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Christos Kourouklis
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Aalen, DE
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last 30 patents
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Patent Application
METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
Publication number
20130100426
Publication date
Apr 25, 2013
Carl Zeiss SMT GMBH
Berndt Warm
G02 - OPTICS
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Patent Application
METHOD FOR PRODUCING FACET MIRRORS AND PROJECTION EXPOSURE APPARATUS
Publication number
20100007866
Publication date
Jan 14, 2010
Carl Zeiss SMT AG
Berndt Warm
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL