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Hsinfeng, CN
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last 30 patents
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Patent Grant
Electrical conditioning of MEMS device and insulating layer thereof
Patent number
7,547,568
Issue date
Jun 16, 2009
QUALCOMM MEMS Technologies, Inc.
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Electrical conditioning of MEMS device and insulating layer thereof
Publication number
20070196944
Publication date
Aug 23, 2007
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY