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Chuang-Chia Lin
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Optical spectrum sensor wafer or robot for chamber condition monito...
Patent number
12,176,188
Issue date
Dec 24, 2024
Applied Materials, Inc.
Chuang-Chia Lin
B08 - CLEANING
Information
Patent Grant
Microwave resonator array for plasma diagnostics
Patent number
12,062,529
Issue date
Aug 13, 2024
Applied Materials, Inc.
David John Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-chamber low-profile sensor assembly
Patent number
12,009,235
Issue date
Jun 11, 2024
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Grant
Surface acoustic wave sensor assembly
Patent number
11,920,994
Issue date
Mar 5, 2024
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Grant
Surface acoustic wave sensor assembly
Patent number
11,901,875
Issue date
Feb 13, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
MEMS resonator sensor substrate for plasma, temperature, stress, or...
Patent number
11,874,189
Issue date
Jan 16, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
In-situ optical chamber surface and process sensor
Patent number
11,735,401
Issue date
Aug 22, 2023
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical wall and process sensor with plasma facing sensor
Patent number
11,499,869
Issue date
Nov 15, 2022
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro resonator array sensor for detecting wafer processing parameters
Patent number
11,346,875
Issue date
May 31, 2022
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High quality factor embedded resonator wafers
Patent number
11,209,398
Issue date
Dec 28, 2021
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ optical chamber surface and process sensor
Patent number
11,114,286
Issue date
Sep 7, 2021
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Grant
Micro resonator array system
Patent number
11,009,538
Issue date
May 18, 2021
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for detecting wafer processing parameters with micro resonat...
Patent number
10,901,021
Issue date
Jan 26, 2021
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
PRINTED MICROWAVE RESONATOR FOR MEASURING HIGH ELECTRON DENSITY PLA...
Publication number
20240412959
Publication date
Dec 12, 2024
Applied Materials, Inc.
David PETERSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROWAVE RESONATOR ARRAY FOR PLASMA DIAGNOSTICS
Publication number
20240371615
Publication date
Nov 7, 2024
Applied Materials, Inc.
David John Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE ACOUSTIC WAVE SENSOR ASSEMBLY
Publication number
20240356520
Publication date
Oct 24, 2024
Chuang-Chia Lin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
MINI SPECTROMETER SENSOR FOR IN-LINE, ON-TOOL, DISTRIBUTED DEPOSITI...
Publication number
20240331989
Publication date
Oct 3, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-CHAMBER LOW-PROFILE SENSOR ASSEMBLY
Publication number
20240290640
Publication date
Aug 29, 2024
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Application
WIRELESS DATA COMMUNICATION IN PLASMA PROCESS CHAMBER THROUGH VI SE...
Publication number
20240112885
Publication date
Apr 4, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...
Publication number
20240102876
Publication date
Mar 28, 2024
Applied Materials, Inc.
Chuang-Chia Lin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
RADICAL SENSOR SUBSTRATE
Publication number
20240035896
Publication date
Feb 1, 2024
Applied Materials, Inc.
CHUANG-CHIA LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SPECTRUM SENSOR WAFER OR ROBOT FOR CHAMBER CONDITION MONITO...
Publication number
20230326726
Publication date
Oct 12, 2023
Applied Materials, Inc.
Chuang-Chia Lin
B08 - CLEANING
Information
Patent Application
MICROWAVE RESONATOR ARRAY FOR PLASMA DIAGNOSTICS
Publication number
20230044262
Publication date
Feb 9, 2023
Applied Materials, Inc.
David John Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS RESONATOR SENSOR SUBSTRATE FOR PLASMA, TEMPERATURE, STRESS, OR...
Publication number
20230003598
Publication date
Jan 5, 2023
Applied Materials, Inc.
Chuang-Chia Lin
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
IN-CHAMBER LOW-PROFILE SENSOR ASSEMBLY
Publication number
20220172968
Publication date
Jun 2, 2022
Applied Materials, Inc.
Chuang-Chia Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE ACOUSTIC WAVE SENSOR ASSEMBLY
Publication number
20220116013
Publication date
Apr 14, 2022
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE ACOUSTIC WAVE SENSOR ASSEMBLY
Publication number
20220113208
Publication date
Apr 14, 2022
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Application
IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR
Publication number
20210398785
Publication date
Dec 23, 2021
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL WALL AND PROCESS SENSOR WITH PLASMA FACING SENSOR
Publication number
20210140824
Publication date
May 13, 2021
Applied Materials, Inc.
Chuang-Chia Lin
G01 - MEASURING TESTING
Information
Patent Application
HIGH QUALITY FACTOR EMBEDDED RESONATOR WAFERS
Publication number
20210080431
Publication date
Mar 18, 2021
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU OPTICAL CHAMBER SURFACE AND PROCESS SENSOR
Publication number
20200321201
Publication date
Oct 8, 2020
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICRO RESONATOR ARRAY SENSOR FOR DETECTING WAFER PROCESSING PARAMETERS
Publication number
20190265286
Publication date
Aug 29, 2019
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICRO RESONATOR ARRAY SYSTEM
Publication number
20190265288
Publication date
Aug 29, 2019
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETECTING WAFER PROCESSING PARAMETERS WITH MICRO RESONAT...
Publication number
20190265287
Publication date
Aug 29, 2019
Applied Materials, Inc.
Chuang-Chia Lin
H01 - BASIC ELECTRIC ELEMENTS