Christopher W. Burkhart

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Additively manufactured gas distribution manifold
- Patent number 10,794,519
- Issue date Oct 6, 2020
- Lam Research Corporation
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Vacuum robot positioning system with reduced sensitivity to chamber...
- Patent number 10,483,142
- Issue date Nov 19, 2019
- Lam Research Corporation
- Mark K. Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additively manufactured gas distribution manifold
- Patent number 10,215,317
- Issue date Feb 26, 2019
- Lam Research Corporation
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Additively manufactured gas distribution manifold
- Patent number 9,879,795
- Issue date Jan 30, 2018
- Lam Research Corporation
- Christopher William Burkhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-purged vacuum valve
- Patent number 7,754,014
- Issue date Jul 13, 2010
- Novellus Systems, Inc.
- Lawrence A Gochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-purged vacuum valve
- Patent number 7,585,370
- Issue date Sep 8, 2009
- Novellus Systems, Inc.
- Lawrence A Gochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MESC seal, O-ring carrier
- Patent number 6,722,665
- Issue date Apr 20, 2004
- Novellus Systems, Inc.
- Christopher W. Burkhart
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Flatted object passive aligner
- Patent number 6,682,295
- Issue date Jan 27, 2004
- Novellus Systems, Inc.
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-purged vacuum valve
- Patent number 6,602,346
- Issue date Aug 5, 2003
- Novellus Systems, Inc.
- Lawrence A. Gochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure-induced shut-off valve for a liquid delivery system
- Patent number 6,039,074
- Issue date Mar 21, 2000
- Novellus Systems, Inc.
- Ivo J. Raaijmakers
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas-based substrate deposition protection
- Patent number 5,925,411
- Issue date Jul 20, 1999
- Siliconix incorporated
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for preventing deposition on frontside peripheral region...
- Patent number 5,882,417
- Issue date Mar 16, 1999
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
- Patent number 5,843,233
- Issue date Dec 1, 1998
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for removing dissolved gas from a liquid
- Patent number 5,772,736
- Issue date Jun 30, 1998
- Novellus Systems, Inc.
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exclusion guard and gas-based substrate protection for chemical vap...
- Patent number 5,769,951
- Issue date Jun 23, 1998
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for removing dissolved gas from a liquid
- Patent number 5,645,625
- Issue date Jul 8, 1997
- Novellus Systems, Inc.
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for supporting a substrate and introducing gas flow doxim...
- Patent number 5,620,525
- Issue date Apr 15, 1997
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer surface protection in a gas deposition process
- Patent number 5,578,532
- Issue date Nov 26, 1996
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device for removing dissolved gas from a liquid
- Patent number 5,425,803
- Issue date Jun 20, 1995
- Novellus Systems, Inc.
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-based backside protection during substrate processing
- Patent number 5,374,594
- Issue date Dec 20, 1994
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-based substrate protection during processing
- Patent number 5,238,499
- Issue date Aug 24, 1993
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-based backside protection during substrate processing
- Patent number 5,230,741
- Issue date Jul 27, 1993
- Novellus Systems, Inc.
- Everhardus P. van de Ven
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sheet feeding mechanism
- Patent number 4,575,069
- Issue date Mar 11, 1986
- Qume Corporation
- Christopher W. Burkhart
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD
- Publication number 20190211955
- Publication date Jul 11, 2019
- LAM RESEARCH CORPORATION
- Christopher William Burkhart
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD
- Publication number 20170204989
- Publication date Jul 20, 2017
- LAM RESEARCH CORPORATION
- Christopher William Burkhart
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD
- Publication number 20170203511
- Publication date Jul 20, 2017
- LAM RESEARCH CORPORATION
- Christopher William Burkhart
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
END EFFECTOR FOR HANDLING SUBSTRATES
- Publication number 20100296903
- Publication date Nov 25, 2010
- Applied Materials, Inc.
- VINAY K. SHAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS-PURGED VACUUM VALVE
- Publication number 20090291207
- Publication date Nov 26, 2009
- Novellus Systems, Inc.
- Lawrence A. Gochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS-PURGED VACUUM VALVE
- Publication number 20080168947
- Publication date Jul 17, 2008
- Novellus Systems, Inc.
- Lawrence A. Gochberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas-purged vacuum valve
- Publication number 20040007188
- Publication date Jan 15, 2004
- Novellus Systems, Inc.
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Flatted object passive aligner
- Publication number 20020197144
- Publication date Dec 26, 2002
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS

Christopher W. Burkhart

Person

Patents Grantslast 30 patents

Additively manufactured gas distribution manifold

Vacuum robot positioning system with reduced sensitivity to chamber...

Additively manufactured gas distribution manifold

Additively manufactured gas distribution manifold

Gas-purged vacuum valve

Gas-purged vacuum valve

MESC seal, O-ring carrier

Flatted object passive aligner

Gas-purged vacuum valve

Pressure-induced shut-off valve for a liquid delivery system

Gas-based substrate deposition protection

Apparatus for preventing deposition on frontside peripheral region...

Exclusion guard and gas-based substrate protection for chemical vap...

Device for removing dissolved gas from a liquid

Exclusion guard and gas-based substrate protection for chemical vap...

Device for removing dissolved gas from a liquid

Apparatus for supporting a substrate and introducing gas flow doxim...

Wafer surface protection in a gas deposition process

Device for removing dissolved gas from a liquid

Gas-based backside protection during substrate processing

Gas-based substrate protection during processing

Gas-based backside protection during substrate processing

Sheet feeding mechanism

Patents Applicationslast 30 patents

ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD

ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD

ADDITIVELY MANUFACTURED GAS DISTRIBUTION MANIFOLD

END EFFECTOR FOR HANDLING SUBSTRATES

GAS-PURGED VACUUM VALVE

GAS-PURGED VACUUM VALVE

Gas-purged vacuum valve

Flatted object passive aligner