 26, 2022
- Applied Materials, Inc.
- Supakit Charnvanichborikarn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and methods using an inline surface engineering source
- Patent number 11,069,511
- Issue date Jul 20, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques, system and apparatus for selective deposition of a laye...
- Patent number 10,879,055
- Issue date Dec 29, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 10,541,137
- Issue date Jan 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Encapsulated nanostructures and devices containing encapsulated nan...
- Patent number 10,411,096
- Issue date Sep 10, 2019
- University of Florida Research Foundation, Inc.
- Christopher Hatem
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Encapsulated nanostructures and method for fabricating
- Patent number 9,985,101
- Issue date May 29, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Damage free enhancement of dopant diffusion into a substrate
- Patent number 9,953,835
- Issue date Apr 24, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Damage free enhancement of dopant diffusion into a substrate
- Patent number 9,589,802
- Issue date Mar 7, 2017
- Varian Semuconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for increased dopant activation in compound semiconductors
- Patent number 9,576,819
- Issue date Feb 21, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conversion process utilized for manufacturing advanced 3D features...
- Patent number 9,553,174
- Issue date Jan 24, 2017
- Applied Materials, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Angled ion beam processing of heterogeneous structure
- Patent number 9,520,360
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of affecting material properties and applications therefor
- Patent number 9,425,027
- Issue date Aug 23, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Angled ion beam processing of heterogeneous structure
- Patent number 9,337,040
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for forming 3D structures
- Patent number 9,240,350
- Issue date Jan 19, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to mitigate straggle damage to sensitive structures
- Patent number 9,236,257
- Issue date Jan 12, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing of workpieces to form a coating
- Patent number 9,062,367
- Issue date Jun 23, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to generate molecular ions from ions with a smaller atomic mass
- Patent number 9,024,273
- Issue date May 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for epitaxial layer overgrowth
- Patent number 8,969,181
- Issue date Mar 3, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of ionization
- Patent number 8,742,373
- Issue date Jun 3, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana Radovanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition of porous films for thermoelectric applications
- Patent number 8,697,549
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Xianfeng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned masking for solar cell manufacture
- Patent number 8,465,909
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P. T. Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Use of dopants with different diffusivities for solar cell manufacture
- Patent number 8,461,032
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and system for post-etch treatment of patterned substrate fe...
- Patent number 8,460,569
- Issue date Jun 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
USJ techniques with helium-treated substrates
- Patent number 8,372,735
- Issue date Feb 12, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
USJ techniques with helium-treated substrates
- Patent number 8,124,506
- Issue date Feb 28, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low temperature ion implantation
- Patent number 8,101,528
- Issue date Jan 24, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized halo or pocket cold implants
- Patent number 8,012,843
- Issue date Sep 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA ASSISTED DAMAGE ENGINEERING DURING ION IMPLANTATION
- Publication number 20240153775
- Publication date May 9, 2024
- Applied Materials, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPROCESS SUBSTRATE TREATMENT FOR ENHANCED SUBSTRATE DOPING
- Publication number 20240153774
- Publication date May 9, 2024
- Applied Materials, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20240096602
- Publication date Mar 21, 2024
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20210313154
- Publication date Oct 7, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR CONTROLLING RADICALS USING A RADICAL FILTER
- Publication number 20210265139
- Publication date Aug 26, 2021
- Applied Materials, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED SUBSTRATE AMORPHIZATION USING INTERMITTENT ION EXPOSURE
- Publication number 20210118681
- Publication date Apr 22, 2021
- Applied Materials, Inc.
- SUPAKIT CHARNVANICHBORIKARN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING
- Publication number 20200411342
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20200152466
- Publication date May 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...
- Publication number 20200027707
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- CHRISTOPHER HATEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System And Methods Using An Inline Surface Engineering Source
- Publication number 20190393019
- Publication date Dec 26, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20190371608
- Publication date Dec 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCAPSULATED NANOSTRUCTURES AND METHOD FOR FABRICATING
- Publication number 20180248007
- Publication date Aug 30, 2018
- University of Florida Research Foundation, Inc.
- Christopher Hatem
- B82 - NANO-TECHNOLOGY
Information Patent Application
DAMAGE FREE ENHANCEMENT OF DOPANT DIFFUSION INTO A SUBSTRATE
- Publication number 20180240670
- Publication date Aug 23, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DAMAGE FREE ENHANCEMENT OF DOPANT DIFFUSION INTO A SUBSTRATE
- Publication number 20170178908
- Publication date Jun 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCAPSULATED NANOSTRUCTURES AND METHOD FOR FABRICATING
- Publication number 20170125526
- Publication date May 4, 2017
- University of Florida Research Foundation, Inc.
- Christopher Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods Of Affecting Material Properties And Applications Therefor
- Publication number 20160326636
- Publication date Nov 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANGLED ION BEAM PROCESSING OF HETEROGENEOUS STRUCTURE
- Publication number 20160233162
- Publication date Aug 11, 2016
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR INCREASED DOPANT ACTIVATION IN COMPOUND SEMICONDUCTORS
- Publication number 20150364325
- Publication date Dec 17, 2015
- Varian Semiconductor Equipment Associcates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...
- Publication number 20150279974
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES TO MITIGATE STRAGGLE DAMAGE TO SENSITIVE STRUCTURES
- Publication number 20140273502
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE
- Publication number 20140154834
- Publication date Jun 5, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas P.T. Bateman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANISOTROPIC SURFACE ENERGY MODULATION BY ION IMPLANTATION
- Publication number 20140037858
- Publication date Feb 6, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING OF WORKPIECES TO FORM A COATING
- Publication number 20130064989
- Publication date Mar 14, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF POROUS FILMS FOR THERMOELECTRIC APPLICATIONS
- Publication number 20130045557
- Publication date Feb 21, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Xianfeng Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR FORMING 3D STRUCTURES
- Publication number 20120295444
- Publication date Nov 22, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF AFFECTING MATERIAL PROPERTIES AND APPLICATIONS THEREFOR
- Publication number 20120288637
- Publication date Nov 15, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR POST-ETCH TREATMENT OF PATTERNED SUBSTRATE FE...
- Publication number 20120258600
- Publication date Oct 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic Godet
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR EPITAXIAL LAYER OVERGROWTH
- Publication number 20120258583
- Publication date Oct 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Ludovic GODET
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IONIZATION
- Publication number 20120145918
- Publication date Jun 14, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Svetlana RADOVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DAMAGE-FREE JUNCTION FORMATION
- Publication number 20110300696
- Publication date Dec 8, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. HATEM
- H01 - BASIC ELECTRIC ELEMENTS

Christopher R. Hatem

Person

Patents Grantslast 30 patents

System and methods using an inline surface engineering source

System for controlling radicals using a radical filter

Method and apparatus for non line-of-sight doping

Enhanced substrate amorphization using intermittent ion exposure

System and methods using an inline surface engineering source

Techniques, system and apparatus for selective deposition of a laye...

Method and apparatus for non line-of-sight doping

Encapsulated nanostructures and devices containing encapsulated nan...

Encapsulated nanostructures and method for fabricating

Damage free enhancement of dopant diffusion into a substrate

Damage free enhancement of dopant diffusion into a substrate

Techniques for increased dopant activation in compound semiconductors

Conversion process utilized for manufacturing advanced 3D features...

Angled ion beam processing of heterogeneous structure

Methods of affecting material properties and applications therefor

Angled ion beam processing of heterogeneous structure

Techniques for forming 3D structures

Techniques to mitigate straggle damage to sensitive structures

Plasma processing of workpieces to form a coating

Method to generate molecular ions from ions with a smaller atomic mass

Method for epitaxial layer overgrowth

Method of ionization

Deposition of porous films for thermoelectric applications

Self-aligned masking for solar cell manufacture

Use of dopants with different diffusivities for solar cell manufacture

Method and system for post-etch treatment of patterned substrate fe...

USJ techniques with helium-treated substrates

USJ techniques with helium-treated substrates

Low temperature ion implantation

Optimized halo or pocket cold implants

Patents Applicationslast 30 patents

PLASMA ASSISTED DAMAGE ENGINEERING DURING ION IMPLANTATION

MULTIPROCESS SUBSTRATE TREATMENT FOR ENHANCED SUBSTRATE DOPING

System And Methods Using An Inline Surface Engineering Source

System And Methods Using An Inline Surface Engineering Source

SYSTEM FOR CONTROLLING RADICALS USING A RADICAL FILTER

ENHANCED SUBSTRATE AMORPHIZATION USING INTERMITTENT ION EXPOSURE

BEAMLINE ARCHITECTURE WITH INTEGRATED PLASMA PROCESSING

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...

System And Methods Using An Inline Surface Engineering Source

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

ENCAPSULATED NANOSTRUCTURES AND METHOD FOR FABRICATING

DAMAGE FREE ENHANCEMENT OF DOPANT DIFFUSION INTO A SUBSTRATE

DAMAGE FREE ENHANCEMENT OF DOPANT DIFFUSION INTO A SUBSTRATE

ENCAPSULATED NANOSTRUCTURES AND METHOD FOR FABRICATING

Methods Of Affecting Material Properties And Applications Therefor

ANGLED ION BEAM PROCESSING OF HETEROGENEOUS STRUCTURE

TECHNIQUES FOR INCREASED DOPANT ACTIVATION IN COMPOUND SEMICONDUCTORS

CONVERSION PROCESS UTILIZED FOR MANUFACTURING ADVANCED 3D FEATURES...

TECHNIQUES TO MITIGATE STRAGGLE DAMAGE TO SENSITIVE STRUCTURES

USE OF DOPANTS WITH DIFFERENT DIFFUSIVITIES FOR SOLAR CELL MANUFACTURE

ANISOTROPIC SURFACE ENERGY MODULATION BY ION IMPLANTATION

PLASMA PROCESSING OF WORKPIECES TO FORM A COATING

DEPOSITION OF POROUS FILMS FOR THERMOELECTRIC APPLICATIONS

TECHNIQUES FOR FORMING 3D STRUCTURES

METHODS OF AFFECTING MATERIAL PROPERTIES AND APPLICATIONS THEREFOR

METHOD AND SYSTEM FOR POST-ETCH TREATMENT OF PATTERNED SUBSTRATE FE...

METHOD FOR EPITAXIAL LAYER OVERGROWTH

METHOD OF IONIZATION

METHOD FOR DAMAGE-FREE JUNCTION FORMATION